• Title/Summary/Keyword: interfacial adhesion

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Effect of Co Interlayer on the Interfacial Reliability of SiNx/Co/Cu Thin Film Structure for Advanced Cu Interconnects (미세 Cu 배선 적용을 위한 SiNx/Co/Cu 박막구조에서 Co층이 계면 신뢰성에 미치는 영향 분석)

  • Lee, Hyeonchul;Jeong, Minsu;Kim, Gahui;Son, Kirak;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.27 no.3
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    • pp.41-47
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    • 2020
  • The effect of Co interlayer on the interfacial reliability of SiNx/Co/Cu thin film structure for advanced Cu interconnects was systematically evaluated by using a double cantilever beam test. The interfacial adhesion energy of the SiNx/Cu thin film structure was 0.90 J/㎡. This value of the SiNx/Co/Cu thin film structure increased to 9.59 J/㎡.Measured interfacial adhesion energy of SiNx/Co/Cu structure was around 10 times higher than SiNx/Cu structure due to CoSi2 reaction layer formation at SiNx/Co interface, which was confirmed by X-ray photoelectron spectroscopy analysis. The interfacial adhesion energy of SiNx/Co/Cu structure decreased sharply after post-annealing at 200℃ for 24 h due to Co oxidation at SiNx/Co interface. Therefore, it is required to control the CoO and Co3O4 formation during the environmental storage of the SiNx/Co/Cu thin film to achieve interfacial reliability for advanced Cu interconnections.

Improvement of Adhesion Strength between Cu-based Leadframe and Fpoxy Molding Compound

  • Lee, Ho-Yoing
    • Transactions on Electrical and Electronic Materials
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    • v.1 no.3
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    • pp.23-28
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    • 2000
  • A block-oxide layer was formed on the surface of Cu-based leadframe by chamical oxidation method in order to enhance the adhesion strength between Cu-based leadframe and epoxy molding compound (EMC) Using sandwiched double cantilever beam (SDCB) specimens, the adesion strength was measured in terms of interfacial fracture toughness, G$\sub$IC//Results showed that the black-oxide layer was composed of two kinds of layers: pebble-like Cu$_2$O layer and acicular CuO layer, At the initial stage of oxidation the Cu$_2$O layer was preferentially formed and thickened up to around 200 nm whithin 1 minute of the oxidation time. Then the CuO layer started to from atop of the Cu$_2$O layer and thickened up to around 1300 nm until 20 minutes. As soon as the CuO layer formed, the thickness of Cu$_2$O layer began to reduce and finally reached to around 150 nm. The pre-cleaned and the Cu$_2$O coated leadframes showed almost no adhesion of EMC, however, as the CuO precipitates appeared and became continuous, G$\sub$IC/ increased up to around 80 J/㎡. Further oxidation raised G$\sub$IC/ up. to around 100 J/㎡.

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Evaluation of the Effect of High Temperature on the Interface Characteristics between Solid Oxide Fuel Cell and Ag Paste (고온열처리가 고체산화물연료전지의 전극과 Ag 페이스트의 계면에 미치는 특성 평가)

  • Jeon, Sang Koo;Nahm, Seung Hoon;Kwon, Oh Heon
    • Journal of the Korean Society of Safety
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    • v.30 no.1
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    • pp.21-27
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    • 2015
  • In this study, interfacial characteristics between SOFC and Ag paste as current collector was estimated in the high temperature environment. The Ag paste was used to connect the unit cell of SOFC strongly with interconnector and provide the electrical conductivity between them. To confirm electrical conductivity, Ag paste was treated in the furnace at $800^{\circ}C$ for 48 hours. The sheet resistance of Ag paste was measured to compare the resistance values before and after the heat treatment. Also, the four-point bending test was performed to measure the interfacial adhesion. The unit cell of SOFC and $SiO_2$ wafer were diced and then attached by Ag paste. The $SiO_2$ wafer had the center notch to initiate a crack from the tip of the notch. The modified stereomicroscope combined with the CCD camera and system for measuring the length was used to observe the fracture behavior. To compare the characteristics before heat treatment and after heat treatment, the specimen was exposed in the furnace at $800^{\circ}C$ for 48 hours and then the interfacial adhesion was evaluated. Finally, the interfacial adhesion energy quantitatively increases $1.78{\pm}0.07J/m^2$ to $4.9{\pm}0.87J/m^2$ between the cathode and Ag paste and also increase $2.9{\pm}0.47J/m^2$ to $5.12{\pm}1.01J/m^2$ between the anode and Ag paste through the high temperature. Therefore, it is expected that Ag paste as current collector was appropriate for improving the structural stability in the stacked SOFC system if the electrical conductivity was more increased.

Enhanced Interfacial Adhesion of Carbon Fibers by Poly (arylene ether phosphine oxide) Coatings (Poly(arylene ether phosphine oxide) 코팅에 의한 탄소섬유의 계면 접착성 향상 연구)

  • 김익천;강현민;육종일;윤태호
    • Composites Research
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    • v.12 no.4
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    • pp.55-61
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    • 1999
  • Interfacial shear strength (IFSS) of poly(arylene ether phosphine oxide) (PEPO) coated carbon fibers was evaluated via microdroplet test and compared with results obtained from carbon fibers coated with poly(arylene ether sulfone) (PES), Udel$^{\circledR}$ P-1700 and Ultem$^{\circledR}$ 1000. Interfacial adhesion between thermoplastics and uncoated carbon fibers was also measured in order to understand the adheion mechanism. PEPO coated carbon fibers showed the highest IFSS, followed by PES, Udel and Ultem coated fibers. A similar trend was observed for thermoplastic/uncoated fibers. SEM analysis indicated that only PEPO coated fiber exhibited cohesie failure in the vinylester resin, while others showed failure at or near the interface of polymer coating and vinylester resin. The enhanced interfacial adhesion by PEPO coating could be attributed to the strong interaction of P = 0 moiety to the fiber as well as to the vinylester resin.

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Interfacial Evaluation of Single Ramie and Kenaf Fibers/Epoxy Composites Using Micromechanical Technique (Micromechanical 시험법을 이용한 Kenaf 및 Ramie 섬유 강화 에폭시 복합재료의 계면물성 평가)

  • Park, Joung-Man;Tran, Quang Son;Jung, Jin-Gyu;Kim, Sung-Ju;Hwang, Byung-Sun
    • Journal of Adhesion and Interface
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    • v.6 no.2
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    • pp.13-20
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    • 2005
  • Interfacial shear strength (IFSS) of environmentally friendly natural fiber reinforced polymer composites plays a very important role in controlling the overall mechanical performance. The IFSS of various Ramie and Kenaf fibers/epoxy composites was evaluated using the combination of micromechanical test and nondestructive acoustic emission (AE) to find out optimal conditions for desirable final performance. Dynamic contact angle was measured for Ramie and Kenaf fibers and correlated the wettability properties with interfacial adhesion. Mechanical properties of Ramie and Kenaf fibers were investigated using single-fiber tensile test and analyzed statistically by both uni-and bimodal Weibull distributions. An influence of clamping effect on a real elongation for both Ramie and Kenaf fibers were evaluated as well. Two different microfailure modes, axial debonding and fibril fracture coming from fiber bundles and single fiber composites (SFC) were observed under tension and compression.

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Effect of Post-Annealing Conditions on Interfacial Adhesion Energy of Cu-Cu Bonding for 3-D IC Integration (3차원 소자 집적을 위한 Cu-Cu 접합의 계면접착에너지에 미치는 후속 열처리의 영향)

  • Jang, Eun-Jung;Pfeiffer, Sarah;Kim, Bi-Oh;Mtthias, Thorsten;Hyun, Seung-Min;Lee, Hak-Joo;Park, Young-Bae
    • Korean Journal of Materials Research
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    • v.18 no.4
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    • pp.204-210
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    • 2008
  • $1.5\;{\mu}m$-thick copper films deposited on silicon wafers were successfully bonded at $415^{\circ}C$/25 kN for 40 minutes in a thermo-compression bonding method that did not involve a pre-cleaning or pre-annealing process. The original copper bonding interface disappeared and showed a homogeneous microstructure with few voids at the original bonding interface. Quantitative interfacial adhesion energies were greater than $10.4\;J/m^2$ as measured via a four-point bending test. Post-bonding annealing at a temperature that was less than $300^{\circ}C$ had only a slight effect on the bonding energy, whereas an oxygen environment significantly deteriorated the bonding energy over $400^{\circ}C$. This was most likely due to the fast growth of brittle interfacial oxides. Therefore, the annealing environment and temperature conditions greatly affect the interfacial bonding energy and reliability in Cu-Cu bonded wafer stacks.

Fabrication and Cell Properties of Flattened Tube Segmented-in-Series Solid Oxide Fuel Cell-Stack Using Decalcomania Paper (전사지를 이용한 다전지식 평관형 고체산화물 연료전지 제작 및 셀 특성)

  • An, Yong-Tae;Ji, Mi-Jung;Park, Sun-Min;Shin, Sang-Ho;Hwang, Hae-Jin;Choi, Byung-Hyun
    • Korean Journal of Materials Research
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    • v.23 no.3
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    • pp.206-210
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    • 2013
  • In the segmented-in-series solid-oxide fuel cells (SIS-SOFCs), fabrication techniques which use decalcomania paper have many advantages, i.e., an increased active area of the electrode; better interfacial adhesion property between the anode, electrolyte and cathode; and improved layer thickness uniformity. In this work, a cell-stack was fabricated on porous ceramic flattened tube supports using decalcomania paper, which consists of an anode, electrolyte, and a cathode. The anode layer was $40{\mu}m$ thick, and was porous. The electrolyte layers exhibited a uniform thickness of about $20{\mu}m$ with a dense structure. Interfacial adhesion was improved due to the dense structure. The cathode layers was $30{\mu}m$ thick with porous structure, good adhesion to the electrolyte. The ohmic resistance levels at 800, 750 and $700^{\circ}C$ were measured, showing values of 1.49, 1.58 and $1.65{\Omega}{\cdot}cm^2$, respectively. The polarization resistances at 800, 750 and $700^{\circ}C$ were measured to be 1.63, 2.61 and $4.17cm^2$, respectively. These lower resistance values originated from the excellent interfacial adhesion between the anode, electrolyte and cathode. In a two-cell-stack SOFC, open-circuit voltages(OCVs) of 1.915, 1.942 and 1.957 V and maximum power densities(MPD) of 289.9, 276.1 and $220.4mW/cm^2$ were measured at 800, 750 and $700^{\circ}C$, respectively. The proposed fabrication technique using decalcomania paper was shown to be feasible for the easy fabrication of segmented-in-series flattened tube SOFCs.

Evaluating Interfacial Adhesion Properties of Pt/Ti Thin-Film by Using Acousto-Optic Technique (Acousto-Optic 기법을 이용한 Pt/Ti 박막 계면의 접합특성 평가)

  • Park, Hae-Sung;Didie, David;Yoshida, Sanichiro;Park, Ik-Keun
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.3
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    • pp.188-194
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    • 2016
  • We propose an acousto-optic technique for the nondestructive evaluation of adhesion properties of a Pt/Ti thin-film interface. Since there are some problems encountered when using prevailing techniques to nondestructively evaluate the interfacial properties of micro/nano-scale thin-films, we applied an interferometer that combined the acoustic and optical methods. This technique is based on the Michelson interferometer but the resultant surface of the thin film specimen makes interference instead of the mirror when the interface is excited from the acoustic transducer at the driving frequency. The thin film shows resonance-like behavior at a certain frequency range, resulting in a low-contrast fringe pattern. Therefore, we represented quantitatively the change in fringe pattern as a frequency spectrum and discovered the possibility that the interfacial adhesion properties of a thin film can be evaluated using the newly proposed technique.