CMP properties of $SnO_2$ thin film by different slurry
(슬러리 종류에 따른 $SnO_2$ 박막의 광역평탄화 특성)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2004.07a
- /
- pp.389-392
- /
- 2004