• Tribology and Lubricants
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• 제38권5호
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• pp.199-204
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• 2022

This paper presents a numerical investigation of the influence of water molecule thickness on frictional behavior at the nanoscale using molecular dynamics simulation. Three different models, comprising water thin films of various thicknesses, were built, and indentation and sliding simulations were performed using the models. Various normal loads were applied by indenting the Si tip on the water film for the sliding simulation to evaluate the interplay between the water thin film thickness and the normal load. The results of the simulations showed that the friction force generally increased with respect to the normal load and thickness of the water thin film. The friction coefficient varied with respect to the normal load and the water film thickness. The friction coefficient was the smallest under a moderate normal force and increased with decreasing or increasing normal loads. As the water film became thicker, the contact area between the tip and water film became larger. Under well-lubricated conditions, the friction force was proportional to the contact area regardless of the water film thickness. As the normal force increased above a critical condition, the water molecules beneath the Si tip spread out; thus, the film could not provide lubrication. Consequently, the substrate was permanently deformed by direct contact with the Si tip, while the friction force and friction coefficient significantly increased. The results suggest that a thin water film can effectively reduce friction under relatively low normal load and contact pressure conditions. In addition, the contact area between the contacting surfaces dominates the friction force.

• 비파괴검사학회지
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• 제33권2호
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• pp.129-137
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• 2013

나노압입시험기의 힘교정과 압입자에 대한 3차원 형상 관찰 및 분석이 본 연구에서 진행되었다. 표준분동으로 교정한 마이크로밸런스로 나노압입시험기에서 발생시킨 하중을 측정하여 측정치와 발생치의 비로 압입하중을 교정하였고, 나노압입시험의 시작점인 초기 접촉 하중도 확인할 수 있었다. 삼각뿔 압입자를 원자현미경으로 관찰하여 분석한 결과 비교적 사용이력이 없는 압입자 A와 마모된 압입자 B의 첨단곡률반경은 각각 $19.71{\pm}3.03$ nm와 $1043.94{\pm}50.91$ nm로 결정되었다. 완벽한 삼각뿔 압입자 형상과 중첩하여 압입자 A와 B의 첨단무딘깊이(bluntness depth)를 1.22 nm와 64.56 nm로 결정하였고, 용해실리카 기준시편에 수행한 나노압입시험 결과를 살펴본 결과 두 압입자의 압입하중-변위곡선들이 무딘깊이 차이만큼 수평축으로 서로 어긋나 있음을 확인할 수 있었다. 수평 이동을 통해 보정된 압입곡선의 분석을 통해 개별 압입자 면적함수에 대한 고려없이 1.11 % 이내에서 동일한 용해실리카의 나노경도를 결정할 수 있었다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2004년도 학술대회지
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• pp.215-220
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• 2004

Molecular Dynamics(MD) method was used to investigate the change of friction force due to interaction between dislocations and a grain boundary when a Ni tip was scratched on a Cu bicrystal. The substrate comprised a Cu bicrystal containing a vertical$\Sigma=5(210)$ grain boundary. The moving tip for scratching simulation was consisted of fixed Ni atoms emulating a rigid tip. The indentation depth was $3.6\AA$ and the scratching was performed along <110>direction in the first grain. As the scratching was continued, nucleation and propagation of dislocations were observed. In the early stage, the grain boundary played as a barrier to moving dislocations and interrupting further dislocation movement with no dislocation resulting in no propagation across the grain boundary. As the Ni tip approached the grain boundary, dislocations were nucleated at the grain boundary and propagated to the second grain. However, stick-slip phenomena that were observed on a single crystal scratching were not observed in the bicrystal. And, instead, irregular oscillation of friction force was observed during the scratching due to the presence of a grain boundary.

• 한국재료학회지
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• 제13권9호
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• pp.606-612
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• 2003

Surface and mechanical properties of thin films with submicron thickness was characterized by nanoindentation with Berkovich and Vickers tips, and scanning probe microscopy. Nanoindention was made in a depth range of 15 to 200 nm from the surface by applying tiny force in a range from 150 to $9,000 \mu$N. Stiffness, contact area, hardness, and elastic modulus were determined from the force-displacement curve obtained. Reliability was first tested by using fused quartz, a standard sample. Elastic modulus and hardness values of fused quartz measured were the same as those reported in the literature within two percent of error. Mechanical properties of ITO thin film were characterized in a depth range of 15∼200nm. As indentation depth increased, elastic modulus and hardness decreased by substrate effect. Ion beam deposited DLC thin films were indented in a depth range of 40∼50 nm. The results showed that the DLC thin film using benzene and bias voltage 0∼-50 V has elastic modulus and hardness value of 132 and 18 GPa respectively. Pure DLC thin films showed roughnesses lower than 0.25 nm, but silicon-added DLC thin films showed much higher roughness values, and the wavy surface morphology.

• 대한기계학회논문집A
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• 제26권2호
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• pp.387-398
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• 2002

The impact response and damage of CLAS panel was investigated experimentally. The facesheet material used was RO4003 woven-glass hydrocarbon/ceramic and the core material was Nomex honeycomb with a cell size of 3.2mm and a density of 96 kg/㎥. The shield plane used was RO4003 and 2024-T3 aluminum. Static indentation and impact test was conducted to characterize the type and extent of the damage observed in two CLAS panels, and the performance of antenna used in a wireless LAN system. Correlation of peak contact force, residual indentation and the delamination area shows impact damage of the panel with an aluminum shield plane is larger than that of the panel with RO4003 shield plane, although the former is more penetration resistant. The damage was observed by naked eye, ultrasonic inspection and cross sectioning. The shape and size of delamination was estimated by ultrasonic inspection, and the area of delamination linearly increases as impact energy increases. The performance of impact damaged antenna was estimated by measuring return loss and radiation pattern. It was revealed that the performance of antenna was related to the impact damage and there was a threshold that the performance of antenna fell as impact energy level changed. The threshold was between the impact energies of 1.5J and 1.75J.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1507-1510
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• 2005

This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

• 한국재료학회지
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• 제30권4호
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• pp.169-175
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• 2020

Silicon nitride thin films are deposited by RF (13.57 MHz) magnetron sputtering process using a Si (99.999 %) target and with different ratios of Ar/N₂ sputtering gas mixture. Corning G type glass is used as substrate. The vacuum atmosphere, RF source power, deposit time and temperature of substrate of the sputtering process are maintained consistently at 2 ~ 3 × 10^-3 torr, 30 sccm, 100 watt, 20 min. and room temperature, respectively. Cross sectional views and surface morphology of the deposited thin films are observed by field emission scanning electron microscope, atomic force microscope and X-ray photoelectron spectroscopy. The hardness values are determined by nano-indentation measurement. The thickness of the deposited films is approximately within the range of 88 nm ~ 200 nm. As the amount of N₂ gas in the Ar:N₂ gas mixture increases, the thickness of the films decreases. AFM observation reveals that film deposited at high Ar:N₂ gas ratio and large amount of N₂ gas has a very irregular surface morphology, even though it has a low RMS value. The hardness value of the deposited films made with ratio of Ar:N₂=9:1 display the highest value. The XPS spectrum indicates that the deposited film is assigned to non-stoichiometric silicon nitride and the transmittance of the glass with deposited SiO₂-Si_xN_y thin film is satisfactory at 97 %.

• 마이크로전자및패키징학회지
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• 제27권3호
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• pp.83-88
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• 2020

최근 스마트폰 산업의 발전으로 인하여 실사용 환경에서 유연소자의 기계적 거동에 대한 연구가 많이 이루어지고 있다. 유연소자 박막은 두께가 나노 단위이고, 기존의 시험법으로 측정하기 어려워 주로 나노압입시험을 이용하여 경도, 탄성계수 등의 특성을 구하고 있다. 그러나 현재 널리 쓰이고 있는 분석법(Oliver-Pharr Method)은 기판의 영향이 이론적으로 고려되지 않아 단순히 적용하기에는 무리가 있다. 따라서 본 연구에서는 기판 영향을 고려한 타 연구자들의 모델에 대한 적용성을 확인하고, 압입자와 시편 표면에서 발생하는 소성쌓임 현상(pile-up)에 대해 압입깊이의 보정을 실시하였다. 유연소자 박막의 탄성계수를 평가하고 검증하기 위하여 폴리이미드 및 실리콘 웨이퍼 기판 위에 금속, 비정질 박막을 증착하여 실제 실험을 수행하여 비교하였다.

• 한국세라믹학회지
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• 제42권8호
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• pp.554-560
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• 2005

The engineering ceramic needs the properties of high strength, hardness, corrosion-resistance and heat-resistance in order to withstand thermal shock or applied nonuniform stresses without failure. The densely coated porous ceramics can be used for machine component, electromagnetic component, bio-system component and energy-system component by their high-performances from superior coating properties and light-weight characteristics due to the structure including pore by itself. In this study we controlled the porosity of silica and alumina, $8.2\~25.4\%$ and $23.4\~36.0\%$, respectively, by the control of sintering temperature and starting powder size. We made bilayer structures, consisting of a transparent glass coating layer bonded to a thick substrate of different porous ceramics by a thin layer of epoxy adhesive, facilitated observations of crack initiation and propagation. The elastic modulus mismatch could be controlled using different porous ceramics as the substrate layer. Then we applied 150 N force using WC sphere with a radius of 3.18 mm by Hertzian indentation. As a result, the crack initiation in the coating layer was delayed at lower porosity in the substrate layer, and the damage in the coating layer was relatively smaller at the bilayer structure coated on higher elastic substrate.

• 대한기계학회논문집B
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• 제36권2호
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• pp.117-123
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• 2012

본 연구에서는 벌지 실험과 나노 압입 실험을 통해 박막의 기계적 물성을 측정하였다. 벌지 실험은 외적 지지구조를 가지지 않는 박막 시편의 한 면에 일정한 압력을 가하여 박막의 변위를 측정, 압력과 변위의 관계를 이용하여 박막의 기계적 물성을 측정하는 실험이다. 나노 압입 실험은 시편에 압입 방향으로의 하중과 시편의 표면으로부터 압입자의 깊이에 대한 데이터를 통하여 시편의 기계적 물성을 측정하는 실험으로 modified King's model 을 이용하여 모재의 영향이 고려된 박막의 물성을 구할 수 있다. 두 실험은 탄성 계수와 푸아송비의 수학적 관계가 다르기 때문에 벌지 실험과 나노 압입 실험결과로부터 박막의 탄성계수와 푸아송비를 동시에 측정할 수 있다.