• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.2
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• pp.104-108
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• 2015

Al thin films were deposited on TiN/Si(100) via metal-organic chemical vapor deposition using N-methylpyrrolidine alane as a precursor. Characterization of the deposited films were investigated with SEM, XRD, ${\alpha}$-step, AFM, 4-point probe. The early stage of Al thin film deposition was analyzed by in-situ surface reflectance measurement with laser and photometer apparatus. The surface reflectance were changed greatly during the initial 30~40 seconds. There were two increases and two decreases in the surface reflectance, thus the sequence of Al films were deposited at 8 significant points of the surface reflectance change. Surface topograph and cross-sectional view of each film were analyzed with SEM. Al films were grown in the complex mechanism of Volmer-Weber and Stranski-Krastanov process.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.3
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• pp.494-503
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• 1997

We investigated the initial stages of formation of the Cu/polyimide interface using another two methods by X-ray photoelectron spectroscopy. : One, in-situ measurement with increasing of Cu deposition thickness onto polyimide(PI), the other, measurement with decreasing of Cu thickness of Cu/pI film by $Ar^+$ ion etching. From these results, we find that the chemical reactions exist in Cu/PI interface. However, the measured chemical reactions were different according to experimental method.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• Proceedings of the Korean Radioactive Waste Society Conference
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• 2018.11a
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• pp.363-364
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• 2018

• Journal of Radiation Protection and Research
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• v.43 no.3
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• pp.85-96
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• 2018

Background: A variety of inorganic scintillators have been developed and improved for use in radiation detection and measurement, and in situ gamma-ray spectrometry in the environment remains an important area in nuclear safety. In order to verify the feasibility of promising scintillators in an actual environment, a performance test is necessary to identify gamma-ray peaks and calculate the radioactivity from their net count rates in peaks. Materials and Methods: Among commercially available scintillators, $LaBr_3(Ce)$ scintillators have so far shown the highest energy resolution when detecting and identifying gamma-rays. However, the intrinsic background of this scintillator type affects efficient application to the environment with a relatively low count rate. An algorithm to subtract the intrinsic background was consequently developed, and the in situ calibration factor at 1 m above ground level was calculated from Monte Carlo simulation in order to determine the radioactivity from the measured net count rate. Results and Discussion: The radioactivity of six natural radionuclides in the environment was evaluated from in situ gamma-ray spectrometry using an $LaBr_3(Ce)$ detector. The results were then compared with those of a portable high purity Ge (HPGe) detector with in situ object counting system (ISOCS) software at the same sites. In addition, the radioactive cesium in the ground of Jeju Island, South Korea, was determined with the same assumption of the source distribution between measurements using two detectors. Conclusion: Good agreement between both detectors was achieved in the in situ gamma-ray spectrometry of natural as well as artificial radionuclides in the ground. This means that an $LaBr_3(Ce)$ detector can produce reliable and stable results of radioactivity in the ground from the measured energy spectrum of incident gamma-rays at 1 m above the ground.

• Journal of Korean Tunnelling and Underground Space Association
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• v.4 no.1
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• pp.57-70
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• 2002

Since early in the 90's, the need for construction of underground rock structures such as long and large section traffic tunnel, energy storage cavern, industrial facility, etc. has been largely increased because the Korean territory is not wide and about 65 % of the land consists of mountainous region. The initial rock stress measurement has been widely conducted to provide the quantitative information on the stress state of engineering site at the design stage of underground rock structures. Among the diverse methods developed for measuring rock stress, hydraulic fracturing test is most popularly used because it is applicable at pre-construction stage and has no limit in testing depth. In this paper, the characteristics of initial rock stress state in mountainous region were studied on the basis of the in-situ hydraulic fracturing stress measurement results from the 60 test boreholes in various parts of Korea.

• Vacuum Magazine
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• v.2 no.2
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• pp.4-11
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• 2015

During last two decades, remarkable progresses have been made in organic electronic devices, such as organic light-emitting device, organic photovoltaic and many other applied devices. Many of these progress are attributed to the multilayered/heterojunction device architectures, which could be achieved from the control of "interfacial energetics". In that sense, the interfacial electronic structures in organic electronic devices have a decisive role in device performance. However, the prediction of the interfacial electronic structures from each separate material is not trivial. Many complex phenomena occur at the interface and these can be only understood from thorough measurements on interfacial electronic structures in situ. Photoemission and inverse photoemission spectroscopy have been known as the most proper measurement tools to analyze these interfacial electronic structures. In this review, the basic principles of (inverse) photoemission spectroscopy and typical measurement results on organic/inorganic interfaces are introduced.

• KIEAE Journal
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• v.16 no.4
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• pp.71-77
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• 2016

Purpose : The energy saving in a residential building (apartment) sector is known as one of the effective solution of energy reduction. In South Korea, the government has recently reinforced regulations associated with the energy performance of buildings. However, there is a lack of research on the methods for the energy performance diagnosis that is used to analyze the wall thermal performance of the existing apartments. Because a reliable diagnosis is necessary to save the building energy, this study analyzed wall thermal performance of an existing apartment in Seoul. Method : This paper applied two methods for analysis of the thermal insulation performance; HFM(Heat Flow Meter) method and ASTR(Air-Surface Temperature Ratio) method. The HFM method is suggested by ISO9869-1 code to measure the thermal performance. The ASTR method is proposed by this study for the simplified In-situ measurement and it uses three temperature data (interior wall surface, interior and exterior air) and the overall heat transfer coefficient. This study conducted the experiment of an existing apartment in Seoul using these methods and analyzed the results. Furthermore, the energy simulation tool of the building was used to suggest retrofit of the building based on the results of measurements. Result : The error rate of HFM method and ASTR method was analyzed in about 17 to 20%. As the results of comparison between the initial design values of the wall and the measured values, the 26% degradation of insulation thermal performance was measured. Lastly, the energy simulation tool of the building shows 10.8% energy savings in accordance with the construction of suggested retrofit.

• The Journal of Korean Society of Virology
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• v.30 no.2
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• pp.125-130
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• 2000

Infection with human cytomegalovirus (HCMV) is of considerable clinical relevance after placental transmission and in immunosuppressed patients such as transplant recipients or patients with AIDS. The rapid detection method of HCMV has been required to overcome the time-consuming methods such as classical plaque assay or other immunological methods. This study was performed to establish the in situ ELISA, in which human lung fibroblasts infected with HCMV were fixed and used directly as antigen in 96 well culture plate. Expressed HCMV antigens were detected with HCMV-specific monoclonal antibodies. This method could detect HCMV dose-dependently upto $3{\times}10^2\;pfu/ml$. Antiviral activity of ganciclovir could be assayed within the known range of effective dose. This result showed that HCMV could be quantitated by in situ ELISA. The chemical, which was selected on the basis of component analysis in natural product, was tested to have the anti-HCMV activity by in situ ELISA, and three among five samples were found to have anti-HCMV activity with the dose-dependent manner. Conclusively in situ ELISA could be useful method for quantitation of HCMV and screening antiviral activity of samples to HCMV.

• Atmosphere
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• v.32 no.3
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• pp.247-261
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• 2022

The importance of ozone monitoring has been growing due to the polar ozone depletion and increasing tropospheric ozone concentration over many Asian countries, including South Korea. In-situ measurement of the vertical ozone structure has advantages for ozone research, but observations are not sufficient. In this study, ozonesonde measurements were performed from October to November in Yongin during the GMAP (The GEMS Map of Air Pollution) 2021 campaign. The procedure for ozonesonde preparation and initial analysis of the observed ozone profile are documented. The observed ozone concentrations are in good agreement with previous studies in the troposphere, and they capture the stratospheric ozone distribution as well, including stratosphere-troposphere exchange event. These balloon-borne in situ measurements can contribute to the evaluation of remote sensing measurements such as Geostationary Environment Monitoring Spectrometer (GEMS). This document focuses on providing essential information of ozonesonde preparation and measurement for domestic researchers.