• Transactions on Electrical and Electronic Materials
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• 제14권5호
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• pp.254-257
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• 2013

In-situ optical emission spectroscopy (OES) is employed for PECVD chamber monitoring. OES is used as an addon sensor to monitoring and cleaning end point detection (EPD). On monitoring plasma chemistry using OES, the process gas and by-product gas are simultaneously monitored. Principal component analysis (PCA) enhances the capability of end point detection using OES data. Through chamber cleaning monitoring using OES, cleaning time is reduced by 53%, in general. Therefore, the gas usage of fluorine is also reduced, so satisfying Green Fab challenge in semiconductor manufacturing.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1006-1009
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• 2006

The chemical structure of the interface between Ag with $Li_2O$ and tri (8-hydroxyquinoline) aluminum (Alq) was investigated by using in-situ characterization of x-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS). $Li_2O$ on Ag had lower barrier height than LiF on Ag. XPS and UPS results show the interaction between $Li_2O$ and Alq leads to gap state formation in HOMO of Alq.

• 한국세라믹학회지
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• 제45권12호
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• pp.788-795
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• 2008

An electrolyte supported SOFC cell was tested at $800^{\circ}C$ in air for 3600 h with an applied current density of $200\;mA/cm^2$ to examine possible cathode degradation issues. A scandium- stabilized zirconia (ScSZ) with additional manganese doping (ScSZ: Mn) was used as electrolyte. A strontium and copper-doped lanthanum ferrite (LaSrCuFe) and platinum were used as cathode and quasi-anode material, respectively. The DC resistance was logged over the complete testing period. Additionally, impedance spectroscopy was used from time to time to track changes of the cell in-situ. Post-test analysis of the cell using methods like scanning electron microscopy imaging and other electrochemical testing methods allow the identification of different degradation sources. The results indicate a promising combination of electrolyte and cathode material in terms of chemical compatibility and electrical performance.

• 한국표면공학회지
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• 제55권6호
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• pp.342-352
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• 2022

Purine catabolite screening enables reliable diagnosis of certain diseases. In this regard, the development of a facile detection strategy with high sensitivity and selectivity is demanded for point-of-care applications. In this work, the simultaneous detection of uric acid (UA), xanthine (XA), and hypoxanthine (HX) was carried out as model purine catabolites by surface-enhanced Raman Spectroscopy (SERS). The detection assay was conducted by employing high-aspect ratio Au nanopillar substrates coupled with in-situ Au electrodeposition on the substrates. The additional modification of the Au nanopillar substrates via electrodeposition was found to be an effective method to encapsulate molecules in solution into nanogaps of growing Au films that increase metal-molecule contact and improve substrate's sensitivity and selectivity. In complex solutions, the approach facilitated ternary identification of UA, XA, and HX down to concentration limits of 4.33 𝜇M, 0.71 𝜇M, and 0.22 𝜇M, respectively, which are comparable to their existing levels in normal human physiology. These results demonstrate that the proposed platform is reliable for practical point-of-care analysis of biofluids where solution matrix effects greatly reduce selectivity and sensitivity for rapid on-site disease diagnosis.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2002년도 춘계공동학술발표회요약집
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• pp.420.1-420
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• 2002

Thermal decomposition reaction of gas-phase UO2(hfacac)2. THF was investigated in a static cell. IR spectroscopic method was used to study the thermal decomptsition of gas phase uranyl complexes. The decomposition reaction products were separated by using thermal-gradient fractional sublimation method utilizing the differences in their volatility.

• 자원환경지질
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• 제40권5호
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• pp.563-574
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• 2007

LIBS는 시료 표면에서 발생된 플라즈마로부터 방출되는 원자들의 분광선을 측정함으로써 물질의 화학적 조성을 감지, 확인, 정량화할 수 있는 최신의 분석기술로 기존의 전형적인 원소분석방법에 비해 현장분석기술로서의 더 많은 장점을 가지고 있다. LIBS는 최소한의 시료로 복잡한 분석과정을 피함으로 신속한 분석을 가능케 하고, 기기의 다방면적의 적용가능성과 단순함으로 인해 신속하게 가스, 고체, 액체상에서 다원소를 동시에 분석할 수 있는 레이저 기반의 분석기술로 지구화학적 분석, 탐사 혹은 환경분석에서 현장 이동성을 가진 센서로의 가능성 측면에서 매력적인 도구가 된다. 그러나 현장분석기술로서 토양환경에 적용하기에는 여전히 해결해야 할 문제들이 있다. 문헌연구를 통해 기본적인 작용원리인 플라즈마 형성과 물질붕괴과정을 고찰하고 현장분석기술로서 LIBS의 현 위치를 살펴본다. 또한 토양환경에 적용하기 위해 매질의 특성, 레이저 특성 및 분석신호에 영향을 미치는 다양한 인자들을 살펴보아 LIBS에 대한 기본적 이해를 돕고자 한다. 또한 분석에 미치는 영향 인자들을 보정해 분석 결과의 정확도, 정밀도 및 검출 한계 등 분석의 질을 향상 시킬 수 있는 기법 등을 다양한 문헌 연구를 통해 살펴봄으로써 추후 국내 토양환경분야의 LIBS 현장기술의 적용가능성을 고찰해보고자 한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2003년도 제24회 학술발표회 초록집
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• pp.216-216
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• 2003

• 천문학회보
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• 제36권2호
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• pp.144.1-144.1
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• 2011

We explore the metallicity distribution of the Galactic halo based on the SDSS ugriz photometry. We use empirically calibrated sets of stellar isochrones to determine distances and metallicities of individual main-sequence stars in the halo. At heliocentric distances greater than 5 kpc, we find that the in situ photometric metallicity distribution reveals chemically divided dual halo components, which supports arguments from earlier studies based on the medium resolution spectroscopy. Our finding provides an unbiased estimate of relative fractions of each of these stellar components in the Galactic halo.

• 한국진공학회지
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• 제12권S1호
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• pp.17-20
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• 2003

We have studied magnetic and structural properties of ultrathin Ni films grown on PI(lII) surface using in situ surface magneto-optic Kerr effect and X-ray photoelectron spectroscopy. Perpendicular magnetic anisotropy was absent, and longitudinal Kerr signal was only detectable for Ni films thicker than 6 monolayers. Enhancement in longitudinal Kerr signal by 30% was achieved by post-annealing at temperatures below 800K, but upon annealing at 820K, surface alloy was formed. By using core-level binding-energy shifts, the composition was determined to be Ni 70 at. %.

• 한국막학회:학술대회논문집
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• 한국막학회 2003년도 The 4th Korea-Italy Workshop
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• pp.47-50
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• 2003

Carbon-silica membranes were Prepared by Pyrolyzing polyimide/silica composite obtained from ill-situ polymerization of alkoxy silanes via sol-gel reaction. In this study, effects of silica content and silica network in polyimide matrix were focused on the gas permeation and separation properties of the final carbon-silica membrane. The membranes prepared were characterized with a field emission scanning electron microscopy (FE-SEM), a solid state $^{29}$ Si nuclear magnetic resonance spectroscopy ($^{29}$ Si-NMR), an electron spectroscopy for chemical analysis (ESCA), a thermogravimetric analysis (TGA) and gas permeation tests.