• Title/Summary/Keyword: hydrogen plasma

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Sterilization of Seawater for the Ballast Water Management System (선박평형수 관리시스템을 위한 해수 살균법)

  • YUN, YONGSUP;CHOI, JONGBEOM;KANG, JUN;LEE, MYEONGHOON
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.172-172
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    • 2016
  • The International Maritime Organization(IMO) adopted the International Convention for the Control and Management of Ships' Ballast Water and Sediments in 2004 to prevent the transfer of aquatic organisms via ballast water. Forty ballast water treatment systems were granted final approval. A variety of techniques have been developed for ballast water treatment including UV treatment, indirect or direct electrolysis, ozone treatment, chemical compounds and plasma-arc method. In particular, using plasma and ozone nano-bubble treatments have been attracted in the fields. However, these treatment systems have a problem such as remained toxic substance, demand for high power source, low efficiency, ets. In this paper, we present our strilization results obtained from membrane type electrolytic-reduction treatment system The core of an electrolysis unit is an electrochemical cell, which is filled with pure water and has two electrodes connected with an external power supply. At a certain voltage, which is called critical voltage, between both electrodes, the electrodes start to produce hydrogen gas at the negatively biased electrode and oxygen gas at the positively biased electrode. The amount of gases produced per unit time is directly related to the current that passes through the electrochemical cell. From the results, we could confirm the sterilization effect of bacteria such as S. aureus, E. Coli and demonstrate the mechanism of sterilization phenomena by electrolytic-reduction treatment system.

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Passivation properties of SiNx and SiO2 thin films for the application of crystalline Si solar cells (결정질 실리콘 태양전지 응용을 위한 SiNx 및 SiO2 박막의 패시베이션 특성 연구)

  • Jeong, Myung-Il;Choi, Chel-Jong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.24 no.1
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    • pp.41-45
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    • 2014
  • We have investigated the passivation property of $SiN_x$ and $SiO_2$ thin films formed using various process conditions for the application of crystalline Si solar cells. An increase in the thickness of $SiN_x$ deposited using plasma enhanced chemical vapor deposition (PECVD) led to the improvement of passivation quality. This could be associated with the passivation of Si dangling bonds by hydrogen atoms which were supplied during PECVD deposition. The $SiO_2$ thin films grown using dry oxidation process exhibited better passivation behavior than those using wet oxidation process, implying the dry oxidation process was more effective in the formation of high quality $SiO_2$ thin films. The relative effective life time gradually decreased with increasing dry oxidation temperature. Such a degradation of passivation behavior could be attributed to the increase in interface trap density caused by thermal damages.

Silicon surface texturing for enhanced nanocrystalline diamond seeding efficiency (나노결정질 다이아몬드 seeding 효율 향상을 위한 silicon 표면 texturing)

  • Park, Jong Cheon;Jeong, Ok Geun;Kim, Sang Youn;Park, Se Jin;Yun, Young-Hoon;Cho, Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.2
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    • pp.86-92
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    • 2013
  • $SF_6/O_2$ inductively coupled plasmas were employed to texture Si surface as a pretreatment for nanocrystalline diamond film growth. It was found that the $SF_6/O_2$ plasma texturing provided a very wide process window where normalized roughness values in the range of 2~16 could be obtained. Significantly improved nucleation densities of ${\sim}6.5{\times}10^{10}cm^{-2}$ compared to conventional mechanical abrasion were achieved after seeding for the textured Si substrate.

A Study on Modified Silicon Surface after $CHF_3/C_2F_6$ Reactive Ion Etching

  • Park, Hyung-Ho;Kwon, Kwang-Ho;Lee, Sang-Hwan;Koak, Byung-Hwa;Nahm, Sahn;Lee, Hee-Tae;Kwon, Oh-Joon;Cho, Kyoung-Ik;Kang, Young-Il
    • ETRI Journal
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    • v.16 no.1
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    • pp.45-57
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    • 1994
  • The effects of reactive ion etching (RIE) of $SiO_2$ layer in $CHF_3/C_2F_6$ on the underlying Si surface have been studied by X-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometer, Rutherford backscattering spectroscopy, and high resolution transmission electron microscopy. We found that two distinguishable modified layers are formed by RIE : (i) a uniform residue surface layer of 4 nm thickness composed entirely of carbon, fluorine, oxygen, and hydrogen with 9 different kinds of chemical bonds and (ii) a contaminated silicon layer of about 50 nm thickness with carbon and fluorine atoms without any observable crystalline defects. To search the removal condition of the silicon surface residue, we monitored the changes of surface compositions for the etched silicon after various post treatments as rapid thermal anneal, $O_2$, $NF_3$, $SF_6$, and $Cl_2$ plasma treatments. XPS analysis revealed that $NF_3$ treatment is most effective. With 10 seconds exposure to $NF_3$ plasma, the fluorocarbon residue film decomposes. The remained fluorine completely disappears after the following wet cleaning.

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Role of $N_2$ flow rate on etch characteristics and variation of line edge roughness during etching of silicon nitride with extreme ultra-violet resist pattern in dual-frequency $CH_2F_2/N_2$/Ar capacitively coupled plasmas

  • Gwon, Bong-Su;Jeong, Chang-Ryong;Lee, Nae-Eung;Lee, Seong-Gwon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.458-458
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    • 2010
  • The process window for the etch selectivity of silicon nitride ($Si_3N_4$) layers to extreme ultra-violet (EUV) resist and variation of line edge roughness (LER) of EUV resist were investigated durin getching of $Si_3N_4$/EUV resist structure in a dual-frequency superimposed capacitive coupled plasma (DFS-CCP) etcher by varying the process parameters, such as the $CH_2F_2$ and $N_2$ gas flow rate in $CH_2F_2/N_2$/Ar plasma. The $CH_2F_2$ and $N_2$ flow rate was found to play a critical role in determining the process window for infinite etch selectivity of $Si_3N_4$/EUV resist, due to disproportionate changes in the degree of polymerization on $Si_3N_4$ and EUV resist surfaces. The preferential chemical reaction between hydrogen and carbon in the hydrofluorocarbon ($CH_xF_y$) polymer layer and the nitrogen and oxygen on the $Si_3N_4$, presumably leading to the formation of HCN, CO, and $CO_2$ etch by-products, results in a smaller steady-state hydrofluorocarbon thickness on $Si_3N_4$ and, in turn, in continuous $Si_3N_4$ etching due to enhanced $SiF_4$ formation, while the $CH_xF_y$ layer is deposited on the EUV resist surface. Also critical dimension (and line edge roughness) tend to decrease with increasing $N_2$ flow rate due to decreased degree of polymerization.

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Property Evaluation of Ti Powder and Its Sintered Compacts Prepared by Ti Scrap (티타늄 스크랩을 이용한 분말제조 및 소결 성형체의 특성평가)

  • Lee, Seung-Min;Choi, Jung-Chul;Park, Hyun-Kuk;Woo, Kee-Do;Oh, Ik-Hyun
    • Korean Journal of Materials Research
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    • v.20 no.3
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    • pp.125-131
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    • 2010
  • In this study, Ti powders were fabricated from Ti scrap by the Hydrogenation-Dehydrogenation (HDH) method. The Ti powders were prepared from the spark plasma sintering (SPS) and their microstructure was investigated. Hydrogenation reactions of Ti scrap occurred at near $450^{\circ}C$ with a sudden increase in the reaction temperature and the decreasing pressure of hydrogen gas during the hydrogenation process in the furnace. The dehydrogenation process was also carried out at $750^{\circ}C$ for 2 hrs in a vacuum of $10^{-4}$ torr. After the HDH process, deoxidation treatment was carried out with the Ca (purity: 99.5%) at $700^{\circ}C$ for 2 hrs in the vacuum system. It was found that the oxidation content of Ti powder that was deoxidized with Ca showed noticeably lower values, compared to the content obtained by the HDH process. In order to fabricate the Ti compacts, Ti powder was sintered under an applied uniaxial punch pressure of 40 MPa in the range of $900-1200^{\circ}C$ for 5 min under a vacuum of $10^{-4}$ torr. The relative density of the compact was 99.5% at $1100^{\circ}C$ and the tensile strength decreased with increasing sintering temperature. After sintering, all of the Ti compacts showed brittle fracture behavior, which occurred in an elastic range with short plastic yielding up to a peak stress. Ti improved the corrosion resistance of the Ti compacts, and the Pd powders were mixed with the HDH Ti powders.

Oxidative Stress and Apoptosis in Goldfish (Carassius auratus) Caused by Exposure to Different Concentrations of Micro-polystyrene

  • Li, Zhongze;Song, Jin Ah;Choi, Cheol Young
    • Ocean and Polar Research
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    • v.43 no.3
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    • pp.141-148
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    • 2021
  • Microplastic contamination in waterbodies is a growing source of concern for researchers and other stakeholders. We investigated oxidative stress and toxicity in goldfish (Carassius auratus) in response to exposure to 1-㎛ diameter micro-polystyrene (MP) at concentrations of 0, 10, 100, and 1000 beads/mL (MP 0, MP 10, MP 100, and MP 1000 groups) for 7 d (at day 0, 1, 3, 5, and 7). We analyzed the survival rates; superoxide dismutase (SOD) and catalase (CAT) mRNA expression levels in the liver; SOD and CAT activity in the plasma; caspase-3 mRNA expression in the liver; and the levels of hydrogen peroxide (H2O2) in plasma. Terminal transferase dUTP nick end labeling (TUNEL) assays were also conducted to determine apoptosis levels in the liver. All fish in the MP 1000 group died by day 7 and the MP 100 group had a lower survival rate than the MP 10 and MP 0 groups. The mRNA expression as well as SOD, CAT, and caspase-3 activity levels were increased significantly with increases in MP concentration and exposure time. Finally, according to the TUNEL assay, more apoptosis was observed in the MP 1000 group at day 5 than in other groups. In summary, MP concentrations above 100 beads/mL caused death and oxidative stress to goldfish. We conclude that MP can cause oxidative stress and apoptosis in goldfish, which leads to death.

Effect of pre-treatment of AZ91 Mg alloy in HF solution on PEO film formation behavior (AZ91 마그네슘 합금의 PEO 피막 형성거동에 미치는 HF전처리의 영향)

  • Kwon, Duyoung;Song, Pung-Keun;Moon, Sungmo
    • Journal of the Korean institute of surface engineering
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    • v.54 no.4
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    • pp.184-193
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    • 2021
  • This study demonstrates formation behavior and morphological changes of PEO (Plasma Electrolytic Oxidation) films on AZ91 Mg alloy as a function of pre-treatment time in 1 M HF solution at 25 ± 1 ℃. The electrochemical behavior and morphological changes of AZ91 Mg alloy in the pre-treatment solution were also investigated with pre-treatment time. The PEO films were formed on the pre-treated AZ91 Mg alloy specimen by the application of anodic current 100 mA/cm2 of 300 Hz AC in 0.1 M NaOH + 0.4 M Na2SiO3 solution. Vigorous generation of hydrogen bubbles were observed upon immersion in the pre-treatment solution and its generation rate decreased with immersion time. It was also found that 𝛽-Mg17Al12 in AZ91 Mg alloy was dissolved and a protective thin film of MgF2 was formed on the AZ91 Mg alloy surface during the pre-treatment process in the 1 M HF solution. PEO film did not grow on the AZ91 Mg alloy specimen when the surface was not pre-treated and irregular PEO films with nodular defects were formed for the specimens pre-treated up to 1 min. Uniform PEO films were formed when the AZ91 Mg alloy specimen was pre-treated more than 3 min. The growth rate of PEO films on AZ91 Mg alloy increased significantly with increasing pre-treatment time.

Hydrogen peroxide attenuates refilling of intracellular calcium store in mouse pancreatic acinar cells

  • Yoon, Mi Na;Kim, Dong Kwan;Kim, Se Hoon;Park, Hyung Seo
    • The Korean Journal of Physiology and Pharmacology
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    • v.21 no.2
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    • pp.233-239
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    • 2017
  • Intracellular calcium ($Ca^{2+}$) oscillation is an initial event in digestive enzyme secretion of pancreatic acinar cells. Reactive oxygen species are known to be associated with a variety of oxidative stress-induced cellular disorders including pancreatitis. In this study, we investigated the effect of hydrogen peroxide ($H_2O_2$) on intracellular $Ca^{2+}$ accumulation in mouse pancreatic acinar cells. Perfusion of $H_2O_2$ at $300{\mu}M$ resulted in additional elevation of intracellular $Ca^{2+}$ levels and termination of oscillatory $Ca^{2+}$ signals induced by carbamylcholine (CCh) in the presence of normal extracellular $Ca^{2+}$. Antioxidants, catalase or DTT, completely prevented $H_2O_2$-induced additional $Ca^{2+}$ increase and termination of $Ca^{2+}$ oscillation. In $Ca^{2+}$-free medium, $H_2O_2$ still enhanced CCh-induced intracellular $Ca^{2+}$ levels and thapsigargin (TG) mimicked $H_2O_2$-induced cytosolic $Ca^{2+}$ increase. Furthermore, $H_2O_2$-induced elevation of intracellular $Ca^{2+}$ levels was abolished under sarco/endoplasmic reticulum $Ca^{2+}$ ATPase-inactivated condition by TG pretreatment with CCh. $H_2O_2$ at $300{\mu}M$ failed to affect store-operated $Ca^{2+}$ entry or $Ca^{2+}$ extrusion through plasma membrane. Additionally, ruthenium red, a mitochondrial $Ca^{2+}$ uniporter blocker, failed to attenuate $H_2O_2$-induced intracellular $Ca^{2+}$ elevation. These results provide evidence that excessive generation of $H_2O_2$ in pathological conditions could accumulate intracellular $Ca^{2+}$ by attenuating refilling of internal $Ca^{2+}$ stores rather than by inhibiting $Ca^{2+}$ extrusion to extracellular fluid or enhancing $Ca^{2+}$ mobilization from extracellular medium in mouse pancreatic acinar cells.

Effect of a new phosphorus source, magnesium hydrogen phosphate (MHP) on growth, utilization of phosphorus, and physiological responses in carp Cyprinus carpio

  • Yoon, Tae-Hyun;Won, Seunggun;Lee, Dong-Hoon;Choi, Jung-Woo;Ra, Changsix;Kim, Jeong-Dae
    • Fisheries and Aquatic Sciences
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    • v.19 no.9
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    • pp.39.1-39.9
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    • 2016
  • Magnesium hydrogen phosphate (MHP, $MgHPO_4$) recovered from swine manure was prepared as an alternative phosphorus (P) source. Conventional P additives, monocalcium phosphate (MCP), dicalcium phosphate (DCP), and tricalcium phosphate (TCP) were compared with the MHP in terms of growth and P availability by juvenile carp Cyprinus carpio. A basal diet as a negative control was prepared using practical feed ingredients without P supplementation to which four supplemental P sources were added at the level of 2%. Five groups of 450 fish having mean body weight of 6.5 g following 24 h fasting after 2 weeks of adaptation period were randomly distributed into each of 15 tanks (30 fish/tank). Fish were hand-fed to apparent satiety twice a day for 9 weeks. Fish fed the MHP had weight gain (WG), feed conversion ratio (FCR), protein efficiency ratio (PER), and specific growth rate (SGR) comparable to those fed the MCP. Those values of both the MHP and MCP groups were significantly different (p < 0.05) from the other groups. Fish groups fed control and the TCP showed the lowest WG, PER, and SGR and the highest FCR among treatments. No fish were died among treatments during the experimental period. Fish fed control and the TCP showed hematocrit and hemoglobin significantly lower (p < 0.05) than fish fed the MHP. The lowest inorganic P (Pi) in plasma was found in the control group. Even though Pi was not significantly different (p > 0.05) from other phosphate groups, fish fed the MCP and MHP retained higher P in whole body than the other groups. P availability was determined to be 93.2, 62.4, 6.1, and 98.0% for MCP, DCP, TCP, and MHP, respectively. The present results suggested that the MHP recovered from wastewater stream could be used as an alternative P source in carp diet.