• Title/Summary/Keyword: hot wall epitaxy

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Optoelectrical Properties of HgCdTe Epilayers Grown by Hot Wall Epitaxy

  • Yun, Suk-Jin;Hong, Kwang-Joon
    • Journal of Sensor Science and Technology
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    • v.13 no.4
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    • pp.277-281
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    • 2004
  • $Hg_{1-x}Cd_{x}Te$ (MCT) was grown by hot wall epitaxy. Prior to the MCT growth, the CdTe (111) buffer layer was grown on the GaAs substrate at the temperature of $590^{\circ}C$ for 15 min. When the thickness of the CdTe buffer layer was $5{\mu}m$ or thicker, the full width at half maximum values obtained from the x-ray rocking curves were found to significantly decrease. After a good quality CdTe buffer layer was grown, the MCT epilayers were grown on the CdTe (111)/GaAs substrate at various temperatures in situ. The crystal quality for those epilayers was investigated by means of the x-ray rocking curves and the photocurrent experiment. The photoconductor characterization for the epilayers was also measured. The energy band gap of MCT was determined from the photocurrent measurement and the x composition rates from the temperature dependence of the energy band gap were turned out.

Opto-electrical properties for a HgCdTe epilayers grown by hot wall epitaxy (Hot wall epitaxy에 의해 성장된 HgCdTe 에피레이어의 광전기적특성)

  • 홍광준
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.152-152
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    • 2003
  • Hg$\sub$l-x/Cd$\sub$x/Te (MCT) was grown by hot wall epitaxy. Prior to the MCT growth, the CdTe (111) buffer layer was grown on the GaAs substrate at the temperature of 590$^{\circ}C$ for 15 min. When the thickness of the CdTe buffer layer was 5 $\mu\textrm{m}$ or thicker, the full width at half maximum values obtained from the x-ray rocking curves were found to significantly decrease. After a good quality CdTe buffer layer was grown, the MCT epilayers were grown on the CdTe (111) /GaAs substrate at various temperatures in situ. The crystal quality for those epilayers was investigated by means of the x-ray rocking curves and the photocurrent experiment The photoconductor characterization for the epilayers was also measured The energy band gap of MCT was determined from the photocurrent measurement and the x composition rates from the temperature dependence of the energy band gap were turned out

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Growth of CdTe(100) Epilayers by Hot-Wall Epitaxy and Photocurrent Characterization (Hot-Wall Epitaxy에 의한 CdTe(100) 박막의 성장과 광전류 특성)

  • 신현길;신영진;문종대
    • Journal of the Korean Vacuum Society
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    • v.3 no.1
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    • pp.33-38
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    • 1994
  • -Hot-wall epitaxy 방법에 의하여 GaAs(100) 기판위에 CdTe(100)박막을 성장하였다. 박막을 성 장하는 동안 기판의 온도는 28$0^{\circ}C$ 증발원의 온도는 $430^{\circ}C$로 유지하였고 성장률은 $2mu$m/h이었다. 박막의 두께가 증가함에 따라 격자상수와 2결정 X-선 요동곡선의 반폭치가 감소하였다. CdTe (100) 박막의 광 전류 스펙트럼으로부터 에너지 띠간격의 광전류 봉우리는 가전자대 8 에 있는 전자가 광흡수에 의해 전도대 6 전이한 것이며 에너지 띠간격의 온도의존성을 구한 결과 온도계수 a=-2.3~-3.5 x 10-4 ev/k.

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Structure and Photoluminescence of ZnS-ZnSe Superlattices grown by Hot Wall Epitaxy (Hot Wall Epitaxy에 의하여 성장된 ZnS-ZnSe 초격자의 구조 및 Photoluminescence)

  • ;S. Sakakibara;K. Ishino;A. Ishida;H. Fujiyasu
    • Journal of the Korean Vacuum Society
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    • v.3 no.2
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    • pp.212-219
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    • 1994
  • Hot wall epitaxy법에 의하여 GaAs(100)aus 위에 ZnS-ZnSe 초격자를 성장하였다. ZnS-ZnSe 초격자의 주기는 x-선 회절 패턴에 의하여 확인되었고 이것은 변형을 고려하고 계산된 이론적인 패턴과 비교되었다. 경계면에 평행한 ZnS와 ZnSe의 변형의 비는 ZnSe에 대하여 ZnS의 두께기 증가할수록 감 소되었다. ZnS-ZnSe 초격자의 photoluminescence(PL)는 고에너지 영역의 예리한 스펙트럼과 저에너지 영역의 폭이 넓은 스펙트럼으로 구성되어있다. PL의 광자에너지는 Kronig-Penney 모델을 사용하여 계 산된 이론적인 에너지 값과 비교한 결과 type I의 초격자임을 알았다.

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Growth and Magnetic Characteristics of MnSb Epilayer by Hot-Wall Epitaxy (Hot-Wall Epitaxy에 의한 MnSb 박막의 성장과 자기적 특성)

  • Lee, Man-Young
    • Journal of the Korean Graphic Arts Communication Society
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    • v.22 no.2
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    • pp.151-162
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    • 2004
  • MnSb layers were grown on GaAs(100), (111)A and (111)B substrates by hot wall epitaxy under various growth conditions. Growth condition dependence of structural properties of the layers was examined. The growth direction and structural properties of MnSb/GaAs(100) depend on Sb source and substrate temperatures. The smooth MnSb(10.1)/GaAs(100) interface was obtained under the appropriate growth condition. On the other hand, MnSb(00.1) layers were grown on GaAs(111) substrates. The quality of the layers on (111)B was superior to that on GaAs(111)A, but degraded as in increasing Sb source temperature during the growth. The $Mn_2Sb$ domain was generated in the layers grown under conditions of low Sb source temperature and high substrate temperature on GaAs(111) substrates.

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Electrical properties for $ZnIn_2S_4$ epilayers grown by Hot Wall Epitaxy (Hot Wall Epitaxy (HWE)법에 의해 성장된 $ZnIn_2S_4$ 에피레이어의 전기적 특성)

  • Lee, Sang-Youl;Hong, Kwang-Joon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.143-144
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    • 2008
  • Single crystal $ZnIn_2S_4$ layers were grown on a thoroughly etched semi-insulating GaAs(100) substrate at $450^{\circ}C$ with the hot wall epitaxy (HWE) system by evaporating the polycrystal source of $ZnIn_2S_4$ at $610^{\circ}C$ prepared from horizontal electric furnace. The crystalline structure of the single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of single crystal $ZnIn_2S_4$ thin films measured with Hall effect by van der Pauw method are $8.51\times10^{17}$ electron/$cm^{-3}$, 291 $cm^2$/v-s at 293 K, respectively.

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Photoluminescence Characteristics of ZnO Nano Needle-like Rods grown by the Hot Wall Epitaxy Method

  • Eom, Sung-Hwan;Choi, Yong-Dae
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.5
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    • pp.191-195
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    • 2007
  • We investigated photoluminescence characteristics of ZnO nano needle-like rods grown on a c-plane $AL_2O_3$ substrate by the hot wall epitaxy method. The nano-rods were vertically well aligned along the ZnO c-axis. The diameters of the ZnO nano-rods ranged from 20 nm to 30 nm and their lengths were between 600 and 700 nm. In the photoluminescence spectrum at 10 K, the exciton emission bound to the neutral donor dominated while defect related emission was weakly observed. With a further increase of temperature, the free exciton emission appeared and eventually became dominant at room temperature.

Growth and photocurrent properties for the $AgInS_{2}$ epilayers by hot wall ep itaxy (Hot wall epitaxy 방법에 의한 $AgInS_{2}$ 박막의 성장과 광전류특성)

  • Hong, K.J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.08a
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    • pp.92-96
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    • 2002
  • A silver indium sulfide $(AgInS_{2})$ epilayer was grown by the hot wall epitaxy method, which has not been reported in the literature. The grown $AgInS_{2}$ epilayer has found to be a chalcopyrite structure and evaluated to be high quality crystal. From the photocurrent measurement in the temperature range from 30 K to 300 K, the two peaks of A and B were only observed, whereas the three peaks of A, B, and C were seen in the PC spectrum of 10 K. These peaks are ascribed to the band-ta-band transition. The valence band splitting of $AgInS_{2}$ was investigated by means of the photocurrent measurement. The crystal field splitting, $\Delta_{cr}$, and the spin orbit splitting, $\Delta_{so.}$ have been obtained to be 0.150 eV and 0.009 eV at 10 K, respectively. And, the energy band gap at room temperature has been determined to be 1.868 eV. Also, the temperature dependence of the energy band gap, $E_{g}(T)$, was determined.

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Growth and characterization of ZnSe/GaAs epilayer by hot-wall epitaxy method (Hot-Wal Epitaxy 방법에 의한 ZnSe/GaAs 박막 성장과 특성)

  • 정태수;강창훈;유평렬
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.302-307
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    • 1999
  • We have grown a high quality ZnSe(100) epilayer on the GaAs(100) substrate by hot-wall epitaxy method. The FWHM value from double-crystal x-ray diffraction rocking curve and growth rate of the ZnSe epilayer grown under the optimal growth conditions were 195 arcsec and 0.03 $\mu \textrm m$/min, respectively. The $I_2^U$ and $I_2^L$ peaks, which split by strain due to lattice mismatch between substrate and epilayer, were measured from the photoluminescence experiment. And we found that the residual impurities in ZnSe epilayer were concerned with Al or CI elements from the calculated binding energy of donor impurity.

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Growth and Characterization of $CulnSe_2$ Single Crystal Thin Film by Hot Wall Epitaxy (Hot Wall Epitaxy(HWE)법에 의한 $CulnSe_2$ 박막 성장과 특성)

  • 홍광준;이상열;박진성
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.6
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    • pp.445-454
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    • 2001
  • The stochiometric mix of evaporating materials for the CuInSe$_2$ single crystal thin films was prepared from horizontal furnace. To obtain the single crystal thin films, CuInSe$_2$ mixed crystal was deposited on thoroughly etched semi-insulating GaAs(100) substrate by the Hot Wall Epitaxy(HWE) system. The source and substrate temperature were 62$0^{\circ}C$ and 41$0^{\circ}C$, respectively. The crystalline structure of single crystal thin films was investigated by the photoluminescence and double crystal X-ray diffraction (DCXD). The carrier density and mobility of CuInSe$_2$ single crystal thin films measured from Hall effect fby van der Pauw method are 9.62x10$^{16}$ cm$^{-3}$ , 296$\textrm{cm}^2$/V.s at 293 K, respectively. From the photocurrent spectrum by illumination of perpendicular light on the c-axis of the CuInSe$_2$ single crystal thin film we have found that he values of spin orbit splitting ΔSo and the crystal field splitting ΔCr were 6.1 meV and 175.2 meV at 10K, respectively. From the photoluminescence measurement on CuInSe$_2$ single crystal thin film we observed free excition (Ex) existing only high quality crystal and neutral bound exiciton (D$^{\circ}$,X) having very strong peak intensity. Then, the full-width-at-half-maximum(FWHM) and binding energy of neutral donor bound excition were 7meV and 5.9meV, respectivity. by Haynes rule, an activation energy of impurity was 50 meV.

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