• 한국재료학회지
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• 제23권9호
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• pp.517-524
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• 2013

The electrical and optical properties of fluorine-doped tin oxide films grown on polyethylene terephthalate film with a hardness of 3 using electron cyclotron resonance plasma with linear microwave of 2.45 GHz of high ionization energy were investigated. Fluorine-doped tin oxide films with a magnetic field of 875 Gauss and the highest resistance uniformity were obtained. In particular, the magnetic field could be controlled by varying the distribution in electron cyclotron deposition positions. The films were deposited at various gas flow rates of hydrogen and carrier gas of an organometallic source. The surface morphology, electrical resistivity, transmittance, and color in the visible range of the deposited film were examined using SEM, a four-point probe instrument, and a spectrophotometer. The electromagnetic field for electron cyclotron resonance condition was uniformly formed in at a position 16 cm from the center along the Z-axis. The plasma spatial distribution of magnetic current on the roll substrate surface in the film was considerably affected by the electron cyclotron systems. The relative resistance uniformity of electrical properties was obtained in film prepared with a magnetic field in the current range of 180~200A. SEM images showing the surface morphologies of a film deposited on PET with a width of 50 cm revealed that the grains were uniformly distributed with sizes in the range of 2~7 nm. In our experimental range, the electrical resistivity of film was able to observe from $1.0{\times}10^{-2}$ to $1.0{\times}10^{-1}{\Omega}cm$ where optical transmittance at 550 nm was 87~89 %. These properties were depended on the flow rate of the gas, hydrogen and carrier gas of the organometallic source, respectively.

• 한국정보통신학회논문지
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• 제13권1호
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• pp.115-120
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• 2009

PLD 법으로 3 wt.% Al이 도핑된 ZnO 타겟을 이용하여 corning 1737 기판위에 200 mTorr의 고정된 산소 분압에서 기판온도 ($100\;{\sim}\;250^{\circ}C$)에 따른 AZO 박막의 구조적, 광학적, 전기적 특성을 조사하였다. 모든 박막들은 c 축 배향되었으며, 오직 (002) 회절 피크만 관찰되었다. $250^{\circ}C$에서 제작한 AZO 박막에서 가장 우수한 (002) 배향성을 보였으며, 이때의 반가폭 값은 $0.44^{\circ}$ 였다. 모든 박막이 가시광 영역에서 85 % 이상의 투과율을 보였으며, Burstein-Moss 효과가 관찰되었다. 전기적 특성은 $250^{\circ}C$에서 제작한 박막에서 가장 우수한 캐리어 농도 ($3.48{\times}10^{20}cm^{-3}$)와 비저항 ($1.65{\times}10^{-2}{\Omega}cm$) 값을 나타냈다.

• 한국전기전자재료학회논문지
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• 제25권2호
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• pp.114-120
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• 2012

In this research, we prepared Ga doped zinc oxide(ZnO:Ga, GZO) targets each difference sintering temperature $700^{\circ}C$, $800^{\circ}C$, and doping rate 1 wt.%, 2 wt.%, 3 wt.%. The characteristics of thin film on glass substrates which deposited by facing target sputtering in pure Ar atmosphere are reported. Ga doped zinc oxide film is attracted material through low resistivity, high transmittance, etc. When prepared target powder's structure was investigated by scanning electron microscope, densification and coarsening by driving force was observed. For each ZnO:Ga films with a $Ga_2O_3$ content of 3 wt.% at input power of 45W, the lowest resistivity of $9.967{\times}10^{-4}{\Omega}{\cdot}cm$ ($700^{\circ}C$) and $9.846{\times}10^{-4}{\Omega}{\cdot}cm$ ($800^{\circ}C$) was obtained. the carrier concentration and mobility were $4.09{\times}10^{20}cm^{-3}$($700^{\circ}C$), $4.12{\times}10^{20}cm^{-3}$($800^{\circ}C$) and $15.31cm^2/V{\cdot}s(700^{\circ}C)$, $12.51cm^2/V{\cdot}s(800^{\circ}C)$, respectively. And except 1 wt.% Ga doped ZnO thin film, average transmittance of these samples in the range 350-800 nm was over 80%.

• 센서학회지
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• 제28권6호
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• pp.366-370
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• 2019

In this study, we have successfully fabricated a highly conductive transparent electrode using Ag nanowires, based on piezoelectric polyvinylidene difluoride (PVDF) film, that can be applied as transparent and flexible speakers. The structural morphology of the Ag nanowires was confirmed by a detailed scanning electron microscopy. Ultraviolet-visible spectroscopy demonstrated that the transparent electrode fabricated by the Ag nanowires exhibited a transmittance of above 70%. The transparent electrode also showed very low sheet resistance with high flexibility. We have further developed an anti-oxidation coating layer by using a tetraethyl orthosilicate-poly trimethyloxyphenylsilane (TEOS-PTMS) slurry technique. It was confirmed that the transmittance and sheet resistance of the antioxidant film depends critically on the humidity of the film surface. We believe such Ag nanowire electrodes are a very promising next-generation transparent electrode technology that can be used in future flexible and transparent devices.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.33-36
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• 2009

고효율 양자점 태양전지를 위하여 $Si_{1-x}C_x$ 박막 내에 Si 양자점을 형성한 박막을 제작하고 그 특성을 분석하였다. $Si_{1-x}C_x$ 박막은 Si과 C target을 co-sputtering하여 증착하였다. C target의 RF power를 변화시켜 $Si_{1-x}C_x$ 박막의 조성비를 조절하였으며, 조성비는 auger electron spectroscopy로 정량적으로 측정하였다. 이 박막들을 질소 분위기에서 후 열처리하여 high resolution transmittance electron microscopy로 확인한 결과 박막 내에 2~10nm 크기의 양자점이 형성된 것을 관측할 수 있었다. 이 양자점은 transmittance electron diffraction과 grazing incident X-ray diffraction을 통해 Si 양자점과 SiC 양자점이 형성되었음을 알 수 있었다. Raman 측정 결과에서는 후 열처리한 $Si_{1-x}C_x$ 박막의 조성비가 증가할 수록 crystal Si peak의 shift가 증가함을 알 수 있었고, 이를 통해 양자점의 크기도 함께 계산할 수 있었다. Fourier transform infrared spectroscopy을 통해 후 열처리한 Si1-xCx 박막의 양자점의 형성 원인을 추정하였다.

• 한국정보전자통신기술학회논문지
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• 제10권3호
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• pp.242-248
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• 2017

최근 급속한 경제성장에 따른 인구의 도시 집중화 현상이 발생하고 있으며 이로 인해 도시 건물의 밀집화, 고층화, 용도의 다변화에 따라서 화재 및 사고 범죄의 위험이 상당히 증가하는 추세이다. 이런 협소거주공간은 무창층의 특성을 가지고 있어 화재 발생시 급격한 연기확산 속도에 따른 거주자의 피해가 큰 게 현실이며 소방작전에 사용되는 무선통신의 전파 투과율 및 송달거리 또한 건축자재 및 건축물의 형태에 따라 통신 성능의 차이가 발생한다. 따라서 효율적인 소방작전을 위해 본 논문에서는 협소거주 공간의 건물 자재(철근콘크리트벽체, 샌드위치 패널 벽체, 경량칸막이 석고보드 벽체, 유리 출입문, 방화철문) 및 구조 특성을 분석하고 이에 따른 무선 통신의 전파(주파수 대역 424MHz, 2.4GHz) 투과율 및 송달거리 측정실험을 통해 최적의 소방작전을 위한 협소거주 공간의 통신 환경 솔루션을 도출하였다.

• 한국태양에너지학회 논문집
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• 제31권3호
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• pp.109-115
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• 2011

It can gain both the electric energy production and disperse of light at the same time if DSSC is applied in the building as window system. It means to help facade design and to be used in lighting, heating, cooling energy directly by applicating DSSC BIPV window that is possible to daylighting and materialization of color. For this, optical characteristics analysis that is basic step must take precedence. So, basic databases of DSSC are builded and optical performances according to the double and triple glazing are evaluated by analyzing spectral data of various colored DSSC. As a result, Green(4) has the highest visible transmittance that is 28.8%, and Blue(3) has the lowest that is 0.3%. And, in case of optical performance of Green(4) depending on the incidence angle, SHGC and Tsol are decreased sharply from more than $60^{\circ}C$. Finally, It is judged that Red(4), Green(1), (4), Blue(4) are suitable for application in office building because visible transmittance is high and solar heat gain coefficient is low relatively in spite of composing to double and triple glazing.

• 한국재료학회지
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• 제30권4호
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• pp.169-175
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• 2020

Silicon nitride thin films are deposited by RF (13.57 MHz) magnetron sputtering process using a Si (99.999 %) target and with different ratios of Ar/N₂ sputtering gas mixture. Corning G type glass is used as substrate. The vacuum atmosphere, RF source power, deposit time and temperature of substrate of the sputtering process are maintained consistently at 2 ~ 3 × 10^-3 torr, 30 sccm, 100 watt, 20 min. and room temperature, respectively. Cross sectional views and surface morphology of the deposited thin films are observed by field emission scanning electron microscope, atomic force microscope and X-ray photoelectron spectroscopy. The hardness values are determined by nano-indentation measurement. The thickness of the deposited films is approximately within the range of 88 nm ~ 200 nm. As the amount of N₂ gas in the Ar:N₂ gas mixture increases, the thickness of the films decreases. AFM observation reveals that film deposited at high Ar:N₂ gas ratio and large amount of N₂ gas has a very irregular surface morphology, even though it has a low RMS value. The hardness value of the deposited films made with ratio of Ar:N₂=9:1 display the highest value. The XPS spectrum indicates that the deposited film is assigned to non-stoichiometric silicon nitride and the transmittance of the glass with deposited SiO₂-Si_xN_y thin film is satisfactory at 97 %.

• Applied Science and Convergence Technology
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• 제24권3호
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• pp.72-76
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• 2015

Nickel oxide (NiO) thin films were grown on soda-lime glass substrates by RF magnetron sputtering method at room temperature (RT), and they were post-annealed at the temperatures of $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$ and $400^{\circ}C$ for 30 minutes in vacuum. The electronic structure, optical and electrical properties of NiO thin films were investigated using X-ray photoelectron spectroscopy (XPS), reflection electron energy spectroscopy (REELS), UV-spectrometer and Hall Effect measurements, respectively. XPS results showed that the NiO thin films grown at RT and post annealed at temperatures below $300^{\circ}C$ had the NiO phase, but, at $400^{\circ}C$, the nickel metal phase became dominant. The band gaps of NiO thin films post annealed at temperatures below $300^{\circ}C$ were about 3.7 eV, but that at $400^{\circ}C$ should not be measured clearly because of the dominance of Ni metal phase. The NiO thin films post-annealed at temperatures below $300^{\circ}C$ showed p-type conductivity with low electrical resistivity and high optical transmittance of 80% in the visible light region, but that post-annealed at $400^{\circ}C$ showed n-type semiconductor properties, and the average transmittance in the visible light region was less than 42%. Our results demonstrate that the post-annealing plays a crucial role in enhancing the electrical and optical properties of NiO thin films.

• 한국결정성장학회지
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• 제11권4호
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• pp.180-183
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• 2001

Developed Edge-defined film-fed growth (EFG)법으로 $YVO_{4}$ 및 Nd:$YVO_{4}$ 단결정을 성장하였으며 성장된 결정의 광학적 특성을 측정하였다. $YVO_{4}$ 및 Nd:$YVO_{4}$ 단결정 모두 투명하였으며, 결정성장 동안 융액 표면 온도의 균질 및 meniscus의 안정화로 고품질의 결정을 얻을 수 있었다. 투과 및 흡수 스펙트럼 측정 결과에서 $YVO_{4}$ 단결정은 340 nm에서 1000 nm까지 대체로 넓은 영역에서 높은 투과율이 나타났지만, Nd:$YVO_{4}$ 단결정은 532, 593, 753, 807, 888 nm의 특정한 영역에서 흡수 peak들이 나타남을 획인할 수 있었다. 또한 Photoluminescence (PL) 스펙트럼을 측정한 결과, 800~900 nm의 영역에서 에너지 방출을 관찰할 수 있었다.