Hydrogen Detection of Titanium Dioxide Layer Formed by Reactive Sputtering on SiC Substrates (SiC 기판상에 반응 스퍼터링에 의해 형성된 TiO2막의 수소가스 검지 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.29 no.12
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- pp.809-813
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- 2016