Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Characteristics of chromium oxide thin-films for high temperature piezoresistive sensors

고온용 압저항센서용 크롬산화박막의 특성

  • 서정환 (대양전기공업㈜ 기술연구소) ;
  • 노상수 (대양전기공업㈜ 기술연구소) ;
  • 이응안 (대양전기공업㈜ 기술연구소) ;
  • 정귀상 (동서대학교 전자기계 공학부) ;
  • 김광호 (부산대학교 무기재료공학과)
  • Published : 2005.01.30
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Abstract

This paper present characteristics of chromium oxide thin-film as piezoresistive sensors, which were deposited on Si substrates by DC reactive magnetron sputtering in an argon-Oxide atmosphere for high temperature applications. The chemical composition, physical and electrical properties and thermal stability ranges of the $CrO_{x}$ sensing elements have studied. $CrO_{x}$ thin films with a linear gauge factor(GF${\fallingdotseq}$15), high electrical resistivity (${\rho}$ = $340{\mu}{\Omega}cm$) and TCR<-55 ppm/$^{\circ}C$ have been obtained. These $CrO_{x}$ thin films may allow high temperature pressure sensor miniaturization to be achieved.

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References

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