• Title/Summary/Keyword: heater loss

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An Assemble and Expandable Substrate Heating Apparatus for the Semiconductor Manufacturing (조립과 확장이 가능한 반도체 제조용 기판 가열 장치)

  • Jung, Soon-Won;Koo, Kyung-Wan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.58 no.1
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    • pp.67-71
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    • 2009
  • This research is a new structure of the semiconductor substrate heating apparatus in which the assembly and expansion are possible. The fast thermo-responsive according to the direct heating structure of the heating plate layer adhering closely to the floor side of a substrate and the fast heat loss minimization can be accomplished. Moreover, the contact area of the sheath heater, which is the heating plate layer built-in heating apparatus, is increased, so that it has more heating valid area. There is no problem with the deformation interpreted in the state where it assembles the block of a several of the simulation result structure, the safety, and the stress. In addition, it is confirmed that building a large-size heating block is possible since the temperature deflection of the manufactured plate is lower than the standard value.

Experimental Study on Heat Losses from Receiver of Solar Thermal Power (태양열발전용 흡수기 설게 및 열손실 특성실험)

  • Kim, Jong-Kyu;Kang, Yong-Heack;Kim, Jin-Soo;Lee, Sang-Nam;Yu, Chang-Kyun;Yun, Hwan-Ki
    • 한국신재생에너지학회:학술대회논문집
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    • 2007.06a
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    • pp.672-675
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    • 2007
  • Experimental data are presented which describe heat losses of cavity type receiver in wind tunnel. Experiments are conducted at various conditions such as the heater temperature in cavity changes from 300, 400, and 500 oC, wind speed in tunnel from 2 to 8 m/s, and four different tilt angle of 30, 50, 70, 90o. The power consumption including temperature, voltage and current for each experimental conditions are measured and stored in data logger at everyone second interval. The experimental results show that heat losses increase with increasing wind speed and with tilt angle. However, heat losses for the tilt angle of 70 and 90o is almost same at each heater temperature. In addition, the effects of natural convection in combined convection heat losses vary in according to the tilt angle.

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An Experimental Study on the Defrosting Behavior of a Fin-Tube Heat Exchanger

  • Lee, Kwan-Soo;Jhee, Sung
    • International Journal of Air-Conditioning and Refrigeration
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    • v.7
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    • pp.101-111
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    • 1999
  • The effect of various conditions of frosting and defrosting on the defrosting behavior of a fin-tube heat exchanger has been examined experimentally. An electric heater is used for defrosting in a fin-tube heat exchanger. There are several local maxima in the water draining rate. The amount of residual water on the heat exchanger after completion of defrosting is kept constant due to surface tension on the heat exchanger. Without considering degradation of the thermal performance due to the frosting, the defrosting efficiency is improved with increasing amount of frost irrespective of the frosting condition. The defrosting behavior is affected by frosting density as well as frost accumulation, both of which vary with the experimental operating conditions. The heat loss to the surrounding air decreases, and melting and defrosting efficiencies show high values with decreasing heat input.

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Improvement of Insulation Performance of Vehicle Rubber Hoses (자동차용 고무호스의 진동 절연성능 향상에 관한 연구)

  • Jung, Heon-Seob;Min, Byung-Kwon;Lee, Seong-Hoon;Woo, Hee-Soo;Park, Hyun-Ho
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.22 no.9
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    • pp.837-844
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    • 2012
  • We considered an approach in terms of materials for improvement of insulation performance of vehicle rubber hoses. Ethylene propylene rubber(EPDM) for heater hoses in cooling system and acrylic rubber(AR) for intercooler hose in intake system were chosen for mixing for the vibration and noise performance. We modified EPDM and AR through changing compound of base polymer, reinforcement fillers and additives. Dynamic mechanical analysis(DMA) was used to measure viscoelastic properties such as shear modulus and loss factor($tan{\delta}$). Vehicle acceleration test was also conducted to observe indoor changes in insulation performance of hoses.

The Fabrication of Flow Sensors Using Pt Micro Heater (백금 미세발열체를 이용한 유량센서의 제작)

  • Noh, Sang-Soo;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.609-611
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    • 1997
  • Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

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Characteristics of Hot-Film Type Micro-Flowsensors Fabricated on SOI Membrane and Trench Structures (SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량세선의 특성)

  • 정귀상;김미목;남태철
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.8
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    • pp.658-662
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    • 2001
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

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Fabrication and Characteristics of Hot-Film Type Micro-flowsensors integrated with RTD (측온저항체 온도센서가 집적화된 발열저항체형 마이크로 유량센서의 제작 및 특성)

  • 정귀상;홍석우
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.7
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    • pp.612-616
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    • 2000
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the Si membrane in which MgO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$layer. The MgO layer improved adhesion of Pt thin-film to SiO$_2$layer without any chemical reactions to Pt thin-film under high annealing temperatures. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 82 mV at $N_2$flow rate of 2000 sccm/min heating power of 1.2 W. The response time($\tau$:63%) was about 50 msec when input flow was stepinput

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Adjustment of the Excess Air Ratio for Stabilizing the Draft System in a Large Capacity Coal Fired Power Plant (대형 석탄화력 발전소에서 통풍계통 안정화를 위한 과잉공기비 조정)

  • Park, Kun Woo;Yoo, Ho-Seon
    • Plant Journal
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    • v.14 no.2
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    • pp.39-44
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    • 2018
  • In this study, I analyzed the effects on stabilizing the draft system, boiler efficiency when changing excess air ratio under 870 MW load limit operation condition in a large capacity coal fired power plant and decided optimum excess air ratio. It is positively necessary to choose adequate excess air ratio for stabilizing draft system because air pre-heater pressure drop and induced draft fan first stall margin are changing when adjusting excess air ratio. This study therefore, measured air pre-heater pressure drop, induced draft fan first stall margin, boiler efficiency, loss and has chosen adequate excess air ratio adjusting excess air ratio from 1.153 to 1.127. So it is recommended that the operation point needs to be changed to 1.127 that is not only to decrease air pre-heater pressure drop and to stabilize draft system and to secure stall margin but also to maintain boiler efficiency to equivalent level.

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Heat Transfer between Substrate and Substrate-heater in Low Vacuum (저진공 내 시료가열판과 시료의 열전달)

  • Park, Hyon-Jae;Oh, Soo-Ghee;Shin, Yong-Hyeon;Chung, Kwang-Hwa
    • Journal of the Korean Vacuum Society
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    • v.17 no.4
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    • pp.302-310
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    • 2008
  • Heat transfer between substrate and substrate-heater in low vacuum was investigated. The convection related with gas flow and pressure, the heat conduction considering surface roughness and contact pressure, and the heat loss by radiation depending on the surface emissivity were considered. The coefficient of heat conduction $h_c$ in the Fourier's law were determined experimentally from the temperature difference between the substrate and the substrate-heater in the range of substrate-heater temperature $100\;-\;500^{\circ}C$, in the pressures of 300 mTorr - 1 Torr. The temperature difference was then calculated in the reverse way for the purpose of verification, using the heat flow and the experimentally determined coefficients. The verified temperature differences were thus obtained within 0.33 % error.

Reduction Characteristics of Pool Top Radiation Level in HANARO (하나로 수조 방사선 준위의 저감 특성)

  • Park, Yong-Chul
    • The KSFM Journal of Fluid Machinery
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    • v.5 no.1 s.14
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    • pp.49-54
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    • 2002
  • HANARO, 30 MW of research reactor, was installed at the depth of 13m in an open pool. The $90\%$ of primary coolant was designed to pass through the core and to remove the reaction heat of the cote. The rest, $10\%$, of the primary coolant was designed to bypass the core. And the reactor coolant through and bypass the core was inhaled at the top of chimney by the coolant pump to prevent the radiated gas from being lifted to the top of reactor pool. But, the part of core bypass coolant was not inhaled by the reactor coolant pump and reached at the top of reactor pool by natural convection, and increased the radiation lovel on the top of reactor pool. To reduce the radiation level by protecting the natural convection of the core bypass flow, the hot water layer (HWL, hereinafter) was installed with the depth of 1.2 m from the top of reactor pool. As the HWL was normally operated, the radiation level was reduced to five percent ($5\%$) in comparing with that before the installation of the HWL. When HANARO was operated at a higher temperature than the normal temperature of the HWL by operating the standby heater, it was found that the radiation level was more reduced than that before operation. To verify the reason, the heat loss of the HWL was calculated by Visual Basic Program. It was confirmed through the results that the larger the temperature difference between the HWL and reactor hall was, the more the evaporation loss increased. And it was verified that the radiation level above was reduced mote safely by increasing the capacity of heater.