Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of Hot-Film Type Micro-Flowsensors Fabricated on SOI Membrane and Trench Structures

SOI 멤브레인과 트랜치 구조상에 제작된 발열저항체형 마이크로 유량세선의 특성

  • 정귀상 (동서대학교 정보시스템공학부) ;
  • 김미목 (영남대학교 전자공학과) ;
  • 남태철 (영남대학교 전자공학과)
  • Published : 2001.08.01
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Abstract

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

Keywords

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