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http://dx.doi.org/10.5757/JKVS.2008.17.4.302

Heat Transfer between Substrate and Substrate-heater in Low Vacuum  

Park, Hyon-Jae (Division of Energy Systems Research, Ajou University)
Oh, Soo-Ghee (Division of Energy Systems Research, Ajou University)
Shin, Yong-Hyeon (Center for Vacuum Technology, Korea Research Institute of Standards and Science)
Chung, Kwang-Hwa (Center for Vacuum Technology, Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.4, 2008 , pp. 302-310 More about this Journal
Abstract
Heat transfer between substrate and substrate-heater in low vacuum was investigated. The convection related with gas flow and pressure, the heat conduction considering surface roughness and contact pressure, and the heat loss by radiation depending on the surface emissivity were considered. The coefficient of heat conduction $h_c$ in the Fourier's law were determined experimentally from the temperature difference between the substrate and the substrate-heater in the range of substrate-heater temperature $100\;-\;500^{\circ}C$, in the pressures of 300 mTorr - 1 Torr. The temperature difference was then calculated in the reverse way for the purpose of verification, using the heat flow and the experimentally determined coefficients. The verified temperature differences were thus obtained within 0.33 % error.
Keywords
heat transfer in low vacuum; Fourier's law; substrate temperature;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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