• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.167-167
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• 2011

Magnetic random access memory (MRAM) is one of the prospective semiconductor memories for next generation. It has the excellent features including nonvolatility, fast access time, unlimited read/write endurance, low operating voltage, and high storage density. MRAM consists of magnetic tunnel junction (MTJ) stack and complementary metal-oxide semiconductor (CMOS). The MTJ stack is composed of various magnetic materials, metals, and a tunneling barrier layer. For the successful realization of high density MRAM, the etching process of magnetic materials should be developed. Among various magnetic materials, FePt has been used for pinned layer of MTJ stack. The previous etch study of FePt magnetic thin films was carried out using $CH_4/O_2/NH_3$. It reported only the etch characteristics with respect to the variation of RF bias powers. In this study, the etch characteristics of FePt thin films have been investigated using an inductively coupled plasma reactive ion etcher in various etch chemistries containing $CH_4$/Ar and $CH_4/O_2/Ar$ gas mixes. TiN thin film was employed as a hard mask. FePt thin films are etched by varying the gas concentration. The etch characteristics have been investigated in terms of etch rate, etch selectivity and etch profile. Furthermore, x-ray photoelectron spectroscopy is applied to elucidate the etch mechanism of FePt thin films in $CH_4$/Ar and $CH_4/O_2/Ar$ chemistries.

• Journal of Ceramic Processing Research
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• 제19권5호
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• pp.434-438
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• 2018

The sintering behavior of $BaFe_{12}O_{19}$ with the addition of one and three weight % of $CuWO_4$ as a liquid phase sintering aid is studied. Samples are sintered in the temperature range $900-1250^{\circ}C$ and the effect of $CuWO_4$ addition on density, microstructure, phase composition and magnetic properties is examined. Compared to $BaFe_{12}O_{19}$ with no sintering aid addition, addition of 1 wt % $CuWO_4$ retards densification. Addition of 3 wt % $CuWO_4$ promotes densification at lower sintering temperatures but retards densification at temperatures > $1050^{\circ}C$. Three wt % $CuWO_4$ addition induces the formation of $BaWO_4$ and $Ba_3WFe_2O_9$ secondary phases at temperatures ${\geq}1100^{\circ}C$. Addition of $CuWO_4$ causes a decrease in saturation magnetization, remanent magnetization and coercivity.

• 마이크로전자및패키징학회지
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• 제22권3호
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• pp.45-50
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• 2015

Glycine-nitrate와 citric acid를 이용하여 단상의 Ni-Zn ferrite, Ba-ferrite 나노입자와 두 나노복합체 ferrite의 전구체를 제조하고 이를 열처리하여 XRD 및 FT-IR로 각각의 상 분석을, SEM으로 분말의 형상과 크기를, VSM으로 자기적 특성과 합성된 나노복합체 ferrite에서의 exchange-coupling 상호작용을 확인하였다. XRD 분석 결과, 자전 연소법으로 얻은 전구체로 단상의 Ni-Zn ferrite와 Ba-ferrite 나노 입자 및 $BaFe_{12}O_{19}/Ni_{0.5}Zn_{0.5}Fe_2O_4$ 나노복합체 페라이트가 합성되었으며, 나노복합체에는 $BaFe_{12}O_{19}$와 $Ni_{0.5}Zn_{0.5}Fe_2O_4$가 잘 분포되어 있어 경자성과 연자성이 공존하고 있음을 확인하였고, 나노복합체 페라이트의 히스테리시스 곡선의 형상을 통해 경자성과 연자성 사이에 exchange-copuling이 잘 이루어졌음을 확인할 수 있었다. VSM으로 측정한 나노복합체의 경우. GNP로 제조한 precursor를 $900^{\circ}C$에서 하소한 $BaFe_{12}O_{19}/Ni_{0.5}Zn_{0.5}Fe_2O_4$ 나노복합체는 포화자화 81.69 emu/g, 잔류자화 38 emu/g, 보자력 2598.48G를 나타내었다. $Ni_{0.5}Zn_{0.5}Fe_2O_4/BaFe_{12}O_{19}$ 복합체에서 $BaFe_{12}O_{19}$의 무게비가 증가 할수록 보자력은 증가하였고, 포화자화값과 잔류자화 값은 감소하였다.

• Journal of Magnetics
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• 제20권4호
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• pp.336-341
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• 2015

MnBi alloys were fabricated by arc melting and annealing at 573 K. The heat treatment enhanced the content of the low-temperature phase (LTP) of MnBi up to 83 wt%. The Bi-excess assisted LTP MnBi alloys were used in the hybridization with the Nd-Fe-B commercial Magnequench ribbons to form the hybrid magnets (100-x)NdFeB/xMnBi, x = 20, 30, 40, 50, and 80 wt%. The as-milled powder mixtures of Nd-Fe-B and MnBi were aligned in a magnetic field of 18 kOe and warm-compacted to anisotropic and dense bulk magnets at 573 K by 2,000 psi for 10 min. The magnetic ordering of two hard phase components strengthened by the exchange coupling enhanced the Curie temperature ($T_c$) of the magnet in comparison to that of the powder mixture sample. The prepared hybrid magnets were highly anisotropic with the ratio $M_r/M_s$ > 0.8. The exchange coupling was high, and the coercivity $_iH_c$ of the magnets was ~11-13 kOe. The maximum value of the energy product $(BH)_{max}$ was 8.4 MGOe for the magnet with x = 30%. The preparation of MnBi alloys and hybrid magnets are discussed in details.

• 한국분말재료학회지
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• 제20권5호
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• pp.359-365
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• 2013

In this study, we fabricated $Nd_2Fe_{14}B$ hard magnetic powders with various sizes via spray drying combined with reduction-diffusion process. Spray drying is widely used to produce nearly spherical particles that are relatively homogeneous. Thus, the precursor particles were prepared by spray drying using the aqueous solution containing Nd salts, Fe salts and boric acid with the target stoichiometric composition of $Nd_2Fe_{14}B$. The mean particle sizes of the spray-dried powders are in the range from one to seven micrometer, which are adjusted by controlling the concentrations of precursor solutions. After debinding the as-prepared precursor particles, ball milling was also conducted to control the particle sizes of Nd-Fe-B oxide powders. The resulting particles with different sizes were subjected to subsequent treatments including hydrogen reduction, Ca reduction and washing for CaO removal. The size effect of Nd-Fe-B oxide particles on the formation of $Nd_2Fe_{14}B$ phase and magnetic properties was investigated.

• 한국분말재료학회지
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• 제3권4호
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• pp.233-245
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• 1996

Nanocrystalline materials, with a grain size of typically <100 nm, are a new class of materials with properties vastly different from and often superior to those of the conventional coarse-grained materials. These materials can be synthesized by a number of different techniques and the grain size, morphology, and composition can be controlled by controlling the process parameters. In comparison to the coarse-grained materials, nanocrystalline materials show higher strength and hardness, enhanced diffusivity, improved ductility/toughness, reduced, density, reduced elastic modulus, higher electrical resistivity, increased specific heat, higher coefficient of thermal expansion, lower thermal conductivity, and superior soft and hard magnetic properties. Limited quantities of these materials are presently produced and marketed in the US, Canada, and elsewhere. Applications for these materials are being actively explored. The present article discusses the synthesis, structure, thermal stability, properties, and potential application of nanocrystalline materials.

• Journal of Magnetics
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• 제18권3호
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• pp.240-244
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• 2013

The influences of Gallium doping on the magnetic microstructures and corrosion behaviors of Nd-Fe-B-Ti-C alloys are investigated. The cooling rate for obtaining fully amorphous structure is raised, and the glassforming ability is improved by the Ga addition. The High Resolution Transmission Electron Microscopy image shows that the ${\alpha}$-Fe and $Fe_3B$ soft magnetic phases become granular surrounded by the $Nd_2Fe_{14}B$ hard magnetic phase. The rms and $({\Delta}{\varphi})_{rms}$ value of Nd-Fe-B-Ti-C nanocomposite alloy thick ribbons in the typical topographic and magnetic force images detected by Magnetic Force Microscopy(MFM) decreases with 0.5 at% Ga addition. The corrosion resistances of $Nd_9Fe_{73}B_{12.6}C_{1.4}Ti_{4-x}Ga_x$ (x = 0, 0.5, 1) alloys are enhanced by the Ga addition. It can be attributed to the formation of more amorphous phases in the Ga doped samples.

• 한국분말재료학회지
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• 제26권2호
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• pp.146-155
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• 2019

Rare earth magnets are the strongest type of permanent magnets and are integral to the high tech industry, particularly in clean energies, such as electric vehicle motors and wind turbine generators. However, the cost of rare earth materials and the imbalance in supply and demand still remain big problems to solve for permanent magnet related industries. Thus, a magnet with abundant elements and moderate magnetic performance is required to replace rare-earth magnets. Recently, $a^{{\prime}{\prime}}-Fe_{16}N_2$ has attracted considerable attention as a promising candidate for next-generation non-rare-earth permanent magnets due to its gigantic magnetization (3.23 T). Also, metastable $a^{{\prime}{\prime}}-Fe_{16}N_2$ exhibits high tetragonality (c/a = 1.1) by interstitial introduction of N atoms, leading to a high magnetocrystalline anisotropy constant ($K_1=1.0MJ/m^3$). In addition, Fe has a large amount of reserves on the Earth compared to other magnetic materials, leading to low cost of raw materials and manufacturing for industrial production. In this paper, we review the synthetic methods of metastable $a^{{\prime}{\prime}}-Fe_{16}N_2$ with film, powder and bulk form and discuss the approaches to enhance magnetocrystalline anisotropy of $a^{{\prime}{\prime}}-Fe_{16}N_2$. Future research prospects are also offered with patent trends observed thus far.

• Journal of Magnetics
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• 제6권3호
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• pp.90-93
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• 2001

Co/$Al_O_3$/NiFe and CO/$Al_O_3$/Co tunnel junctions were fabricated by a radio frequency magnetron sputtering at room temperature with hard mask on glass and $4^{\circ}$ tilt cut Si (111) substrates. The barrier layer was formed through two steps. After the Al layer was deposited, it was oxidized in the chamber of a reactive ion etching system (RIE) with $O_2$plasma at various conditions. The dependence of the TMR value and junction resistance on the thickness of Al layer (before oxidation) and oxidation parameters were investigated. Magnetoresistance value of 7% at room temperature was obtained by optimizing the Al layer thickness and oxidation conditions. Circular shape junctions on $4^{\circ}$tilt cut Si (111) substrate showed 4% magnetoresistance. Photovoltaic energy conversion effect was observed with the cross-strip geometry junctions on Si substrate.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2008년도 Asian Magnetics Conference
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• pp.85.2-85.2
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• 2008