• Journal of the Korean Chemical Society
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• v.13 no.4
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• pp.395-399
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• 1969

On the soft carbon made from petroleum coke, it was found that the graphitization began at around 2,000$^{\circ}C and crystallite diameters were almost saturated at 2,400$^{\circ}C., and that the molecular planes were difficult to arrange into an ideal graphite lattice in spite of the saturation of crystallinity by heat treatment temperature. On the hard carbon made from cross-linked thermosetting plastics, phenol-formaldehyde filler and phenol-benzaldehyde binder, it was very difficult to rotate the molecular planes into a regular directional arrangement and into a consecutive order corresponding to the large graphite crystals. In addition to the above mentioned crystallinity, it was also determined in relation to electric conductivity, resistivity, hardness and apparent density of carbons.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.2
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• pp.147-152
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• 2002

Carbon nitride thin films were deposited by reactive sputtering for the hard coating materials on Si wafer and tool steels. When the nitrogen content of carbon nitride film on tool steel is 33.4%, the mean hardness and elastic modulus are 49.34 GPa and 307.2 GPa respectively. The nitrided or carburised surface acts as the diffusion barrier which shows better adhesion of carbon nitride thin film on the steel surface. To prevent nitrogen diffusion from the film, steel substrate can be saturated by nitrogen forming a Fe$_3$N layer. The desirable structure at the surface after carburising is martensite, but sometimes, due to high carbon content an proeutectoid Fe$_3$C structure may form at the grain boundaries, leaving the overall surface brittle and may cause defects.

• Journal of the Korean Magnetics Society
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• v.9 no.5
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• pp.263-270
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• 1999

The characteristics of lubricant for computer hard disk was investigated by surface analysis technique. The bonding state between carbon and lubricant is analysed to indentify the origin of adhesion. It is found that the thickness of lubricant is increased as pulling-up speed becomes faster and lubricant concentration is increased. The dominant surface contaminants on carbon overcoat are identified with C-OH and CO. The bond strength between carbon and lubricant is enhanced with heat treatment.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Journal of Powder Materials
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• v.6 no.4
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• pp.307-313
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• 1999

The effect of carbon content on the shape of WC grains dispersed in the Co-rich matrix during liquid phase sintering of WC-35%Co hard metals has been determined. The shape of WC grains was observed using SEM stereography after removing cobalt matrix with boiling hydrochloric acid solution. The WC grains changed from hexagonal to trigonal prism as the carbon content increased in the two-phase region of(WC + $\beta$ - Co), while the morphology of WC grains changed from trigonal to hexagonal shape as the carbon content decreased. The morphology of WC grains changes reversibly along with carbon loss or carbon pick-up. Morphology change of WC grains is attributed to crystal structure of WC, which has an asymmetric array of carbon atoms. There are two types of prismatic planes having different numbers of broken W-C bonds in WC grains. It is scrutinized that as the carbon content increases, the high energy prism planes grow fast and the crystals change from hexagonal to trigonal shape. On the other hand, when the carbon content decreases, the high energy prism planes are dissolved accompanying split of (100) plane into (101) and (101) planes.

• Journal of Ceramic Processing Research
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• v.19 no.6
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• pp.472-478
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• 2018

In this study, the sintering mechanism of woodceramics (WCs) from cashew nut shell waste (CNSW) was studied by analyzing chemical reactions and structural changes during the sintering process of of CNSW powder, liquefied wood and green bodies of WCs at $900^{\circ}C$ for 60 minutes in the $CO_2$ atmosphere. The chemical and structural properties of the products were investigated by X-ray diffraction (XRD), Raman spectroscopy, Fourier Transform Infrared (FTIR), and scanning electron microscope (SEM). The results showed that the decomposition reactions of liquefied wood and CNSW occurred simultaneously to form the hard carbon and the soft carbon at high temperature. The sintering mechanism of WCs has been presented.

• Carbon letters
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• v.3 no.1
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• pp.1-5
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• 2002

The regional bio-wastes available in abundance in India were converted into porous carbon by heat treatment at different temperatures from $650-950^{\circ}C$. The wood retain shapes after pyrolysis though shrinkage occured both in axial and radial directions. The shrinkage in radial direction was found to be more than in axial direction in all woods. The density of woods and chars from these at a given temperature has been found to follow linear relationship. Chars were steam activated at temperature $700-800^{\circ}C$ for different times between 45-240 min. Both the temperature and time of activation with steam has a profound effect on surface area. Chars from softwoods like bagasse and castor oil plant were activated at lower temperature, i.e. $700-750^{\circ}C$ whereas hard wood chars have to be activated at higher temperature around $800^{\circ}C$. The morphology of wood as well as of chars has been studied by SEM. The comparison of the two showed that the nature of porosity in chars depends on precursor morphology, nature and physical state of wood and presence of inorganic compounds in the wood. Hard wood results in cross inter connected pores while softwood leads to fibriller structure. The present studies show that activated carbon with reasonably good surface area (${\sim}1000m^2/gm$) can be prepared from soft wood bio-wastes like bagasse and castor oil plant, while surface area ${\sim}1370m^2/gm$ was achieved from hard wood bio waste of pine wood.

• Electronic Materials Letters
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• v.14 no.6
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• pp.755-765
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• 2018

In situ nitrogen doped hard carbon nanotubes (NHCNT) were fabricated by pyrolyzing tubular nitrogen doped conjugated microporous polymer. KOH activated NHCNT (K-NHCNT) were also prepared to improve their porous structure. XRD, SEM, TEM, EDS, XPS, Raman spectra, $N_2$ adsorption-desorption, galvanostatic charging-discharge, cyclic voltammetry and EIS were used to characterize the structure and performance of NHCNT and K-NHCNT. XRD and Raman spectra reveal K-NHCNT own a more disorder carbon. SEM indicate that the diameters of K-NHCNT are smaller than that of NHCNT. TEM and EDS further indicate that K-NHCNT are hollow carbon nanotubes with nitrogen uniformly distributed. $N_2$ adsorption-desorption analysis reveals that K-NHCNT have an ultra high specific surface area of $1787.37m^2g^{-1}$, which is much larger than that of NHCNT ($531.98m^2g^{-1}$). K-NHCNT delivers a high reversible capacity of $918mAh\;g^{-1}$ at $0.6A\;g^{-1}$. Even after 350 times cycling, the capacity of K-NHCNT cycled after 350 cycles at $0.6A\;g^{-1}$ is still as high as $591.6mAh\;g^{-1}$. Such outstanding electrochemical performance of the K-NHCNT are clearly attributed by its superior characters, which have great advantages over those commercial available carbon nanotubes ($200-450mAh\;g^{-1}$) not only for its desired electrochemical performance but also for its easily and scaling-up preparation.

• Proceedings of the KSME Conference
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• 2001.11a
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• pp.876-881
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• 2001

DLC(Diamond-like carbon) films possess high hardness, low friction coefficient, and good wear resistance. Due to these properties, DLC films have been used extensively in magnetic hard disk industry. The objective of the present study was to investigate the influence of environmental condition on the tribological behavior of DLC coated hard disk. It is found that the tribological characteristics of DLC films are strongly affected by relative humidity and temperature. Specifically, the friction coefficient increases with increase in temperature at relative humidity of 50%. However, at 20% and 85% RH the effect of temperature was not significant. Also, the degree of wear could be observed using an AFM.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2017.05a
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• pp.193-194
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• 2017

Effect of variable factors on carbon emissions in construction industry is hard to analysis. Therefore this study analyzies effect of variable factors on carbon emissions. This study shows importance of variable factors and emphasizes need of estimation of carbon emissions considering variable factors.