• KSTLE International Journal
• /
• v.1 no.1
• /
• pp.12-20
• /
• 2000

Nano-wear and friction of carbon overcoated laser-textured and mechanically-textured computer hard disk were characterised after contact start/stop (CSS) wear test. Various analytical and mechanical testing techniques were employed to study the changes in topography, roughness, chemical elements, mechanical properties and friction characteristics of the coating arising from the contact start/stop wear test These techniques include: the atomic force microscopy (AFM), the continuous nano-indentation test, the nano-scratch test, the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) and the auger electron spectroscopy (AES). It was shown that the surface roughness of the laser-textured (LT) bump and mechanically textured (MT) Bone was reduced approximately am and 7nm, respectively, after the CSS wear test. The elastic modulus and hardness values increased after the CSS test, indicating straining hardening of the top coating layer, A critical load was also identified fer adhesion failure between the magnetic layer and the Ni-P layer, The TOF-SIMS analysis also revealed some reduction in the intensity of C and $C_2$$F_59$, confirming the wear of lubricant elements on the coating surface.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 2003.10a
• /
• pp.41-42
• /
• 2003

Using a developed high-frequency induction heated combustion method. the simultaneous synthesis and densification of WC-xvol.%Co($0{\leq}x{\leq}20$) hard materials was accomplished using elemental powders of W, C and Co. A complete synthesis and densification of the materials was achieved in one step within a duration of 1min. The final relative densities of the composite were over 98.5% for all cases, under the applied pressure of 60 MPa and the induced current. The hardness of the composites decreases and the fracture toughness increases with increasing cobalt content. As the carbon to tungsten ration increases, the hardness increase, but the fracture toughness decreases. The maximum values for the fracture toughness and hardness are 15.1 $MPa{\cdot}m^{1/2}$(at 20vol.%Co, W:C=1:1), and 1928 $kg/mm^{2}$(at 5vol.%Co, W:C=1:1.3), respectively. Therefore we concluded that the HFIHCS method. which can produce WC-xvol.%Co within 1 minute in one step is superior to conventional ones.

• Journal of the Semiconductor & Display Technology
• /
• v.18 no.2
• /
• pp.44-47
• /
• 2019

Amorphous carbon layer (ACL) is actively used as an etch mask. Recent advances in patterning ACL requires the next level of durability of hard mask in high aspect ratio etch in near future semiconductor manufacturing, and it is worthwhile to know the surface property of ACL thin film to enhance the property of etch hard mask. In this research, ACL are deposited by 6 inch plasma enhanced chemical vapor deposition system with $C_3H_6$ and $N_2$ gas mixture. Surface properties of deposited ACL are investigated depending on gas flow, pressure, RF power. Fourier transform infrared is used for the analysis of surface chemistry, and X-ray photoemission spectra is used for the structural analysis with the consideration of the contents of $sp^2$ and $sp^3$ through fitting of C1s. Also mechanical properties of deposited ACL are measured in order to evaluate hardness.

• Journal of the Korean institute of surface engineering
• /
• v.53 no.6
• /
• pp.360-368
• /
• 2020

Wear resistance of cutting tools is one of the most important requirements in terms of the durability of cutting tool itself as well as the machining accuracy of the workpiece. Generally, tungsten carbide ball end mills have been processed with hard coatings for high durability and wear resistance such as diamond coating and tetrahedral amorphous carbon(ta-C) coating. In this study, we developed multilayer ta-C coatings whose wear resistance is comparable to that of diamond coating. First, we prepared single layer ta-C coatings according to the substrate bias voltage and Ar gas flow, and the surface microstructure, raman characteristics, hardness and wear characteristics were evaluated. Then, considering the hardness and wear resistance of the single layer ta-C, we fabricated multilayer coatings consisting of hard and soft layers. As a result, it was confirmed that the wear resistance of the multilayer ta-C coating with hardness of 51 GPa, and elastic recovery rate of 85% improved to 97% compared to that of the diamond coated ball end mill.

• Journal of Powder Materials
• /
• v.11 no.1
• /
• pp.28-33
• /
• 2004

In the present study, the focus is on the analysis of carbothermal reduction of the titanium-cobalt-oxygen based oxide powder by solid carbon for the optimizing synthesis process of ultra fined TiC/Co composite powder. The titanium-cobalt-oxygen based oxide powder was prepared by the combination of the spray drying and desalting processes using the titanium dioxide powder and cobalt nitrate as the raw materials. The titanium-cobalt-oxygen based oxide powder was mixed with carbon black, and then this mixture was carbothermally reduced under a flowing argon atmosphere. The changes in the phase structure and thermal gravity of the mixture during carbothermal reduction were analysed using XRD and TGA. The synthesized titanium-cobalt-oxygen based oxide powder has a mixture of $TiO_2$ and $CoTiO_3$. This oxide powder was transformed to a mixed state of titanium car-bide and cobalt by solid carbon through four steps of carbothermal reduction steps with increasing temperature; reduction of $CoTiO_3$ to $TiO_2$ and Co, reduction of $TiO_2$, to the magneli phase($Ti_nO_{2n-1}$, n>3), reduction of the mag-neli phase($Ti_nO_{2n-1}$, n>3) to the $Ti_nO_{2n-1}$(2$\leq$n$\leq$3) phases, and reduction and carburization of the $Ti_nO_{2n-1}$(2$\leq$n$\leq$3) phases to titanium carbide.

• Journal of the Korean Electrochemical Society
• /
• v.15 no.4
• /
• pp.236-241
• /
• 2012

It is widely recognized that it is hard to prepare hydrophilic graphite nanoparticles because of their high crystallinity and inert characteristics. In this study, we successfully synthesized the hydrophilic graphite nanoparticles by using liquid phase pulsed laser ablation method which has been actively employed for the thin film deposition up to now. The obtained hydrophilic graphite showed an ultra-high dispersion stability in water, because the hydrophilic functional groups like carboxyl and carbonyl group was simultaneously introduced onto the graphite surface with the nanoparticle formation, as confirmed by FT-IR and zeta potential measurements. Finally, a markedly enhanced gas sensing ability for acetone was shown in comparison with the conventional carbon black for the carbon polymer composite sensor with polyethyleneglycol (PEG).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.02a
• /
• pp.460-460
• /
• 2012

반도체 Device가 Shrink 함에 따라 Pattern Size가 작아지게 되고, 이로 인해 Photo Resist 물질 자체만으로는 원하는 Patterning 물질들을 Plasma Etching 하기가 어려워지고 있다. 이로 인해 Photoresist를 대체할 Hard Mask 개념이 도입되었으며, 이 Hardmask Layer 중 Amorphous Carbon Layer 가 가장 널리 사용되고 지고 있다. 이 Amorphous Carbon 계열의 Hardmask를 Etching 하기 위해서 기본적으로 O2 Plasma가 사용되는데, 이 O2 Plasma 내의 Oxygen Species들이 가지는 등 방성 Diffusion 특성으로 인해, 원하고자 하는 미세 Pattern의 Vertical Profile을 얻는데 많은 어려움이 있어왔다. 이를 Control 하기 인해 O2 Plasma Parameter들의 변화 및 Source/Bias Power 등의 변수가 연구되어 왔으며, 이와 다른 접근으로, N2 및 CO, CO2, SO2 등의 여러 Additive Gas 들의 첨가를 통해 미세 Pattern의 Profile을 개선하고, Plasma Etching 특성을 개선하는 연구가 같이 진행되어져 왔다. 본 논문에서 VLSI Device의 Masking Layer로 사용되는, Carbon 계 유기 층의 Plasma 식각 특성에 대한 연구를 진행하였다. Plasma Etchant로 사용되는 O2 Plasma에 새로운 첨가제 가스인 카르보닐 황화물 (COS) Gas를 추가하였을 시 나타나는 Plasma 내의 변화를 Plasma Parameter 및 IR 및 XPS, OES 분석을 통하여 규명하고, 이로 인한 Etch Rate 및 Plasma Potential에 대해 비교 분석하였다. COS Gas를 정량적으로 추가할 시, Plasma의 변화 및 이로 인해 얻어지는 Pattern에서의 Etchant Species들의 변화를 통해 Profile의 변화를 Mechanism 적으로 규명할 수 있었으며, 이로 인해 기존의 O2 Plasma를 통해 얻어진 Vertical Profile 대비, COS Additive Gas를 추가하였을 경우, Pattern Profile 변화가 개선됨을 최종적으로 확인 할 수 있었다.

• International Journal of Advanced Culture Technology
• /
• v.3 no.1
• /
• pp.61-67
• /
• 2015

The application of SS400 carbon steel and AISI430 ferritic stainless steel joint has been increased in industries because of the advantage of both metals was able to increase the service lifetime of the important structures. Therefore, a fusion welding process that could produce a sound weld and good joint properties should be optimized. This research is aimed to weld a butt joint of SS400 carbon steel and AISI430 ferritic stainless steel using Gas Metal Arc Welding (GMAW) welding process and to study the effects of welding parameters on joint properties. The experimental results were concluded as follows. The optimized welding parameter that produced the tensile strength of 448 MPa was the welding current of 110A, the welding speed of 400 mm/min and the mixed gas of $80%Ar+20%CO_2$. Increase of the welding current affected to increase and decrease the tensile strength of the joint, respectively. Lower welding current produced the incomplete bonding of the metals and indicated the low tensile strength. Microstructure investigation of the welded joint showed a columnar grain in the weld metal and a coarse grain in the heat affected zone (HAZ). The unknown hard precipitated phases were also found at the grain boundaries of the weld metal and HAZ. The hardness profile did not show the difference of the hardness on the joint that was welded by various welding currents but the hardness of the weld metal was higher than that of the other location.

• Korean Journal of Materials Research
• /
• v.19 no.6
• /
• pp.293-299
• /
• 2009

The microstructures and mechanical properties of Dual Phase (DP), Transformation-Induced Plasticity (TRIP), and Quenching & Partitioning (Q&P) steels were investigated in order to define the strengthening mechanism of 0.2 C steel. An intercritical annealing between Ac1 and Ac3 was conducted to produce DP and TRIP steel, followed by quenching the DP and TRIP steel being quenched at to room temperature and by the TRIP steel being austemperingaustempered-air cooling cooled the steel toat room temperature, respectively. The Q&P steel was produced from full austenization, followed by quenching to the temperature between $M_s$ and $M_f$, and then enriching the carbon to stabilize the austenite throughout the heat treatment. For the DP and TRIP steels, as the intercritical annealing temperature increased, the tensile strength increased and the elongation decreased. The strength variation was due to the amount of hard phases, i.e., martensite and bainite, respectively in the DP and TRIP steels. It was also found that the elongation also decreased with the amount of soft ferrite in the DP and TRIP steels and with the amount of the that was retained in the austenite phasein the TRIP steel, respectively for the DP and TRIP steels. For the Q&P steel, as the partitioning time increased, the elongation and the tensile strength increased slightly. This was due to the stabilized austenite that was enriched with carbon, even when the amount of retained austenite decreased as the partitioning time increased from 30 seconds to 100 seconds.

• Proceedings of the Korean Powder Metallurgy Institute Conference
• /
• 1994.04c
• /
• pp.6-6
• /
• 1994

Har dmaterials such as cemented carbides with or without coated layer, cermets, ceramics and diamond or c-BN high pressure sintered compact are used for cutting tools, wear -resistant parts, rock drilling bits and/or high pressure vessels. These hardmaterials contain not only hard phase, but also second consituent as the element for forming ductile phase and/or sintering aid, and the mechanical properties of each material depend on (1) the amount of the second constituent as well as (2) the grain size of the hard phase. The hardness of each material mainly depends on these two factors. The fracture strength, however, largely depends on other microstructur a1 factors as well as the above two factors. For all hardmaterials, the fracture strength is consider ably affected by (3) the size of microstructur a1 defect which acts as the fracture source. In cemented carbides, the following factors which are generated mainly due to the addition of the second constituent are also important; (4) the variation of the carbon content in the normal phase region free from V-phase and graphite phase, (5) the precipitation of $Co_3$ during heating at about $800^{\circ}C$,(6) the domain size of binder phase, and (7) the formation of ${\beta}$-free layer or Co-rich layer near the surface of sintered compacts. For cemented carbides coated with thin hard substance, the important factors are as follows; (8) the kind of coated substance, (9) the formation of ${\eta}$-phase layer at the interface between coated layer and substrate, (10) the type of residual stress (tension or compression) in the coated layer which depends on the kind of coating method (CVD or PVD), and (11) the properties of the substrate, and (12) the combination, coherency and periodicity of multi-layers. In the lecture, the details of these factors and their effect on the strength will be explained.