• 제목/요약/키워드: hard Coating

검색결과 268건 처리시간 0.026초

Nano-Indenter 측정 중 Indenting 깊이에 따른 박막의 표면 및 기판 효과에 의한 ZrN 박막의 특성연구

  • 현정민;김수인;이재훈;김홍기;심지용;문수영;윤초롱;이창우
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.177.2-177.2
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    • 2015
  • Nano-mechanics 연구는 기판의 나노표면에 대하여 indenter tip을 직접 인가하여 측정함으로써 기존 분광학 연구에서는 불가능했던 박막의 기계적 특성 연구가 가능하다. 그러나 박막분석 특성상 박막의 표면, 기판 또는 하부 박막에 의한 영향으로 인해 박막의 고유한 물성특성 연구에 제약이 있다. 박막 표면에 의한 영향인 표면효과는 nano-indentation을 실행 할 때 tip의 압입으로 발생되는 표면의 스트레스로 인해 표면 변형이 나타나는 현상이다. 반면에 하부 박막과 기판에 의한 오류는 nano-indentation 실행 시 tip의 압입 깊이가 깊어질수록 하부박막 또는 기판과 가까워지기 때문에 박막 고유의 특성이 아닌 하부박막과 기판에 의한 영향이 같이 나타나는 현상이다. 이러한 오류를 최소화 하고자 많은 연구에서는 박막의 강도에 따라 nano-indentation의 실행 깊이를 박막 총 두께의 최소7%에서 최대 50%까지 삽입하는 방법을 도입하였다. 이를 기반으로 본 연구는 Zirconium nitride (ZrN) 박막의 증착된 두께 깊이만큼 nano-indentation 분석을 실행 하였으며 박막 고유의 nano-mechanics 특성을 연구 하였다. ZrN 박막은 hard coating 분야에 많이 사용되는 물질로 박막 고유의 hardness를 연구하는 것이 큰 의미가 있다. 연구 결과 모든 박막은 두께 30% 깊이 측정에서 박막 표면과 기판효과가 최소화된 박막의 물성 측정이 가능 하였고, 증착 시 질소를 0.5, 1, 2 sccm 흘려준 박막들은 총 두께 30% 깊이에서 hardness가 각각 23.2, 8.6, 18 GPa이었다. 따라서 nano-indenter 측정 시 유효한 측정 깊이에서 측정을 실시하는 것이, 박막의 물성분석에 있어서 대단히 중요함을 확인 하였다.

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UV-NIL(Ultraviolet-Nano-Imprinting-Lithography) 방법을 이용한 나노 패터닝기술 (Nano-patterning technology using an UV-NIL method)

  • 심영석;정준호;손현기;신영재;이응숙;최성욱;김재호
    • 한국진공학회지
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    • 제13권1호
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    • pp.39-45
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    • 2004
  • UV-나노임프린팅 (Ultraviolet-Nanoimprinting Lithography:UV-NIL) 공정 기술은 수십 나노에서 수 나노미터 크기의 구조물을 적은 비용으로 대량생산 할 수 있다는 장점을 가지고 있는 기술로 최근 전세계적으로 연구가 활발히 진행되고 있다. 본 연구에서는 반도체 공정 중 마스크 제작 공정을 이용하여 나노패턴을 가진 5${\times}$5${\times}$0.09 인치 크기의 수정스탬프(quartz stamp)를 제작하였고, 임프린팅 (imprinting)시에 레지스트(resist)와 스탬프(stamp) 사이에서 발생하는 점착현상(adhesion)을 방지하고자 그 표면에 Fluoroalkanesilane(FAS) 표면처리를 하였다. 웨이퍼의 평탄도를 개선하고 친수(hydrophilic) 상태의 표면을 만들기 위해 그 표면에 평탄화층을 스핀코팅하였고, 1 nl의 분해능을 가진 디스펜서(dispenser)를 이용하여 레지스트 액적을 도포하였다. 스템프 상의 패턴과 레지스트에 임프린트된 패턴은 SEM, AFM 등을 이용하여 측정하였으며, EVG620-NIL 장비를 이용한 임프린팅 실험에서 370 nm - 1 um 크기의 다양한 패턴을 가진 스탬프의 패턴들이 정확하게 레지스트에 전사됨을 확인하였다.

캘린더 처리에 의한 다층지의 두께방향 구조 특성 변화 (A Change of Z-directional Structure in Multi-ply Sheet by Calendering)

  • 윤혜정;이학래;진성민;정현도
    • 펄프종이기술
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    • 제37권3호
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    • pp.23-32
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    • 2005
  • A change of z-directional structural and surface properties by calendering has a great influence on liquid penetration into a sheet. It could be also important for multi-ply sheet because it contacts liquid dunhg coating or converting process. Therefore, this study was aimed to evaluate of a change of z-directional structure in multi-ply sheet by calendering. To do this, multi-ply sheets were prepared with various raw materials and calendered at the different pressure and temperature conditions. In multi-ply sheet which consisted of one kind of pulp fiber, thickness reductions were higher in top and bottom plies than in middle plies. And in the case of soft nip calender treatment with high temperature, top layer which was in contact with heating roll showed the highest reduction of thickness. Hard nip calender treatment showed U-shaped density profile in z-direction, but compression profile by SNC treatment was dependent on calendering condition. To examine z-directional structure of multi-ply sheet which was composed of different raw material for each layer, CLSM (Confocal Laser Scanning Microscopy) analyses were carried out on cross direction of sheet. It turned out to be a useful tool for investigating z-directional analysis. As a result, variation of thickness reduction in z-direction is dependent on ply structure, compressibility of pulp fiber, and calendering condition.

무전해 식각법으로 합성한 Si 나노와이어 Field Effect Transistor 유연소자의 특성 (Electrical Properties of Flexible Field Effect Transistor Devices Composed of Si Nanowire by Electroless Etching Method)

  • 이상훈;문경주;황성환;이태일;명재민
    • 한국재료학회지
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    • 제21권2호
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    • pp.115-119
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    • 2011
  • Si Nanowire (NW) field effect transistors (FETs) were fabricated on hard Si and flexible polyimide (PI) substrates, and their electrical characteristics were compared. Si NWs used as channels were synthesized by electroless etching method at low temperature, and these NWs were refined using a centrifugation method to get the NWs to have an optimal diameter and length for FETs. The gate insulator was poly(4-vinylphenol) (PVP), prepared using a spin-coating method on the PI substrate. Gold was used as electrodes whose gap was 8 ${\mu}m$. These gold electrodes were deposited using a thermal evaporator. Current-voltage (I-V) characteristics of the device were measured using a semiconductor analyzer, HP-4145B. The electrical properties of the device were characterized through hole mobility, $I_{on}/I_{off}$ ratio and threshold voltage. The results showed that the electrical properties of the TFTs on PVP were similar to those of TFTs on $SiO_2$. The bending durability of SiNWs TFTs on PI substrate was also studied with increasing bending times. The results showed that the electrical properties were maintained until the sample was folded about 500 times. But, after more than 1000 bending tests, drain current showed a rapid decrease due to the defects caused by the roughness of the surface of the Si NWs and mismatches of the Si NWs with electrodes.

1990년대 의상에 표현된 에로티시즘에 관한 연구 (A Study on the Eroticism Expressed in Fashion in the 1990s)

  • 손미희;임영자
    • 복식
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    • 제26권
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    • pp.29-47
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    • 1995
  • Today, we live in the fastly changing society, rapidly developing scientific civilization and repeatly confusing political culture. Therefore, man persuits the emotional rest in "eros" and sympathizes with eroticism. Such an eroticism represents too much in art and costume all over the world. the purpose of this study is to classify the ex-pressive style of eroticism which is the feature of the costume in the first year of 1990's and to analyze its expression meaning. This study will be a basic data of new design development and help predict the costume in the latter half of the yeat. The method of this study was performed by using the literature related to the eroticism and the study of preceeding researchers. To analyze the costume style the its implied meaning being used to express the eroticism of 1990's, the magazines(Elle, Vogue, WWD, Collections etc) and the literatures related to fashion were used. The styles and meaning of eroticism expressed eroticism by using the minimal design which exposes wholly or partly by using a transparent vinyl and a see-through clothing. The sexy style arose from the expression of social rebellion and the exposure of suppressive sex as a psychological repulsion against the older generation. 2) Deshabille style : This style is the conver-sion to the outer garment of an underwear. The excessive exposure which just concerns the inti-mate parts of the body by using the thin cloth or lace for an underwear. This style can be recognized as the beauty destruction and ugly 3) Glamour style : The style is made up of the high-grade cloth such as silk and velvet and expresses the bodily beauty. This style falls into a rebellious culture and comes from the inten-tional expression to escape the modern life which is straight and hard. 4) metallic style : This style uses variously the new material such as vinyl-coating, enamel and represents the eroticism through the original expressions.pressions.

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강변여과수 처리를 위한 포기-모래여과공정에서 망간제거 기작에 관한 연구 (The study of manganese removal mechanism in aeration-sand filtration process for treating bank filtered water)

  • 최승철;김세환;양해진;임재림;왕창근;정관수
    • 상하수도학회지
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    • 제24권3호
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    • pp.341-349
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    • 2010
  • It is well known that manganese is hard to oxidize under neutral pH condition in the atmosphere while iron can be easily oxidized to insoluble iron oxide. The purpose of this study is to identify removal mechanism of manganese in the D water treatment plant where is treating bank filtered water in aeration and rapid sand filtration. Average concentration of iron and manganese in bank filtered water were 5.9 mg/L and 3.6 mg/L in 2008, respectively. However, their concentration in rapid sand filtrate were only 0.11 mg/L and 0.03 mg/L, respectively. Most of the sand was coated with black colored manganese oxide except surface layer. According to EDX analysis of sand which was collected in different depth of sand filter, the content of i ron in the upper part sand was relatively higher than that in the lower part. while manganese content increased with a depth. The presence of iron and manganese oxidizing bacteria have been identified in sand of rapid sand filtration. It is supposed that these bacteria contributed some to remove iron and manganese in rapid sand filter. In conclusion, manganese has been simultaneously removed by physicochemical reaction and biological reaction. However, it is considered that the former reaction is dominant than the latter. That is, Mn(II) ion is rapidly adsorbed on ${\gamma}$-FeOOH which is intermediate iron oxidant and then adsorbed Mn(II) ion is oxidized to insoluble manganese oxide. In addition, manganese oxidation is accelerated by autocatalytic reaction of manganese oxide. The iron and manganese oxides deposited on the surface of the sand and then are aged with coating sand surface.

Spiropyran의 분산용매가 Sol-Gel 하드 코팅 막의 광 변색 특성에 미치는 영향 (Effect of Solvents on the Photochromic Properties of Spiropyran in Hard Coating Films Prepared by Sol-Gel Method)

  • 김대현;신용탁;이주연;홍원길;이범석;송기창
    • Korean Chemical Engineering Research
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    • 제47권4호
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    • pp.430-435
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    • 2009
  • 실란커플링제인 glycidoxypropyl trimethoxysilane과 vinyltriethoxysilane을 출발물질로 하여 sol-gel 법에 의해 유-무기 혼성 용액을 제조하였다. 이 용액에 spiropyran 계 광 변색 염료를 다양한 종류의 용매에 용해시킨 후 혼합하여 광변색 코팅 용액을 제조하였다. 그 후 기재인 polycarbonate 시트에 코팅시키고 열 경화시켜 광 변색성을 갖는 하드 코팅 막을 제조하였다. 이 과정 중 spiropyran을 용해시킨 용매의 극성이 코팅 막의 광변색 특성에 미치는 영향을 조사하였다. Spiropyran을 용해시킨 용매의 극성이 증가할수록 겔 매트릭스에서의 spiropyran의 열린 구조가 더욱 안정화되므로 코팅 막의 소색속도가 감소하였다.

Macroscopic Wear Behavior of C/C and C/C-SiC Composites Coated with Hafnium Carbide

  • Lee, Kee Sung;Sihn, Ihn Cheol;Lim, Byung-Joo;Lim, Kwang Hyun
    • 한국세라믹학회지
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    • 제52권6호
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    • pp.429-434
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    • 2015
  • This study investigates the macroscopic wear behaviors of C/C and C/C-SiC composites coated with hafnium carbide (HfC). To improve the wear resistance of C/C composites, low-pressure chemical vapor deposition (LPCVD) was used to obtain HfC coating. The CVD coatings were deposited at various deposition temperatures of 1300, 1400, and $1500^{\circ}C$. The effect of the substrate material (the C/C substrate, the C/C-CVR substrate, or the C/C-SiC substrate deposited by LSI) was also studied to improve the wear resistance. The experiment used the ball-on-disk method, with a tungsten carbide (WC) ball utilized as an indenter to evaluate the wear behavior. The HfC coatings were found to effectively improve the wear resistance of C/C and C/C-SiC composites, compared with the case of a non-coated C/C composite. The former showed lower friction coefficients and almost no wear loss during the wear test because of the presence of hard coatings. The wear scar width was relatively narrower for the C/C and C/C-SiC composites with hafnium coatings. Wear behavior was found to critically depend on the deposition temperature and the material. Thus, the HfC-coated C/C-SiC composites fabricated at deposition temperatures of $1500^{\circ}C$ showed the best wear resistance, a lower friction coefficient, and almost no loss during the wear test.

전동차 대치차 기어의 적절한 탐상법에 관한 연구 (A study on appropriate nondestructive inspection methods of gear units for rolling stock)

  • 이재일;이민열;이원학;손영진
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2010년도 춘계학술대회 논문집
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    • pp.571-582
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    • 2010
  • 전동차 중정비 시 대치차 기어의 비파괴검사 방법으로는 일반적으로 침투비파괴검사를 적용하고 있다. 침투비파괴검사는 결함의 미세한 개구부 속으로 침투액을 투입하여 표면에 잔류하는 여분의 침투액을 제거하고 현상제를 도포하여 결함지시 모양을 관찰하여 탐상하는 방법이다. 그러나 이 방법은 기어를 조립상태에서 침투비파괴검사를 실시하므로 많은 문제점이 있다. 치면의 각도가 급경사를 이루므로 충분한 침투가 어렵고 과잉제거의 문제가 있다. 그에 비해 자분비파괴검사는 표면 하 결함은 물론 미세한 결함 검출에 용이하다. 시험결과 치면에 응력이 집중되어 내부결함 및 미세결함이 존재하는 경우 침투비파괴검사로 발견되지 않는 경우가 있으나 자분비파괴 검사로 미세한 결함까지 발견 할 수 있었다. 따라서 전동차 대치차 기어의 합리적인 비파괴검사법은 자분을 사용한 비파괴검사가 적합하다고 판단한다.

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Morphology of Bone-like Apatite Formation on Sr and Si-doped Hydroxyapatite Surface of Ti-6Al-4V Alloy after Plasma Electrolytic Oxidation

  • Yu, Ji-Min;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2017년도 춘계학술대회 논문집
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    • pp.79-79
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    • 2017
  • Metallic biomaterials have been mainly used for the fabrication of medical devices for the replacement of hard tissue such as artificial hip joints, bone plates, and dental implants. Because they are very reliable on the viewpoint of mechanical performance. This trend is expected to continue. Especially, Ti and Ti alloys are bioinert. So, they do not chemically bond to the bone, whereas they physically bond with bone tissue. For their poor surface biocompatibility, the surface of Ti alloys has to be modified to improve the surface osteoinductivity. Recently, ceramic-like coatings on titanium, produced by plasma electrolytic oxidation (PEO), have been developed with calciumand phosphorus-enriched surfaces. A lso included the influences of coatings, which can accelerate healing and cell integration, as well as improve tribological properties. However, the adhesions of these coatings to the Ti surface need to be improved for clinical use. Particularly Silicon (Si) has been found to be essential for normal bone, cartilage growth and development. This hydroxyapatite, modified with the inclusion of small concentrations of silicon has been demonstrating to improve the osteoblast proliferation and the bone extracellular matrix production. Strontium-containing hydroxyapatite (Sr-HA) was designed as a filling material to improve the biocompatibility of bone cement. In vitro, the presence of strontium in the coating enhances osteoblast activity and differentiation, whereas it inhibits osteoclast production and proliferation. The objective of this work was to study Morphology of bone-like apatite formation on Sr and Si-doped hydroxyapatite surface of Ti-6Al-4V alloy after plasma electrolytic oxidation. Anodized alloys was prepared at 270V~300V voltages with various concentrations of Si and Sr ions. Bone-like apatite formation was carried out in SBF solution. The morphology of PEO, phase and composition of oxide surface of Ti-6Al-4V alloys were examined by FE-SEM, EDS, and XRD.

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