• 한국진공학회지
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• 제11권3호
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• pp.141-150
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• 2002

낮은 산소 부분압과 긴 타깃-기판 거리에서 DC 반응이온 마그네트론 스퍼터링(reactive magnetron sputtering ; RMS) 방법으로 $TiO_2$ 박막을 증착하였으며, 증착되는 박막에 end-Hall 이온 소스를 이용하여 아르곤 이온빔 보조 증착을 해 주었다. $TiO_2$ 박막의 광학적 특성은 분광광도계에서 측정된 투과율과 반사율 스펙트럼을 이용하여 분석하였고, 구조적 특성은 AFM과 XRD를 이용하여 분석하였다. 이온빔 보조 RMS 방법으로 증착된 $TiO_2$ 박막은 일반적인 RMS로 증착된 박막보다 조밀도가 높고, 흡수가 낮으며, 표면거칠기가 작았다. 본 연구에서는 이온빔 보조 RMS 방법이 유전체 광학박막 코팅에 적용될 수 있음을 보여준다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.257-257
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• 2011

현재의 평판 디스플레이를 대체할 차세대 정보전달 매체로서 플랙서블 디스플레이가 부각되고 있다. 이러한 플렉서블 디스플레이의 발전과 함께 터치스크린 패널 또한 같은 방향으로 연구 개발이 필요하다. 플렉서블 터치 스크린 패널의 연구에서 가장 큰 문제는 ITO의 휨에 따른 깨짐 현상으로 인한 전기적 특성의 저하이다. 이 논문에서는 현재 터치 스크린 패널로 사용되는 ITO/PET 샘플과 ITO/PET 를 패터닝한 그 위에 PEDOT을 증착한 구조를 전기적, 기계적, 광학적 특성을 비교하였다. 실험진행은 샘플의 면저항 및 투과도, hall measurement 측정을 진행하였고, 추가적으로 샘플의 Bending test를 통해 bending 횟수에 따른 박막의 특성을 분석하였다. 측정 결과, ITO/PET 와 PEDOT/patterned ITO/PET 샘플의 면저항은 400${\Omega}/{\Box}$, 424${\Omega}/{\Box}$로 큰 변화가 없었으며, hall 측정결과 중에서 carrier concentration은 2.8${\times}$1,020/cm-3, 4.492${\times}$1,021/cm-3로 증가 하였다. 투과도를 측정한 결과 97.6%, 96% 정도로 큰 변화는 없었다. 하지만, bending 횟수에 따른 면저항 특성의 변화 측정 결과 PEDOT/patterned ITO/PET 샘플의 면저항 변화가 기존의 ITO/PET 샘플의 면저항 변화와 비교하여 거의 변화가 없어, 기계적 특성에서 우수한 특성을 확인 할 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.401-401
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• 2011

In this work, we deposited Al2O3doped ZnO (AZO) thin films by direct current (DC) magnetron sputtering method with a $40^{\circ}$ tilted target, for application in the front layer of thin film solar cell. Wet chemical etching behavior of AZO films was also investigated. In order to optimize textured AZO films, oxalic acid ($C_2H_2O_4$)has been used as wet etchant of AZO film. In this experiment we used 0.001% concentration of oxalic acid various etching time, that showed an anisotropy in etching texture of AZO films. Electrical resistivity, Hall mobility and carrier concentration measurements are performed by using the Hall measurement, that are $6{\times}10^{-4}{\Omega}cm$, $20{\sim}25cm^2/V-s$ and $4{\sim}6{\times}10^{20}$, respectively.

• 한국초전도ㆍ저온공학회논문지
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• 제17권1호
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• pp.17-20
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• 2015

Coated conductor is an important candidate for power cable applications due to its high current density. Even for DC power cable transmission, we must study the transport properties of HTS tapes after slow and fast discharge. In order to evaluate relation of the magnetic field with applied current we developed a scanning magnetic field measurements system by employing a Hall probe. This work presents the measurements of the magnetic fields above a coated conductor by varying applied current pattern. In the work, a transport current of 100 A, less than the critical current, is applied to YBCO coated conductor. We measured the residual magnetic field distributions after cut off the transport current with slow and fast operations. The results show differences of the magnetic field profiles and the corresponding current profiles by an inverse solution from the magnetic field measurement between these two operations because of the hysteresis of coated conductor excited by the transport current.

• 한국세라믹학회지
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• 제36권1호
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• pp.55-60
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• 1999

Hexamethyldisilane(Si2(CH3)6)의 single precursor를 출발원료로 사용하여 화학기상증착법으로 Si 기판위에 buffer층의 형성 없이 $\beta$-SiC의 박막을 증착하였다. Si 기판과 SiO2 mask에서 SiC 박막 증착의 선택성을 위하여 HCI의 식각 가스를 도입하였고 출발원료와 HCI 가스의 공급방법을 변화시켰다. SiC 박막 증착 과정에서 HCI 가스의 도입이 막의 표면 조도에 미치는 영향을 조사하였고 Hall 측정을 통하여 SiC 막의 전기적 특성을 조사하였다.

• Carbon letters
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• 제13권1호
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• pp.44-47
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• 2012

We analyzed the effect of etchants for metal catalysts in terms of the characteristics of resulting graphene films, such as sheet resistance, hall mobility, transmittance, and carrier concentration. We found the residue of $FeCl_3$ etchant degraded the sheet resistance and mobility of graphene films. The residue was identified as an iron oxide containing a small amount of Cl through elemental analysis using X-ray photoelectron spectroscopy. To remove this residue, we provide an alternative etching solution by introducing acidic etching solutions and their combinations ($HNO_3$, HCl, $FeCl_3$ + HCl, and $FeCl_3+HNO_3$). The combination of $FeCl_3$ and acidic solutions (HCl and $HNO_3$) resulted in more enhanced electrical properties than pure etchants, which is attributed to the elimination of left over etching residue, and a small amount of amorphous carbon debris after the etching process.

• 한국전기전자재료학회논문지
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• 제23권2호
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• pp.98-102
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• 2010

This paper describes that single crystalline 3C-SiC (cubic silicon carbide) thin films have been deposited on carbonized Si(100) substrates using hexamethyldisilane (HMDS, $Si_2(CH_3){_6}$) as a safe organosilane single precursor and a nonflammable mixture of Ar and $H_2$ gas as the carrier gas by APCVD at $1280^{\circ}C$. The deposition was performed under various conditions to determine the optimized growth condition. The crystallinity of the 3C-SiC thin film was analyzed by XRD (X-ray diffraction). The surface morphology was also observed by AFM (atomic force microscopy) and voids between SiC and Si interfaces were measured by SEM (scanning electron microscopy). Finally, residual strain and hall mobility was investigated by surface profiler and hall measurement, respectively. From these results, the single crystalline 3C-SiC film had a good crystal quality without defects due to viods, a low residual stress, a very low roughness.

• 한국가스학회지
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• 제12권2호
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• pp.53-56
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• 2008

용접 부위의 결함을 비파괴적으로 탐지하기 위하여 홀센서에 의해 누설자속을 측정할 수 있는 시스템과 4 종류의 용접결함을 갖는 기준시편을 제작하였다. 제작한 시스템으로 시편에 생성시킨 4 종류의 결함에서 누설된 자속을 측정하였고, 신호의 피크-피크 크기와 피크-피크 간의 간격에서 결함의 종류를 구분할 수 있는 가능성을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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• pp.1018-1021
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• 2003

This dissertation is reference to measure visual information about the configuration of magnetic field automatically and materialize the new magnetic field mapping system for the rapid and clear measure by using of the mediocrity orthogonal robot in the three- dimensional space required the measure of magnetic field concurrently. The measuring sensor is composed to be available for the measure of three-dimensional direction of magnetic field by vertically conjoining each of three hall sensors utilized of the hall effect and installed Gaussmeter, which is devised to receive the sensor result and the robot controller, away from the measuring robot in order to minimize the affection of magnetic field. Also, the controller and Gaussmeter are composed of Use interface, RS-232C and IEEE-488.2 communication. Interface system is written in NI's LabVIEW and composed to be able to set up a measuring area, the measuring number of times, two and three-dimensional graph, the velocity of robot and the magnetic field distribution graph of each element by inputting parameters. The materialized magnetic field mapping system expert the collection of the data easily and the effect of utilizing data.

• 한국초전도ㆍ저온공학회논문지
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• 제11권3호
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• pp.26-30
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• 2009

Korea Superconducting Tokamak Advanced Research(KSTAR) device is composed of 30 superconducting magnets, magnet structure, vacuum vessel, cryostat, current feeder system, and etc. KSTAR device is operated in the cryogenic temperature and high magnetic field. We install about 800 sensors - temperature sensors, stain gages, displacement gages, hall sensors - to monitor the thermal, mechanical, electrical status of KSTAR during operation. As a tremendous numbers of sensors should be installed for monitoring the KSTAR device, the method of effective installation was developed. The sensor test was successfully carried out to check its reliability and its reproduction in the cryogenic temperature. The sensor signal is processed by PXI-based DAQ system and communicated with central control system via machine network and is shown by Operator Interface(OPI) display in the main control room. In order to safely operate the device, any violations of mechanical & superconductive characteristic of the device components were informed to its operation system & operator. If the monitored values exceed the pre-set values, the protective action should be taken against the possible damage. In this paper, the system composition, operation criteria, operation result were presented.