• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1843-1845
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• 1998

Gyroscope is a very important core sensor as a rotation sensor in inertial space, in inertial guidance and navigation system on aeronautics. Plane, vessel and so on for civilian and millitary applications. Research and development of fiber optic gyroscope began in 1976 and focused on improving the gyroscope's sensitivity to rotation. bias performance and reducing noise. We have developed a Interferometric Fiber Optic' Gyroscope using a integrated-optic-circuit (IOC), which is operating with closed-loop electronic circuit. This paper describes the scheme of optical part and electronic part and also test results of this fiber optic gyroscope using a integrated-optic-circuit (IOC). The performance have been achieved as long-term bias drift of $1.73^{\circ}/h$.

• Journal of Sensor Science and Technology
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• v.24 no.4
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• pp.274-279
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• 2015

This paper describes optimizing fabrication methods for 2-axis electrically levitated MEMS gyroscope. Electrostatically levitated gyroscope has very high potential of performance due to the fact that its proof mass is not mechanically bound to any other structures, but its complex structure and difficulty of fabrication holds back the research that only a few researches have been reported. In this work, fabrication method for glass-silicon-glass 3-floor structure for 2-axis electrically levitated MEMS gyroscope is presented, including simplified multi-level glass etch method utilizing photoresist attack, preventing metal diffusion by adding middle layer of metal electrode, overcoming Deep RIE limitation by separate fabrication of silicon structures and keeping the electrode safe from dicing debris.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1089-1092
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• 1995

A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micrimachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic acturation and electromagnetic detection. The maximum output is obtained when the driving frequencyequals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness, i.e. the material constants and spring dimensions. The dimensions of the beams are determined using the analytic vibration modelling. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 4000 electronic circuit amplifying coefficient for an AC drive voltage of 3V bias voltage of 15V and DC field current of 50 mA.

• Journal of Electrical Engineering and Technology
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• v.12 no.1
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• pp.385-395
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• 2017

A new digitized decoupled dual-axis micro dynamically tuned gyroscope with three equilibrium rings (TMDTG) is proposed which can eliminate the constant torque disturbance (CTD) caused by the double rotation frequency of a driving shaft with a micro dynamically tuned gyroscope with one equilibrium ring (MDTG). A mechanical and kinematic model of the TMDTG is theoretically analyzed and the structure parameters are optimized in ANSYS to demonstrate reliability. By adjusting the thickness of each equilibrium ring, the CTD can be eliminated. The digitized model of the TMDTG system is then simulated and examined using MATLAB. Finally, a digitized prototype based on FPGA is created. The gyroscope can be dynamically tuned by adjusting feedback voltage. Experimental results show the TMDTG has good performance with a scale factor of $283LSB/^{\circ}/s$ in X-axis and $220LSB/^{\circ}/s$ in Y-axis, respectively. The scale factor non-linearity is 0.09% in X-axis and 0.13% in Y-axis. Results from analytical models, simulations, and experiments demonstrate the feasibility of the proposed TMDTG.

• The Journal of Korea Robotics Society
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• v.8 no.1
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• pp.29-36
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• 2013

This paper presents a sensitivity optimization of a MEMS (microelectromechanical systems) gyroscope for a magnet-gyro system. The magnet-gyro system, which is a guidance system for a AGV (automatic or automated guided vehicle), uses a magnet positioning system and a yaw gyroscope. The magnet positioning system measures magnetism of a cylindrical magnet embedded on the floor, and AGV is guided by the motion direction angle calculated with the measured magnetism. If the magnet positioning system does not measure the magnetism, the AGV is guided by using angular velocity measured with the gyroscope. The gyroscope used for the magnet-gyro system is usually MEMS type. Because the MEMS gyroscope is made from the process technology in semiconductor device fabrication, it has small size, low-power and low price. However, the MEMS gyroscope has drift phenomenon caused by noise and calculation error. Precision ADC (analog to digital converter) and accurate sensitivity are needed to minimize the drift phenomenon. Therefore, this paper proposes the method of the sensitivity optimization of the MEMS gyroscope using DEAS (dynamic encoding algorithm for searches). For experiment, we used the AGV mounted with a laser navigation system which is able to measure accurate position of the AGV and compared result by the sensitivity value calculated by the proposed method with result by the sensitivity in specification of the MEMS gyroscope. In experimental results, we verified that the sensitivity value through the proposed method can calculate more accurate motion direction angle of the AGV.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.2
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• pp.222-227
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• 2009

The bias characteristics due to the changes of temperature and temperature gradient of fiber coil are investigated in fiber-optic gyroscope. The bias performance is degraded with the changes of temperature and temperature gradient of fiber coil. The temperature compensation using both the temperature-dependent bias measurement and the temperature-induced error model of fiber-optic gyroscope improves the bias stability about 3 times as much as the uncompensated original case, which leads to very stable bias performance over the temperature range from $-35^{\circ}C$ to $+77^{\circ}C$.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.10
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• pp.1440-1447
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• 2015

This paper describes a study for anti high-shock design of MEMS vibrating ring gyroscope. Structure models was made by MEMS technology processing. MEMS Vibrating Ring Gyroscope mechanical structure were not only anti-high shock simulated with the LS Dyna Ver 971 software but also with mathematical analysis and the finite element method in order to confirm the shock reliability. Shock test result of a MEMS vibrating gyroscope being developed to have gun-hardened survivability while maintaining tactical grade navigation performance for application to various guided projectiles.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.7
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• pp.1013-1020
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• 1997

Among various gyroscopes, the vibrating gyroscope has advantages such as compact size, mass-productivity and low cost. However this kind of gyroscope usually suffer from low linearity and low signal to noise ratio. Therefore, it is necessary to study on vibrating gyroscope to improve performance. In this paper, triangular cross section si selected in consideration for several points. The existing designs of exciting and sensing have some problems such that small signal size and low linearity. This paper proposes new design of exciting and sensing which is named one period exciting and the other period sensing. This design improves signal size, but it cannot improve linearity. This is because above two designs are the same open-loop type. So, another new design is proposed, which is named rebalancing, is applied to one period exciting and the other period sensing. This design are closed-loop type. It feedbacks the output signal. According to control theory, it can improve linearity. The circuits of each design are realized and used to calibration test. Calibration results show that new design of rebalancing improves linearity and signal size.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1840-1842
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• 1998

Gyroscope is a very important core sensor, as a rotation sensor in inertial space, in inertial guidance and navigation system on aeronautics, plane, vessel and so on for civilian and millitary applications. Mechnical gyroscopes, adopting a principle of spinning a top, have been used in many application system. These mechnical gyroscopes need high power consumption, long warming time and complicated peripheral devices. But fiber-optic gyroscopes, based on the Sagnac effect, have novel advantages as small volume. simple scheme, low power consumption and high reliability. So we have developed a Intermediate grade All-fiber Optic Gyroscope, which has open-loop and minimum reciprocal configuration scheme. We have designed feedback circuits for stability of amplitude and phase using four lock-in amplifier(LIA) circuits and also used for noise limitation. This paper describes the scheme of optical part and electronic part and also test results of this all-fiber optic gyroscope. The performance have been achieved as long-term bias drift of $9.54^{\circ}/h$, random walk of $0.0317^{\circ}/\sqrt{h}$ and dynamic range of ${\pm}150\;deg/s$.

• Journal of Sensor Science and Technology
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• v.26 no.4
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• pp.235-238
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• 2017

In this study, the design of a tri-axis micromachined gyroscope is proposed and the vibration characteristic of the structure is analyzed. Tri-axis vibratory gyroscopes that utilize Coriolis effect are the most commonly used micromachined inertial sensors because of their advantages, such as low cost, small packaging size, and low power consumption. The proposed design is a single structure with four proof masses, which are coupled to their adjacent ones. The coupling springs of the proof masses orthogonally transfer the driving vibrational motion. The resonant frequencies of the gyroscope are analyzed by finite element method (FEM) simulation. The suspension beam spring design of proof masses limits the resonance frequencies of four modes, viz., drive mode, pitch, roll and yaw sensing mode in the range of 110 Hz near 21 kHz, 21173 Hz, 21239 Hz, 21244 Hz, and 21280 Hz, respectively. The unwanted modes are separated from the drive and sense modes by more than 700 Hz. Thereafter the drive and the sense mode vibrations are calculated and simulated to confirm the driving feasibility and estimate the sensitivity of the gyroscope. The cross-axis sensitivities caused by driving motion are 1.5 deg/s for both x- and y-axis, and 0.2 deg/s for z-axis.