• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.487-487
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• 2009

One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

• Journal of Environmental Science International
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• 제21권1호
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• pp.113-123
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• 2012

A unit emission reduction of nitrous oxide ($N_2O$) from anthropogenic sources is equivalent to a 310-unit $CO_2$ emission reduction because the $N_2O$ has the global warming potential (GWP) of 310. This greatly promoted very active development and commercialization of catalysts to control $N_2O$ emissions from large-scale stationary sources, representatively nitric acid production plants, and numerous catalytic systems have been proposed for the $N_2O$ reduction to date and here designated to Options A to C with respect to in-duct-application scenarios. Whether or not these Options are suitable for $N_2O$ emissions control in nitric acid industries is primarily determined by positions of them being operated in nitric acid plants, which is mainly due to the difference in gas temperatures, compositions and pressures. The Option A being installed in the $NH_3$ oxidation reactor requires catalysts that have very strong thermal stability and high selectivity, while the Option B technologies are operated between the $NO_2$ absorption column and the gas expander and catalysts with medium thermal stability, good water tolerance and strong hydrothermal stability are applicable for this option. Catalysts for the Option C, that is positioned after the gas expander thereby having the lowest gas temperatures and pressure, should possess high de$N_2O$ performance and excellent water tolerance under such conditions. Consequently, each de$N_2O$ technology has different opportunities in nitric acid production plants and the best solution needs to be chosen considering the process requirements.

• Journal of Electrochemical Science and Technology
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• 제10권4호
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• pp.416-423
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• 2019

A novel non-enzymatic oxalic acid (OA) sensor based on the platinum/carbon black-nickel-reduced graphene oxide (Pt/CBNi-rGO) nanocomposite is reported. The nanocomposites were prepared by the ethylene glycol reduction method. Their morphology and chemical composition were characterized by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDX) and transmission electron microscopy (TEM). The results clearly demonstrated the formation of the Pt/CB-Ni-rGO nanocomposite. The electrocatalytic activity of the Pt/CB-Ni-rGO electrode was investigated by cyclic voltammetry. It was determined that the appropriate amount of Pt enhanced the catalytic activity of Pt for oxalic acid electro-oxidation. Moreover, the modified electrode was determined to be highly selective for oxalic acid without interference from compounds commonly found in urine including uric acid and ascorbic acid. The chronoamperometric signal gave a wide linearity range of 20 μM-60 mM and the detection limit (3σ) was found to be 2.35 μM. The proposed method showed high selectivity, stability, and good reproducibility and could be used with micro-volumes of sample for the detection of oxalic acid. Finally, the oxalic acid content in artificial and control urine samples were successfully determined by our proposed electrode.

• Journal of Electrochemical Science and Technology
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• 제10권4호
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• pp.361-372
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• 2019

The silver nanoparticles/polyaniline/reduced graphene oxide nanocomposite modified glassy carbon electrode (Ag/PANI/RGO/GCE) was prepared by the electrochemical method. The Ag/PANI/RGO nanocomposite was characterized by transmission electron microscopy (TEM), field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, X-ray diffraction (XRD), and electrochemical impedance spectroscopy (ESI). Two electrochemical techniques namely differential pulse voltammetry (DPV) and cyclic voltammetry (CV) were used to the electrochemical behaviors investigation of ascorbic acid (AA), dopamine (DA), and uric acid (UA). The Ag/PANI/RGO/GCE exhibited remarkable electrocatalytic activity towards the oxidation reaction of AA, DA, and UA in Britton-Robinson (BR) solution (pH=4.0). Under the optimal conditions, the determinations of AA, DA, and UA were accomplished using DPV. AA-DA and DA-UA peak potential separations were 130 and 180 mV, respectively. For simultaneous detection, the linear response ranges were in the two concentration ranges of 0.05-0.8 mM and 2.0-16.0 mM with detection limit 0.412 μM (S/N = 3) for AA, 0.7-90.0 μM and 90.0-1000.0 μM with detection limit 0.023 μM (S/N = 3) for DA, and 0.8-70.0 μM and 70.0-1000.0 μM with detection limit 0.050 μM (S/N = 3) for UA. This modified electrode showed good sensitivity, selectivity, and stability with applied to determine AA, DA, and UA in human urine and drug.

• Journal of Hydrogen and New Energy
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• 제21권4호
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• pp.271-277
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• 2010

$(Ba(Zr_{0.85}Y_{0.15})O_{3-\delta})$ oxide, showing high protonic conductivity at high temperatures and good chemical stability with $CO_2$ are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BZY-Ni layer has to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and may be applicable to the fabrication process of AD integration ceramic layer effectively. XRD, SEM, X-ray mapping measurements were conducted in order to analyze the characteristics of BZY-Ni membrane fabricated by AD process. it is observed that it is homogeneous distribution for BZY-Ni. The result of $H_2$ permeation rate suggests that BZY-Ni composite is higher than BZY.

• Applied Chemistry for Engineering
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• 제7권5호
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• pp.902-912
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• 1996

In the skeletal isomerization of 1-pentene over various solid acid catalysts, we have studied catalytic reactivity, selectivity, reaction mechanism and the relation between acid strength of catalysts and catalytic activity. Natural zeolite shows highest activity among the all catalysts and the modified ${\eta}$-alumina with fluorine and sulfuric acid shows higher activity than unmodified ${\eta}$-alumina. The yield of isopentene increases with increasing temperature and increasing contact time. However the cracking products increase at the high temperature and very high contact time. In addition, the activity of natural zeolite exchanged with metal cation decreases and shows good relation with the polarizing power of metal cation. According to the result of ammonia TPD, the acid strength of catalysts has an effect on catalytic activity.

• Analytical Science and Technology
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• 제28권2호
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• pp.98-105
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• 2015

The development of an enzymatic biosensor for dopamine determination based on multiwall carbon nanotubes (MWCNTs) and peroxidase obtained from the crude extract of burley tobacco (Nicotiana tabacum L.) was proposed. Peroxidase catalyzes the oxidation of dopamine to dopamine quinone. The influence on the response of analytical parameters of biosensors such as enzyme concentration, dopamine concentration, pH, and phosphate buffer solution concentration were investigated. The analytical parameters obtained, including sensitivity, linearity, and stability, were investigated. The proposed method for dopamine determination presented good selectivity even in the presence of uric acid and ascorbic acid. The sensor presented a higher response for dopamine in 0.010 M phosphate buffer at pH 6.50, with an applied potential of -0.15 V. The detection limit of the electrode was 2.7×10⁻⁶ M (S/N = 3) and the relative standard deviation of the measurements, which were repeated 10 times using 5.0×10⁻² M dopamine, was 1.3%.

• Journal of Food Hygiene and Safety
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• 제5권3호
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• pp.159-164
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• 1990

To detect and quantitation residual antibiotics and antibacterial agents in meats, we performed a biological assay employing the three microorganisms Bacillus subtilis ATCC 6633, Micrococcus luteus ATCC 9341, and Bacillus cereus var. mycoides ATCC 11778 for the screening purpose and developed a Gas Chromatography-mass Spectrometry(GC/MS) analysis for the confirmation and quantiation. In the biological assay (paper disk method), three test solution are used depending on the character of the residual antibiotics and antibacterial agents, follow by a simple clean up procedure which includes homogenization with Mcilvaine buffer, defatting with includes homogenization with Mcilvaine buffer, defatting with hexane, extraction with chloroform, clean-up by Sep-Pak $C_{18}$ and Bakerbond SPE carboxylic acid column. The chloroform layer is used for the analysis of sulfa agents. macrolides antibiotics and antibacterial agents, Adsorbed materials in the Sep-Pak $C_{18}$ were also employed for th analysis of penicillins and tetracyclines. Effluents from the Sep-Pak $C_{18}$ were cleaned-up one more by Bakerbond 10 SPE COOH column and employed for the analysis of aminoglycosides. In the instrumental analysis by using the GC/MSD, residual antibiotics and antibacterial agent were quantitated by selected ion monitoring (SIM) mode after derivatization. A simultaneous analysis of six residual antibiotic and antibacterial agent such as oxytetracycline, penicillin, ampicillin, choliraphenicol and thiamphenicol was developed with simple cleanup procedures revealing good recovery and reproducibility. Also, simultaneous detection of macrolides antibiotics such as erythromycin, spiramycin, and oleandomycin was developed after acid hydrolysis due to their large molecular structures. Because of the high reproducibility and selectivity of these two methods, it is very desirable that the combination of the two methods be used in the bioassay for the screening of residual antibiotics and antibacterial agent and that GC/MSD analysis be used for the confirmation and quantitation.

• Journal of Sensor Science and Technology
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• 제13권5호
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• pp.323-328
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• 2004

N-type semi-conducting oxides such as $SnO_{2}$, ZnO, and $ZrO_{2}$ have been known for the detecting materials of inflammable or toxic gases. Of those materials, $SnO_{2}$-based sensors are well known as high sensitive materials to detect toxic gases. And the sensitivity is improved if catalysts are added. Detecting toxic gases, especially DMMP (di-methyl-methyl-phosphonate) and DPGME (Dipropylene glycol methyl ether), was performed by a mixture of Tin oxide ($SnO_{2}$) and Zirconia ($ZrO_{2}$). The films consist of each three different mass% of Zr (from 1 mass% to 5 mass%), and they were tested by XRD, SEM, TEM, BET. Nano-structure, pore and particle size was controlled to verify the sensor's sensing mechanism. The sensors was evaluated at five different degrees (from $200^{\circ}C$ to $400^{\circ}C$) and three different concentrations (from 500 ppb to 1500 ppb). The sensors had good sensitivity of both simulants, and high selectivity of DMMP.

• BMB Reports
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• 제44권2호
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• pp.87-95
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• 2011

Enzymatic catalysis has been pursued extensively in a wide range of important chemical processes for their unparalleled selectivity and mild reaction conditions. However, enzymes are usually costly and easy to inactivate in their free forms. Immobilization is the key to optimizing the in-service performance of an enzyme in industrial processes, particularly in the field of non-aqueous phase catalysis. Since the immobilization process for enzymes will inevitably result in some loss of activity, improving the activity retention of the immobilized enzyme is critical. To some extent, the performance of an immobilized enzyme is mainly governed by the supports used for immobilization, thus it is important to fully understand the properties of supporting materials and immobilization processes. In recent years, there has been growing concern in using polymeric materials as supports for their good mechanical and easily adjustable properties. Furthermore, a great many work has been done in order to improve the activity retention and stabilities of immobilized enzymes. Some introduce a spacer arm onto the support surface to improve the enzyme mobility. The support surface is also modified towards biocompatibility to reduce non-biospecific interactions between the enzyme and support. Besides, natural materials can be used directly as supporting materials owning to their inert and biocompatible properties. This review is focused on recent advances in using polymeric materials as hosts for lipase immobilization by two different methods, surface attachment and encapsulation. Polymeric materials of different forms, such as particles, membranes and nanofibers, are discussed in detail. The prospective applications of immobilized enzymes, especially the enzyme-immobilized membrane bioreactors (EMBR) are also discussed.