• Title/Summary/Keyword: good selectivity

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Ti/Cu CMP process for wafer level 3D integration (웨이퍼 레벨 3D Integration을 위한 Ti/Cu CMP 공정 연구)

  • Kim, Eunsol;Lee, Minjae;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.3
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    • pp.37-41
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    • 2012
  • The wafer level stacking with Cu-to-Cu bonding becomes an important technology for high density DRAM stacking, high performance logic stacking, or heterogeneous chip stacking. Cu CMP becomes one of key processes to be developed for optimized Cu bonding process. For the ultra low-k dielectrics used in the advanced logic applications, Ti barrier has been preferred due to its good compatibility with porous ultra low-K dielectrics. But since Ti is electrochemically reactive to Cu CMP slurries, it leads to a new challenge to Cu CMP. In this study Ti barrier/Cu interconnection structure has been investigated for the wafer level 3D integration. Cu CMP wafers have been fabricated by a damascene process and two types of slurry were compared. The slurry selectivity to $SiO_2$ and Ti and removal rate were measured. The effect of metal line width and metal density were evaluated.

Comparison of Bifidobacteria Selective Media for the Detection of Bifidobacteria in Korean Commercial Fermented Milk Products

  • Kim, Eung-Ryool;Cho, Young-Hee;Kim, Yong-Hee;Park, Soon-Ok;Woo, Gun-Jo;Chun, Ho-Nam
    • Food Science of Animal Resources
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    • v.30 no.1
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    • pp.154-162
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    • 2010
  • This study was carried out to compare the efficacy and selectivity of TOS and BS media for enumeration of bifidobacteria in commercial fermented milk products. First, bifidobacteria was isolated from 20 fermented milk products, and all isolated bifidobacteria were identified by genomic technology as Bifidobacterium lactis. The two media significantly differed from each other with regard to the recovery of B. lactis, that is, the recovery of this organism was as much as 6 logs lower on BS medium than on TOS. When the concentration of BS solution (mixture of paromomycin sulfate, neomycin, sodium propionate, and lithium chloride) used in BS medium was reduced to 50% (BS50), a relatively high percentage recovery of bifidobacteria from pure cultures was achieved. Susceptibility tests to antibiotics and tests for selective agents for the isolated bifidobacteria and lactic acid bacteria were conducted. The BS solution inhibited some lactic acid bacteria and Bifidobacterium species, while mupirocin (MU) suppressed the growth of all tested lactic acid bacteria but not Bifidobacterium. As compared with BS50 medium, TOS with or without MU showed good bifidobacteria recovery and readily distinguishable colonies; in particular, TOS supplemented with MU had a high selectivity for bifidobacteria. In conclusion, all results suggested that TOS medium with or without MU was found to be suitable for selective enumeration of bifidobacteria from mixed cultures in fermented milk, and better in that capacity than BS medium.

Molecular Sieve Properties for $CH_4/CO_2$ of Activated Carbon Fibers Prepared by Benzene Deposition (벤젠 증착에 의해 제조된 활성탄소섬유의 $CH_4/CO_2$ 분자체 성질)

  • Moon, Seung-Hyun;Shim, Jae-Woon
    • Journal of Korean Society of Environmental Engineers
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    • v.27 no.6
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    • pp.614-619
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    • 2005
  • The activated carbon fibers of different surface area and pore structures were modified by carbon deposition from the pyrolysis of benzene, in an attempt to obtain carbon molecular sieves of high adsorption capacity and selectivity for the separation of $CO_2/CH_4$ gas mixtures. The ACFs molecular sieves prepared from different temperature and time were tested by the static adsorption of $CO_2$ and $CH_4$ gas, and their pore structures were characterized by the $N_2$ adsorption isotherms. We are able to prepare ACF molecular sieve with good selectivity for $CO_2/CH_4$ separation and showing acceptable adsorption capacities from the change of porosity by carbon deposition of pyrolyzed benzene.

POTENT INHIBITION OF HUMAN CYTOCHROME P450 1 ENZYMES BY DIMETHOXYPHENYL VINYL THIOPHENE

  • Lee, Sang-Kwang;Kim, Sang-Hee;Kim, Mie-Young;Chun, Young-Jin
    • Proceedings of the PSK Conference
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    • 2002.10a
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    • pp.312.3-313
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    • 2002
  • Recently we have reported that various hydroxystilbenes show strong inhibition of human P450 1 activity. A series of synthetic trans-stilbene derivatives were prepared and their inhibitory potentials were evaluated with the bacterial membrane of recombinant human P450 1A1, 1A2 or 1B1 coexpressed with human NADPH-P450 reductase to find new candidates for cancer chemoprevention, Of the compounds tested. SY-021 (3.5-dimethoxyphenyl vinyl thiophene) exhibited a potent inhibition of human P450 181 with an IC$_{50}$ value of 2 nM. SY-021 also showed the inhibitrion of P450 1A1 with IC$_{50}$ value of 61 nM and P450 1A2 with IC$_{50}$ value of 11 nM. SY-021 showed 31-fold selectivity for P450 1B1 over P450 1A1 and 6-fold selectivity for P450 1B1 over 1A2. We have further investigated the inhibition kinetics of P450 1A1. 1A2 and 1B1 by SY-021. The modes of inhibition by SY-021were non-compeitive for all three P450 1 enzymes. Effect of preincubation with NADPH on inhibition of P450 1B1 by SY-021 was determined. These results suggest that SY-021 is one of the mostj potent inhibitor of human P450 1 enzymes and may be considered as a good candidate for a cancer chemopreventive agent in human

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Zn2+ PVC-based Membrane Sensor Based on 3-[(2-Furylmethylene)amino]-2-thioxo-1,3-thiazolidin-4-one

  • Ganjali, Mohammad Reza;Zamani, Hassan Ali;Norouzi, Parviz;Adib, Mehdi;Rezapour, Morteza;Aceedy, Mohammad
    • Bulletin of the Korean Chemical Society
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    • v.26 no.4
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    • pp.579-584
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    • 2005
  • The 3-[(2-furylmethylene)amino]-2-thioxo-1,3-thiazolidin-4-one (FTT) was used as an excellent ionophore in construction of a $Zn^{2+}$ PVC-based membrane sensor. The best performance was obtained with a membrane composition of 30% poly(vinyl chloride), 62% nitrobenzen (NB), 3% FTT and 5% sodium tetraphenyl borate (TBP). This membrane sensor shows very good selectivity and sensitivity towards $Zn^{2+}$ over a wide variety of cations, including alkali, alkaline earth, transition and heavy metal ions. The membrane sensor revealed a great enhancement in selectivity coefficients for $Zn^{2+}$ ions, in comparison to the previously reported $Zn^{2+}$ membrane sensors. Theoretical studies also showed the selective interaction of TFF and $Zn^{2+}$ ions. The proposed membrane sensor exhibits a Nernstian behavior (with slope of 29.3 ${\pm}$ 0.3 mV per decade) over a wide concentration range (1.0 ${\times}$ $10^{-6}$-1.0 ${\times}$ $10^{-2}$) with a detection limit of 8.5 ${\times}$ $10^{-7}$ M (52 ng mL$^{-1}$). It shows relatively fast response time, in the whole concentration range ($\lt$ 20 s), and can be used for at least 10 weeks in a pH range of 3.0-7.0. The proposed membrane sensor was successfully used in direct determination of $Zn^{2+}$ ions in wastewater of industrial zinc electroplating companies, and also as an indicator electrode in titration with EDTA.

Preferential CO Oxidation over Ce-Promoted Pt/γ-Al2O3 Catalyst (Ce가 첨가된 Pt/γ-Al2O3 촉매의 선택적 CO 산화반응 특성)

  • Kim, Kihyeok;Koo, Keeyoung;Jung, Unho;Yoon, Wanglai
    • Journal of Hydrogen and New Energy
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    • v.23 no.6
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    • pp.640-646
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    • 2012
  • The effect of Ce promotion over 1wt% $Pt/{\gamma}-Al_2O_3$ catalysts on the CO conversion and $CO_2$ selectivity was investigated in preferential CO oxidation (PrOx) to reduce the CO concentration less than 10 ppm in excess $H_2$ stream for polymer electrolyte membrane fuel cell (PEMFC). Ce-promoted 1wt% $Pt/{\gamma}-Al_2O_3$ catalysts were prepared by incipient wetness impregnation method and the loading amount of Pt was fixed at 1wt%. The content of Ce promoter which has excellent oxygen storage and transfer capability due to the redox property was adjusted from 0 to 1.5wt%. Ce-promoted 1wt% $Pt/{\gamma}-Al_2O_3$ catalysts exhibit high CO conversion and $CO_2$ selectivity at low temperatures below $150^{\circ}C$ due to the improvement of reducibility of surface PtOx species compared with the 1wt% $Pt/{\gamma}-Al_2O_3$ catalyst without Ce addition. When Ce content was more than 1wt%, the catalytic activity was decreased at over $160^{\circ}C$ in PrOx because of competitive $H_2$ oxidation. As a result, 0.5wt% Ce is optimal content not only to achieve high catalytic activity and good stability at low temperatures below $150^{\circ}C$ in the presence of $CO_2$ and $H_2O$ but also to minimize the $H_2$ oxidation at high temperatures.

Ionic Liquid based Carbon Dioxide Separation Membrane (이온성 액체를 이용한 이산화탄소 분리막)

  • Park, Jung Hyeok;Patel, Rajkumar
    • Membrane Journal
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    • v.30 no.3
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    • pp.149-157
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    • 2020
  • Ionic Liquid (IL) in the category of low-temperature molten salts with organic cation and organic/inorganic anion has shown great potentiality in CO2 gas separation. CO2 gas separation from flue gas by IL based membrane has been widely researched in recent years to overcome climate change and global warming. Membranes based on free standing polyionic liquid (PIL), blend of ionic liquid and composite ionic liquid membranes are discussed in this review. Introducing different IL monomers and tuning microstructure of PIL membrane and composite of PIL-IL to enhance mechanical properties of membranes with good CO2 gas permeability and selectivity. Variations in cation and anions of monomer has great impact on the membrane gas separation performance.

Comparison of Reduction Reactivity of New Oxygen Carriers for Chemical Looping Combustion System in a Bubbling Fluidized Bed (기포유동층에서 케미컬루핑 연소시스템을 위한 신규 산소전달입자들의 환원반응성 비교)

  • KIM, HANA;LEE, DOYEON;BAE, DAL-HEE;SHUN, DOWON;BAEK, JEOM-IN;RYU, HO-JUNG
    • Journal of Hydrogen and New Energy
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    • v.28 no.5
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    • pp.554-560
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    • 2017
  • Reduction reactivity of new oxygen carriers for chemical looping combustion system were investigated using $CH_4$ as a reduction gas in a bubbling fluidized bed reactor and compared with that of former SDN70 oxygen carrier. New oxygen carriers showed good reduction reactivity at different $CH_4$ concentration. N018-R2 particle represented better reactivity than SDN70 at high $CH_4$ concentration. N018-R2 particle showed higher fuel conversion and $CO_2$ selectivity than those of SDN70 particle within the temperature range of $750-900^{\circ}C$. Moreover, attrition loss of N018-R2 particle was almost same with that of SDN70 particle. Consequently, we could select N018-R2 particle as the best oxygen carrier.

Etch Characteristics of $SiO_2$ by using Pulse-Time Modulation in the Dual-Frequency Capacitive Coupled Plasma

  • Jeon, Min-Hwan;Gang, Se-Gu;Park, Jong-Yun;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.472-472
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    • 2011
  • The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

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Selectivity and behaviour of EK-5439 in the soil as a candidate for rice herbicide (신규 제초제 후보 화합물 EK-5439의 선택성 및 토양 중 행동특성)

  • Hwang, I.T.;Hong, K.S.;Lee, B.H.;Kim, H.R.;Jeon, D.J.;Cho, K.Y.
    • The Korean Journal of Pesticide Science
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    • v.8 no.3
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    • pp.175-183
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    • 2004
  • The characteristics of the experimental compound EK-5439 [3-Chloro-2-[4-chloro-2-fluoro-5-(5-methyl-3-phenyl-4,5-dihydroisoxazol-5-yl-methoxy)-phenyl]-4,5,6,7-tetrahydro-2H-indazole] was investigated to characterize as a new herbicide to use in rice field. The selectivity between rice and barnyardgrass was very good when treated from 0 to 4 days after seeding under soil application. In the overflowing experiment, herbicidal efficacy of EK-5439 was stabilized 12 hrs after application. Vertical migrations in submerged paddy soil of EK-5439 and oxadiazon were equally observed below a soil depth of 1 cm under 5 cm/day leaching condition. Half-lives for herbicidal efficacy of EK-5439 and oxadiazon were 6.1, and 9.6 days, respectively, under submerged paddy condition. EK-5439 showed rapid adsorption to the soil clay, such as bentonite.