• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.17-18
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• 2006

고상 확산 방법을 이용하여 얕은 소스/드레인 접합을 가지는 SOI (Silicon-On-Insulator) MOSFET 소자를 제작하였다. 확산원으로는 PSG(Phosphorus silicate glass) 박막과 PBF(Poly Boron Film) 박막이 각각 n, p-type 소자 형성을 위해 사용되었다. 얕은 접합 형성을 위하여 급속 열처리 방법(RTA: Rapid Thermal Annealing)을 이용하여 PSG와 PBF로부터 인과 붕소를 SOI MOSFET 소자의 소스/드레인으로 확산시켰다. 또한, 소자 특성 개선을 위한 후 속 열처리 공정으로 희석된 수소 분위기 중에서 FA(Furnace Annealing)를 실시하였다. SPD 기술을 적용하여 10 nm 이하의 매우 얕은 p-n 접합을 형성할 수 있었고, 양호한 다이오드 특성을 얻을 수 있었다. 또한, SPD 방법으로 결함이 없는 접합 형성이 가능하며, 소자 제작 공정의 최적화를 통해 차세대 CMOS 소자로 기대되는 SOI MOSFET를 성공적으로 제작할 수 있었다.

• 한국세라믹학회지
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• 제45권2호
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• pp.90-93
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• 2008

The oxygen gas behavior in PDP (plasma Display Panel) glass melts doped with sulfate ($SO_4^{-2}$) or blast furnace slag (BFS, $S^{2-}$) or both by means of yttria-stabilized zirconia (YSZ) electrodes was observed after the first fining. The temperature dependence of oxygen equilibrium pressure ($P_{O2}$) in each melt showed typical behavior, namely $P_{O2}$ decreased as temperature decreased. This suggests that an oxidation of $S^{4+}$ to $S^{6+}$ took place. However, the $P_{O2}$-value at constant temperature increased in the following order: BFS$P_{O2}$ of the melt doped with sulfate+BFS was much lower than that of the melt with only sulfate, although only 10% of sulfur was added by the BFS. This behavior can be explained by the redox reaction between sulfide ions in the BFS and dissolved oxygen ions in the melt during the first fining.

• 한국주조공학회지
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• 제26권5호
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• pp.227-231
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• 2006

Liquid formability of bulk amorphous alloys is known to be very poor due to their high viscosity comparing with conventional metallic materials. It is important to have the fabricating technology of bulk amorphous alloys in order to make the components with complicated shape. Liquid formability includes the mold cavity filling ability and the hot tear(crack) resistance during solidification. A mold made of a commercial tool steel for the formability test was designed. Melting was performed by the arc melting furnace with melting capacity of 200 g in an argon atmosphere. Liquid formability and glass forming ability of Cu base and Ni base bulk amorphous alloys were measured and evaluated. Mold filling ability of Ni-Zr-Ti-Si-Sn alloy was better than that of Cu-Ni-Zr-Ti alloy, however the reverse is the hot tear resistance. Bulk amorphous alloy is very susceptible to crack if partial crystallization occurs during solidification. Crack resistance was thought to be closely related with the glass forming ability.

• 동력기계공학회지
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• 제17권2호
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• pp.108-113
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• 2013

In this study, lightweight aggregate was made from basalt stone powder sludge. Clay and glass powder were respectively added from 0 to 20 wt% and from 0 to 100 wt%. The glass powder helped to form glassy phase which trapped generating gas in the materials. $CaCO_3$ helping bloating process was added from 0 to 10 wt%. It was possible to produce lightweight aggregate at range from $1150^{\circ}C$ to $1200^{\circ}C$. The specimen was heated in furnace at 1100, 1150 and $1200^{\circ}C$ for 15 min, respectively, to sinter aggregates. Chemical composition of materials were determined, and characteristics were analyzed, including specific gravity, water absorption. Lightweight aggregate which was heated at $1200^{\circ}C$ had specific gravity of $0.53g/cm^3$, water absorption of 3.08%, and this value satisfied KS L 8551 standard.

• 한국결정성장학회지
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• 제22권6호
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• pp.299-304
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• 2012

본 연구에서는 비산회를 자력선별한 후 알칼리 활성화제인 수산화나트륨과 물유리를 사용하여 지오폴리머를 제조하였다. 자력 선별전의 원료, 자력 선별된 두 가지 종류의 자력 및 비자력 원료를 사용한 지오폴리머 시편에 대한 압축강도를 측정하여 비교하였다. 비자력 비산회 원료를 사용한 지오폴리머 시편에서 가장 좋은 압축강도가 나올 것으로 예상하였으나, 실제로는 자력선별하지 않은 원재료 비산회와 고로슬래그를 사용한 경우에 재령 28일차 압축강도가 27.54 MPa로 가장 우수하였다. 이 결과에서, 자력선별 후 CaO 성분 농축으로 수화반응 증진에 의한 강도발현 증진 효과 보다는 자력선별에 의해 지오폴리머 형성반응에 필요한 실리카와 알루미나 성분이 오히려 줄어들어 지오폴리머 축합반응이 감소하여 오히려 압축강도 측면에서는 물성 개선효과가 없는 것으로 판명되었다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 춘계학술대회
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• pp.222-224
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• 2006

A non-vacuum process for $Cu(In,Ga)Se_2$ (CIGS) thin film solar cells from nanoparticle precursors was described in this work CIGS nanoparticle precursors was prepared by a low temperature colloidal route by reacting the starting materials $(CuI,\;InI_3,\;GaI_3\;and\;Na_2Se)$ in organic solvents, by which fine CIGS nanoparticles of about 20nm in diameter were obtained. The nanoparticle precursors were mixed with organic binder material for the rheology of the mixture to be adjusted for the doctor blade method. After depositing the mixture of CIGS with binder on Mo/glass substrate, the samples were preheated on the hot plate in air to evaporate remaining solvents ud to burn the organic binder material. Subsequently, the resultant (porous) CIGS/Mo/glass simple was selenized in a two-zone Rapid Thermal Process (RTP) furnace in order to get a solar ceil applicable dense CIGS absorber layer. Complete solar cell structure was obtained by depositing. The other layers including CdS buffer layer, ZnO window layer and Al electrodes by conventional methods. The resultant solar cell showed a conversion efficiency of 0.5%.

• 한국결정성장학회지
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• 제23권5호
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• pp.246-254
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• 2013

LED 조명등의 내구성 문제를 개선할 목적으로 광 확산판에 사용되는 폴리카보네이트 소재를 대체하기 위하여 반투명 유백유리를 제조하였다. 유백유리의 유백제로서 인산칼슘을 사용하였고, $1550^{\circ}C$ 전기로에서 2시간 용융하였다. 유백유리는 용융유리가 성형된 후 냉각 열처리 과정에서 상분리 및 유백입자의 성장에 의해 만들어진다. 따라서 성형 및 냉각온도를 상온, $850^{\circ}C$, $1100^{\circ}C$ 및 $1200^{\circ}C$ 로 변화시키면서 유백특성의 영향을 확인하였다. 결과적으로 가장 고온인 $1200^{\circ}C$에서 성형 및 냉각을 한 샘플에서 가장 양호한 특성을 갖는 유백유리가 얻어졌다. 이 유리는 82 % 이상의 높은 Haze 값과 10 % 미만의 낮은 평행광 투과도에 의해 직사광 투과에 의한 눈부심이 없이 LED 조명용 광확산판으로서 우수한 광특성을 나타내었다. 또한 열적특성으로서 $6.309{\times}10^{-6}/^{\circ}C$의 열팽창 계수와 $839^{\circ}C$의 연화점을 나타내었다.

• 한국재료학회지
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• 제27권2호
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• pp.94-99
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• 2017

Dinickel-silicide $(Ni_2Si)/glass$ was employed as a counter electrode for a dye-sensitized solar cell (DSSC) device. $Ni_2Si$ was formed by rapid thermal annealing (RTA) at $700^{\circ}C$ for 15 seconds of a 50 nm-Ni/50 nm-Si/glass structure. For comparison, $Ni_2Si$ on quartz was also prepared through conventional electric furnace annealing (CEA) at $800^{\circ}C$ for 30 minutes. XRD, XPS, and EDS line scanning of TEM were used to confirm the formation of $Ni_2Si$. TEM and CV were employed to confirm the microstructure and catalytic activity. Photovoltaic properties were examined using a solar simulator and potentiostat. XRD, XPS, and EDS line scanning results showed that both CEA and RTA successfully led to tne formation of nano $thick-Ni_2Si$ phase. The catalytic activity of $CEA-Ni_2Si$ and $RTA-Ni_2Si$ with respect to Pt were 68 % and 56 %. Energy conversion efficiencies (ECEs) of DSSCs with $CEA-Ni_2Si$ and $RTA-Ni_2Si$catalysts were 3.66 % and 3.16 %, respectively. Our results imply that nano-thick $Ni_2Si$ may be used to replace Pt as a reduction catalytic layer for a DSSCs. Moreover, we show that nano-thick $Ni_2Si$ can be made available on a low-cost glass substrate via the RTA process.

• 한국재료학회지
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• 제27권5호
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• pp.281-288
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• 2017

In this study, Fe-Ni slag, converter slag and dephosphorization slag generated from the steel industry, and fly ash or bottom ash from a power plant, were mixed at an appropriate mixing ratio and melted in a melting furnace in a mass-production process for glass ceramics. Then, glass-ceramic products, having a basalt composition with $SiO_2$, $Al_2O_3$, CaO, MgO, and $Fe_2O_3$ components, were fabricated through casting and heat treatment process. Comparison was made of the samples before and after the modification of the process conditions. Glass-ceramic samples before and after the process modification were similar in chemical composition, but $Al_2O_3$ and $Na_2O$ contents were slightly higher in the samples before the modification. Before and after the process modification, it was confirmed that the sample had a melting temperature below $1250^{\circ}C$, and that pyroxene and diopside are the primary phases of the product. The crystallization temperature in the sample after modification was found to be higher than that in the sample before modification. The activation energy for crystallization was evaluated and found to be 467 kJ/mol for the sample before the process modification, and 337 kJ/mol for the sample after the process modification. The degree of crystallinity was evaluated and found to be 82 % before the process change and 87 % after the process change. Mechanical properties such as compressive strength and bending strength were evaluated and found to be excellent for the sample after process modification. In conclusion, the samples after the process modification were evaluated and found to have superior characteristics compared to those before the modification.

• 한국재료학회지
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• 제11권7호
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• pp.562-568
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• 2001

60ZnO-20B$_2$O$_3$-10SiO$_2$-10PbO의 조성을 가진 결정성 봉착용 유리분말과 ZrB$_2$분말을 출발물질로 사용하여 Na분위기 하에서 소결한 복합소결체를 저항체 후막으로써 사용가능성을 검토하였다. 도전성입자 ZrB$_2$는 소결중 매우 민감한 산화특성을 나타내었으며, 이것은 로내 또는 시편내에 잔류된 미량의 산소 및 유리성분 중 B$_2$O$_3$의 반응에 의한 배위수 변화과정에서 유리되는 산소가 원인으로 될 수 있다는 것을 시편의 밀도 및 부피변화 등을 통해 확인되었다. 각 혼합물의 소결온도와 혼합비 변화에 따라 내부조직의 변화와 함께 10~$10^{5}{\Omega}/cm^2$정도의 제어 가능한 저항값을 얻을 수 있었다. 이러한 결과들로부터 유리기지 중에서 ZrB$_2$입자들의 치밀화 경향을 갖는 복합소성시편들에 대한 거시적인 관점에서 도전성경로형성 및 도전기구를 설명하였다.