• Journal of Sensor Science and Technology
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• v.30 no.6
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• pp.369-375
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• 2021

In this study, heterogeneous ZnO/CNTF composites were developed to improve the NO₂-sensing response, facilitated by the self-heating property. Highly conductive and mechanically stable CNTFs were prepared by a wet-spinning process assisted by the liquid crystal (LC) behavior of CNTs. Metal-organic frameworks (MOFs) of ZIF-8 were precipitated on the surface of the CNTF (ZIF-8/CNTF) via one-pot synthesis in solution. The subsequent calcination process resulted in the formation of the ZnO/CNTF composites. The calcination temperatures were controlled at 400, 500, and 600 ℃ in an N₂ atmosphere to confirm the evolution of the microstructures and NO₂-sensing properties. Gas sensor characterization was performed at 100 ℃ by applying a DC voltage to induce Joule heating through the CNTF. The results revealed that the ZnO/CNTF composite after calcination at 500 ℃ (ZnO/CNTF-500) exhibited an improved response (R_air/R_gas = 1.086) toward 20 ppm NO₂ as compared to the pristine CNTF (R_air/R_gas = 1.063). Selective NO₂-sensing properties were demonstrated with negligible responses toward interfering gas species such as H₂S, NH₃, CO, and toluene. Our approach for the synthesis of MOF-driven ZnO/CNTF composites can provide a new strategy for the fabrication of wearable gas sensors integrated with textile materials.

• Bulletin of the Korean Chemical Society
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• v.33 no.4
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• pp.1297-1302
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• 2012

The interaction between carbon monoxide (CO) and a cobalt-salen complex (Co(salen)) was studied and applied to detect CO. The metal complex doped PEDOT:PSS film exhibited good sensitivity to CO and differentiate CO from other gases. The response of the composite to CO was reversible (RSD < 5%) change in resistance upon removal of CO gas from the test chamber. The effects of adding Co(salen) in the probe film on the response of the sensor were investigated using AFM, XPS, and FT-IR spectroscopy. The sensitivity of the sensor increased as the Co(salen) concentration enhanced as it increased from 0.0 to 1.5 wt. %, where the highest sensitivity ($%{\Delta}R/R_o$) of $-25.0{\pm}0.05%$ was achieved with 1.0 wt. % Co(salen). The sensor containing probe exhibited a linear response ($R^2$ = 0.983) in the range of 0.5 to 10.0% CO (v/v) $N_2$, and the detection limit was 1.74% CO (v/v) in $N_2$.

• Journal of the Korean Ceramic Society
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• v.44 no.4 s.299
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• pp.194-197
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• 2007

Polyacrylonitrile (PAN)/$Fe_2O_3$ nanocomposite membranes with a thickness of 0.02 mm were electrospun by adding 0 to 5 wt% of $Fe_2O_3$ into PAN. The surface tension, density, kinematic viscosity and dynamic viscosity of the PAN solution were determined to be $33.8{\pm}1mN/m$, 0.9794 g/ml, $1548.6mm^2/sec$ and 1516.7 cP, respectively. The average diameters of PAN fibers containing 0, 1 2, 3, and 4 wt% $Fe_2O_3$ particles were 300, 260, 210, 130, and 90 nm, respectively. Fourier-transform infrared spectroscopy results showed that the addition of $Fe_2O_3$ nanoparticles to the PAN mat reduced the absorption peak intensity at $2242cm^{-1}$ ($C{\equiv}N$ bond) while it caused a sharp increase in the peak intensity at $2356cm^{-1}$(C=O bond). Thus, it appears that an appropriate amount of $Fe_2O_3$ nanoparticles in the PAN backbone leads to an improvement of the performance of the $CO_2$ gas sensor, most likely due to the change of functional groups in the membrane.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.229-234
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• 2017

In this study, we fabricated a TFT gas sensor with ZnO nanorods grown by hydrothermal synthesis. The suggested devices were compared with the conventional ZnO film-type TFTs in terms of the gas-response properties and the electrical transfer characteristics. The ZnO seed layer is formed by atomic-layer deposition (ALD), and the precursors for the nanorods are zinc nitrate hexahydrate ($Zn(NO_3)_2{\cdot}6H_2O$) and hexamethylenetetramine ($(CH_2)6N_4$). When 15 ppm of NO gas was supplied in a gas chamber at $150^{\circ}C$ to analyze the sensing capability of the suggested devices, the sensitivity (S) was 4.5, showing that the nanorod-type devices respond sensitively to the external environment. These results can be explained by X-ray photoelectron spectroscopy (XPS) analysis, which showed that the oxygen deficiency of ZnO nanorods is higher than that of ZnO film, and confirms that the ZnO nanorod-type TFTs are advantageous for the fabrication of high-performance gas sensors.

• Korean Journal of Materials Research
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• v.7 no.2
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• pp.102-106
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• 1997

Micro gas sensors including thin film catal) tic type require stress-free memhrancs for etch stop of Si anisotropic etching and sublayer of sensing elements hecause stress is one of the main factors affecting breakdown of thin membranes. This paper reports the effects of deposition conditions on stress and refractive index of $SiN_{x}/SiO_{x}/(NON)$ films deposited by low pressure c11ernic;rl vapor deposition(L, t'CVI)) 2nd reactve sputtering. In the case of I.PCVI1, the stresses of $SiN_{x}$ and NON films arc $7.6{\times}10^{8}dyne/cm^2$ and $3.3{\times}10^{8}dyne/cm^2$, respectibely, and the refractive indices are 3.05 and 152, respectively. In the cxse oi the sputtered SiN, , compressi\e stress decreased in magnitude and then turned to tensility as increasing proc, ess pressure by lmtorr to 30mtorr and cicreasmg applied power density by $2.74W/cm^2$ to $1.10W/cm^2$. The hest value of film stress obt;~ined under condition of lOmtorr and $1.37W/cm^2$ in this' experiment was $1.2{\times}10^{9}dyne/cm^2$ cnnipressive. The refr~ict~ve index decreased from 2 05 to 1 89 as decreasing applied power density by lnitorr to 3Orntorr and increasing process pressure hy $2.74W/cm^2$ to $1.10W/cm^2$. Stresses of films deposited by both LPCVL) and sputtering decreased as incre;lsing temperature and showed plastic behavior as decreasing temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.790-794
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• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.5
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• pp.335-340
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• 2013

In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.

• Journal of the Korean Institute of Gas
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• v.9 no.4 s.29
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• pp.26-29
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• 2005

In this paper, the solvent sensing properties of the metallophthalocyanine macrocyclic compounds(ZnPc) have been deposited as thin films by the spin-coated method and evaporated methods onto alumina substrates and quartz substrates. And then the spin-coated materials of Zinc phthalocyanine solutions blended with $N,N'-diphenyl-N,N'-bis(1-naphthyl)-1,\;1-biphenyl-4,4'-diamine\;and/or\; Poly[2-methoxy-5-(2'-ethylhexyloxy)-1,4-phenylene-vinylene]$ solutions. The influences of the blended metallophthalocyanine macrocyclic compounds on the resistance have been measured and analysed in five different vapour organic compounds.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.2
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• pp.47-54
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• 2012

An oxygen sensor installed in vehicle exhaust systems enables to measure the amount of oxygen in the exhaust gas, in which the measured data are collected and analyzed in ECU(Engine Control Unit). The oxygen sensor is exposed to the high speed exhaust gas at high temperature circumstance, so that protection caps are required not only to protect the susceptible measuring part, but also to provide the real time measurement without time delay. In this study, a new oxygen sensor with one protection cap was proposed, and the CFD analysis was carried out in order to compare the performance characteristics, such as flow speed and ratio of AOA(Age of Air), for the conventional and new oxygen sensor. The numerical results of CFD analysis provided the flow speed of 1.34m/s and the ratio of AOA of 3.43. The similar features obtained from the numerical results showed that the new oxygen sensor guarantees the same performance characteristics of the conventional ones.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.291-297
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• 1999

The plasma etching of tungsten thin films has been studied with $SF_6$ gas in RIE system. The etch rate of ${\alpha}$-phase W film with $SF_6$ gas plasma has been showed to depend strongly on process parameters ($SF_6$, $SF_6-N_2$ gas). Effect of $N_2$ addition and etching selectivity between W film and photoresist have also been studied in detail. Etching profiles between W film and photoresist were investigated by SEM. The compounds on W surface after $SF_6-N_2$ gas plasma treatment were examined by XPS and the concentration of F ions was detected by OES during plasma on.