• 멤브레인
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• 제30권6호
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• pp.450-459
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• 2020

분리막 기반 공정은 기존 공정에 비해 에너지 소비 및 환경 영향을 감소시킬 수 있는 잠재력을 갖고 있다. 분리막 공정의 성능은 분리막의 투과 특성과 직결되기 때문에, 선택도와 투과도가 우수한 새로운 분리막 소재를 개발하기 위해 많은 연구가 진행되어 왔다. 본 연구에서는 기체 투과선택성 향상을 위해 부피가 큰 에틸 치환기를 포함하는 diamine 단량체인 4,4'-methylenebis(2,6-diethylaniline) (MDEA)을 도입한 폴리이미드를 합성한 후 그 특성을 관찰하고 기체 투과 특성을 조사하였다. 이미드링 질소의 오쏘에 위치한 에틸기는 고분자 사슬의 패킹을 방해하고 사슬 강성과 고분자 사슬 간 거리를 증가시켰다. MDEA 기반 폴리이미드 분리막의 기체 투과 특성을 조사한 결과, 프로필렌/프로판 선택도 14.5와 프로필렌 투과도 7.0 barrer의 결과를 얻었다. 부피가 큰 치환기로 인해 기체 확산 길이가 증가하여 기체 투과 선택성이 높아졌음을 확인하였다. 혼합 기체 투과 결과 또한 MDEA 기반 폴리이미드 분리막이 실제 혼합 기체 공정에서 높은 선택도를 달성할 수 있다는 것을 보여준다. 이러한 MDEA 기반 폴리이미드는 우수한 투과도 및 선택도로 경제적인 프로필렌 분리의 가능성을 크게 높일 수 있다.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.447-452
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• 1998

The selective dry etching of GaAs to Al\ulcornerGa\ulcornerAs using $BCI_3/SF_6$ gas mixture in electron cyclotron resonance(ECR) plasma is investigated. A selectivity of GaAs to AlGaAs of more than 100 and maximum etch rate of GaAs are obtained at a gas ratio $SF_6/BCI_3+SF_6$ of 25%. We verified the formation of $AlF_3$ on $Al_{0.25}Ga_{0.75}As$from the Auger spectra which enhanced the etch selectivity. In order to investigate surface damage of AlGaAs caused by ECR plasma, we performed a low temperature photoluminescence(PL) measurement as a function of RF power. As the RF power. As the RF power increases, the PL intensity decreases monotonically from 50 to 100 Wand then repidly decreases until 250 W. This behavior is due to surface damage by plasma treatment. This dry etching technique using $BCI_3/SF_6$ gas mixture in ECR plasma is suitable for gate recess formation on the GaAs based pseudomorphic high electron mobility transistor(PHEMT)

• 센서학회지
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• 제32권5호
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• pp.290-294
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• 2023

Among various types of harmful gases, hydrogen sulfide is a strong toxic gas that is mainly generated during spillage and wastewater treatment at industrial sites. Hydrogen sulfide can irritate the conjunctiva even at low concentrations of less than 10 ppm, cause coughing, paralysis of smell and respiratory failure at a concentration of 100 ppm, and coma and permanent brain loss at concentrations above 1000 ppm. Therefore, rapid detection of hydrogen sulfide among harmful gases is extremely important for our safety, health, and comfortable living environment. Most hydrogen sulfide gas sensors that have been reported are electrical resistive metal oxide-based semiconductor gas sensors that are easy to manufacture and mass-produce and have the advantage of high sensitivity; however, they have low gas selectivity. In contrast, the electrochemical sensor measures the concentration of hydrogen sulfide using an electrochemical reaction between hydrogen sulfide, an electrode, and an electrolyte. Electrochemical sensors have various advantages, including sensitivity, selectivity, fast response time, and the ability to measure room temperature. However, most electrochemical hydrogen sulfide gas sensors depend on imports. Although domestic technologies and products exist, more research is required on their long-term stability and reliability. Therefore, this study includes the processes from electrode material synthesis to sensor fabrication and characteristic evaluation, and introduces the sensor structure design and material selection to improve the sensitivity and selectivity of the sensor. A sensor case was fabricated using a 3D printer, and an Ag reference electrode, and a Pt counter electrode were deposited and applied to a Polytetrafluoroethylene (PTFE) filter using PVD. The working electrode was also deposited on a PTFE filter using vacuum filtration, and an electrochemical hydrogen sulfide gas sensor capable of measuring concentrations as low as 0.6 ppm was developed.

• 멤브레인
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• 제17권2호
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• pp.134-139
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• 2007

동일 운전 조건에서 폴리이서술폰 중공사 분리막을 이용하여 혼합 기체로부터 이산화탄소 분리 실험과 수치해석으로 얻어진 결과를 비교하였다. 순수한 기체의 투과도로부터 구한 이상 선택도를 활용한 예측값과 실험값이 많은 차이 가 있음을 확인할 수 있었다. 그러나 이산화탄소 투과도와 선택도를 혼합 기체 분리 실험 결과로부터 구한 후 공급 이산화탄소 몰 분율, 공급 압력과 투과측 압력의 함수로서 투과도와 선택도를 얻을 경우 수치해석 예측값과 실험값이 잘 일치하는 것을 확인하였다.

• 멤브레인
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• 제24권2호
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• pp.100-106
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• 2014

본 연구에서는 용해성 폴리이미드 합성을 위해 지환족(alicyclic) dianhydride 단량체인 5-(2,5-dioxotetrahydrofuryl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride (DOCDA)와 diamine으로는 4,4'-diaminodiphenylether (ODA), 1,4-phenylenediamine (p-PDA)를 사용하여 두 가지 폴리이미드를 제조한 후 그 특성을 고찰하고 기체투과특성을 알아보았다. 제조된 폴리이미드는 FT-IR을 통해 합성이 성공적으로 이루어졌음을 확인하였고 DSC를 통하여 열적 안정성을 알아보았다. 제조된 폴리이미드막의 $CH_4$와 $CO_2$에 대한 기체투과계수(P)와 이상 선택도는 time-lag 장비로 측정하였다. 그 결과, DOCDA-ODA, DOCDA-p-PDA의 경우 $CO_2$의 투과도는 각각 6.10, 0.74 barrer로 나타났고 $CO_2/CH_4$의 선택도는 67.03, 46.25의 결과를 나타내었다. 두 가지 폴리이미드 중 DOCDA-ODA의 경우 폴리이미드 재료의 특성인 우수한 투과도 및 선택도로 새로운 기체분리막으로서의 이용가능성을 나타내었다.

• 한국전기전자재료학회논문지
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• 제17권1호
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• pp.1-6
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• 2004

Dry etch characteristics of polysilicon with HBr/O$_2$ inductively coupled plasma (ICP) have been investigated. We determined etch late, uniformity, etch profiles, and selectivity with analyzing the cross-sectional scanning electron microscopy images obtained from top, center, bottom, right, and left positions. The etch rate of polysilicon was about 2500 $\AA$/min, which meets with the mass production for devices. The wafer level etch uniformity was within $\pm$5 ％. Etch profile showed 90$^{\circ}$ slopes without notches. The selectivity over photoresist was between 2:1∼4.5:1, depending on $O_2$ flow rate. The HBr-ICP etching showed higher PR selectivity, and sharper profile than the conventional Cl$_2$-RIE.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.770-772
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• 1998

The highest etch rate of Pt film was obtained at 10% $Cl_2$/90% Ar gas mixing ratio in our previous investigation. However, the problems such as the etch residues(fence) remained on the pattern sidewall, low selectivity to oxide as mask and low etch slope were presented. In this paper, the etching by additive $O_2$ gas to 10% $Cl_2$/90% Ar gas base was examined. As a result, the fence-free pattern and high etch slope was observed and the selectivity to oxide increased without decreasing of the etch rate. And the reasons for this phenomenon was investigated by XPS(x-ray photoelectron spectroscopy) surface analysis and plasma characteristic.

• 한국전기전자재료학회논문지
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• 제35권1호
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• pp.11-17
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• 2022

Direct exposure to toxic and hazardous gases has always been considered as the most pervasive problem worldwide, leading to a gradual increase in the number of asthma patients due to NO_x/SO_x gases inhaling and exposure to 50 ppm formaldehyde gases. Therefore, the development of accurate gas sensors is a key issue for resolving these problems. To address such issues, the development of membranes for selective filtering of target molecules as well as nanocatalyst for enhancing the sensing selectivity is highly crucial. In this review, the research progress for porous membrane materials (e.g. MOFs, and graphene) and nanocatalyst technology for the development of selective and accurate gas sensors will be discussed.

• 멤브레인
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• 제23권6호
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• pp.393-408
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• 2013

고분자 분리막을 이용한 기체 분리막은 높은 에너지 효율, 경제적인 장점으로 최근 수년간 지속적으로 개발되어 왔다. 최적화된 경제적 성능을 얻기 위하여 기체 분리막은 높은 투과도와 선택도를 가져야 한다. 따라서 기체분리 분리막용으로 다양한 고분자를 시험한 연구 결과들이 보고되어 왔다. 다양한 소재 중, 폴리이미드는 다양한 기체인자에 대하여 높은 투과 선택도와 높은 화학적 열적 안정성, 그리고 물리적 안정성으로 많은 주목을 받아왔다. 따라서 본고에서는 기체분리용 폴리이미드 소재의 개발동향과 분리막의 제조방법, 기체 분리의 원리에 대하여 다루었다.

• Bulletin of the Korean Chemical Society
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• 제33권8호
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• pp.2669-2674
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• 2012

Crown ether is one of well-known host molecules and able to selectively sequester metal cation. We employed M06-2X density functional theory with IEFPCM and SMD continuum solvation models to study selectivity of dibenzo-18-crown-6-ether (DB18C6) for alkaline earth dications, $Ba^{2+}$, $Sr^{2+}$, $Ca^{2+}$, and $Mg^{2+}$ in the gas phase and in aqueous solution. $Mg^{2+}$ showed predominantly strong binding affinity in the gas phase because of strong polarization of CO bonds by cation. In aqueous solution, binding free energy differences became smaller among these dications. However, $Mg^{2+}$ had the best binding, being incompatible with experimental observations in aqueous solution. The enthalpies of the dication exchange reaction between DB18C6 and water cluster molecules were computed as another estimation of selectivity in aqueous solution. These results also demonstrated that $Mg^{2+}$ bound to DB18C6 better than $Ba^{2+}$. We speculated that the species determining selectivity in water could be 2:1 complexes of two DB18C6s and one dication.