• 한국정밀공학회지
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• 제16권1호통권94호
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• pp.219-225
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• 1999

Monitoring of the cutting force signals in cutting process has been well emphasized in machine tool communities. Although the cutting force can be directly measured by a tool dynamometer, this method is not always feasible because of high cost and limitations in setup. In this paper an indirect cutting force monitoring system is developed so that the cutting force in turning process is estimated based on a AC spindle drive model. This monitoring system considers the cutting force as a disturbance input to the spindle drive and estimates the cutting force based on the inverse dynamic model. The inverse dynamic model represents the dynamic relation between the cutting force, the motor torque and the motor power. The proposed monitoring system is realized on a CNC lathe and its estimation performance is evaluated experimentally.

• 대한기계학회논문집
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• 제9권6호
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• pp.757-766
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• 1985

본 연구에서는 기계공업 분야에서 많이 이용되는 구조용 합금강인 Cr-Mo강 (SCM4)과 쾌삭강(SUM31, SUM24L)과의 이종강봉 마찰용접에서 소성변형중에 발생된 초 기 AE량과 용접 품질(강도)제어 사이에 역시 정량적 상관성이 성립함을 용접 회전수, 용접에너지, 용접 업셋 및 용접 시간 등을 매개 변수로 하여 실험과 계산을 통해 입증 하고, 이를 상관식의 95% 신뢰성을 확인한 후, 본 연구의 최종 목적으로서, 마찰용접 평가의 자동화가 이루어지게 하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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• pp.11-15
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• 1999

Monitoring of the cutting force signals in cutting process has been well emphasized in machine tool communities. Although the cutting force can be directly measured by a tool dynamometer, this method is not always feasible because of high cost and limitations in setup. In this paper an indirect cutting force monitoring system is developed so that the cutting force in turning process is estimated based on a AC spindle drive model. This monitoring system considers the cutting force as a disturbance input to the spindle drive and estimates the cutting force based on the inverse dynamic model. The inverse dynamic model represents the dynamic relation between the cutting force, the motor torque and the motor power. The proposed monitoring system is realized on a CNC lathe and its estimation performance is evaluated experimentally.

• 한국정밀공학회지
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• 제22권10호
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• pp.90-98
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• 2005

A monitoring system is necessary to make the polishing process more reliable in order to ensure the high quality and performance of the final products. Generally, AE (Acoustic Emission) is known to be closely related to the material removal rate (MRR). As the surface becomes rougher, the MRR and AE increase. Therefore, the surface roughness can be indirectly estimated using the AE signal measured during the polishing. In this study, an AE sensor-based monitoring system was fabricated to detect the very small AE signal resulting from the friction between a tool and a workpiece during polishing. The performance of this monitoring system was estimated according to polishing conditions, the relation between the level of the AE RMS and the surface roughness during the polishing was investigated.

• 한국정밀공학회지
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• 제21권5호
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• pp.99-105
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• 2004

Internet provides the useful method to monitor the current states of the machine tool no matter where a personnel monitors it. In this paper, a monitoring method of the torque of the machine tool's spindle induction motor using interne is suggested. To estimate the torque accurately, spindle driving system of an CNC lathe is divide into two parts, induction motor part and mechanical part attached to the induction motor spindle. Magnetizing current is calculated from the measured 3 phase currents without speed sensor used to estimate the torque generated by an induction motor. In mechanical part of the system, some of the torque is used to overcome friction and remaining torque is used to overcome cutting force. An equation to estimate friction torque is drawn as a function of cutting torque and rotation speed. Graphical programming is used to implement the suggested algorithm. to monitor the torque of an induction motor in real time and to make the estimated torque monitored on client computers. Torque of the spindle induction motor is well monitored on the client computers in about 3% error range under various cutting conditions.

• Tribology and Lubricants
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• 제34권3호
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• pp.115-122
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• 2018

Chemical mechanical polishing (CMP) is a hybrid processing method in which the surface of a wafer is planarized by chemical and mechanical material removal. Since mechanical material removal in CMP is caused by the rolling or sliding of abrasive particles, interfacial friction during processing greatly influences the CMP results. In this paper, the trend of tribology research on CMP process is discussed. First, various friction force monitoring methods are introduced, and three elements in the CMP tribo-system are defined based on the material removal mechanism of the CMP process. Tribological studies on the CMP process include studies of interfacial friction due to changes in consumables such as slurry and polishing pad, modeling of material removal rate using contact mechanics, and stick-slip friction and scratches. The real area of contact (RCA) between the polishing pad and wafer also has a significant influence on the polishing result in the CMP process, and many researchers have studied RCA control and prediction. Despite the fact that the CMP process is a hybrid process using chemical reactions and mechanical material removal, tribological studies to date have yet to clarify the effects of chemical reactions on interfacial friction. In addition, it is necessary to clarify the relationship between the interface friction phenomenon and physical surface defects in CMP, and the cause of their occurrence.

• Journal of Advanced Marine Engineering and Technology
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• 제33권1호
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• pp.71-80
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• 2009

The response characteristics of EHA systems are sensitive to the temperature change of working fluid because the temperature of working fluid causes the variation of system parameters such as effective bulk modulus and viscous friction coefficient. In this paper, a precise position control of EHA system using the adaptive sliding mode control system is suggested. The adapted system parameters such as effective bulk modulus and viscous friction coefficient can be used for monitoring failures in the EHA system which has potential applications in the industrial fields. Not only the accuracy of adapted system parameters but also the improved performance and robustness in a given reference position of the cylinder are verified by computer simulation using AMESim software.

• Transactions on Electrical and Electronic Materials
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• 제8권1호
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• pp.11-14
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• 2007

Consumables used in Chemical Mechanical Polishing (CMP) have been played important role to improve quality and productivity. Since the properties of consumables constantly change with various reasons, such as shelf time, manufactured time, lot to lot variation from supplier and so on, CMP results are not constant during the process. Also, CMP process results are affected by multiple sources from wafer, conditioner, pad and slurry. Therefore, multiple sensing systems are required to monitor CMP process variation. In this paper, the authors focus on development of monitoring system for CMP process which consist of force, temperature and displacement sensor to measure the signal from CMP process. With monitoring systems mentioned above, complex CMP phenomena can be investigated more clearly.

• 한국정밀공학회지
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• 제11권5호
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• pp.110-123
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• 1994

The development of automatic production systems have required inteligent diagnostic and monitoring function to repair system failure and reduce production loss by the failure. In order to perform accurate functions of intelligent system, inferencing about total system failure and fault analysis due to each mechanical component failures are required. Also the solution about repair and maintenance can be suggested from these analysis results. As an essential component of mechanical system, a bearing system is investigated to define the failure behavior. The bearing failure is caused by lubricant system failure, metallurgical defficiency, mechanical condition(vibration, overloading, misalignment) and environmental effect. This study described roller bearing fault train due to stress variation and metallurgical defficiency from lubricant failure by using FTA.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.181-184
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• 2014

Loose Parts Monitoring System(LPMS) monitors loosened or detached parts and foreign parts inside the pressure boundary of a reactor coolant system (RCS). It is difficult to discriminate valid signal from LPMS alarms at full power since the signal pattern by thermal shocks and structure friction are similar to those by loose metal impacts. In addition, It is more difficult to discriminate the impact signals induced by the rod driving, sensor hard-line movement and loosened component since they have similar frequency characteristics with valid signals. This paper classifies the signal patterns by analyzing actual LPMS signal captured during nuclear power plant operation.