Development of Multiple CMP Monitoring System for Consumable Designs |
Park, Sun-Joon
(Department of Precision & Mechanical Engineering, Pusan National Univercity)
Park, Boum-Young (Department of Precision & Mechanical Engineering, Pusan National Univercity) Kim, Sung-Ryul (Department of Precision & Mechanical Engineering, Pusan National Univercity) Jeong, Hae-Do (School of Mechanical Engineering, Pusan National University) Kim, Hyoung-Jae (Department of CMF R&D, G&P Technology Co., Ltd.) |
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2 | Harald Jacobsen et al, 'Metrological assessment of the coefficient of friction of various types of silica using the motor current during ILP-CMP', Mat. Res. Soc Symp. Proc., Vol. 816, p. K3.3.1, 2004 |
3 | Hyunseop Lee et al., 'Effects of friction energy on polishing results in CMP process', KSME, Vol. 28, No. 11, p. 1807, 2004 |