• 한국결정성장학회지
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• 제7권2호
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• pp.207-215
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• 1997

Ionized Cluster Beam Deposition(ICBD)방법을 이용하여 Si(100)기판과 TiN(60 nm)/Si(100)기판위에 Al 박막을 증착하였다. 증착된 Al 박막의 증착특성은 $\alpha$-step, four-point-probe, XRD, SEM, AES 측정장치를 가지고 조사해 보았다. 도가니 온도가 증가함에 따라 Al 박막의 증착속도는 증가하였고 비저항 값은 감소하였다. 도가니 온도가 $1800^{\circ}C$인 경우 가속전압이 증가함에 따라 연속적이며 평평한 박막이 형성되고 비저항이 감소되었다. 최소의 비저항 값은 Si 기판에서는 가속전압이 4 kV일 때 3.4 $\mu \Omega \textrm {cm}$, TiN 기판에서는 가속전압이 2kV일 때 3.6 $\mu \Omega \textrm {cm}$. AES 분석결과 형성된 박막내에서는 불순물이 존재하지 않는 것을 알 수 있었다. 따라서 Al 박막의 비저항은 박막충의 미세구조에 의해 영향을 받는다.

• 한국분말재료학회지
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• 제19권5호
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• pp.343-347
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• 2012

In this study, an oxygen plasma treatment was used as a low temperature debinding method to form a conductive copper feature on a flexible substrate using a direct printing process. To demonstrate this concept, conductive copper patterns were formed on polyimide films using a copper nanoparticle-based paste with polymeric binders and dispersing agents and a screen printing method. Thermal and oxygen plasma treatments were utilized to remove the polymeric vehicle before a sintering of copper nanoparticles. The effect of the debinding methods on the phase, microstructure and electrical conductivity of the screen-printed patterns was systematically investigated by FE-SEM, TGA, XRD and four-point probe analysis. The patterns formed using oxygen plasma debinding showed the well-developed microstructure and the superior electrical conductivity compared with those of using thermal debinding.

• 한국세라믹학회지
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• 제31권2호
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• pp.227-233
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• 1994

The Bi-Sr-Ca-Cu-O thin films were deposited by RF-magnetron sputtering method on Si(P-111) wafer without a buffer layer and annealed at various temperatures in oxygen atmosphere. The temperature dependence of electrical resistance, the microstructure of intermediate phase, and the surface morphology of films were examined by four probe method, XRD, and SEM, respectively. The chemical composition and the depth profile of the films were determined by ESCA spectra. Thin films annealed at $600^{\circ}C$ and $700^{\circ}C$ in oxygen atmosphere showed onset temperatures of 90 K and 85K, and Tc(zero) of 22K and 31K, respectively. The sample annealed at $700^{\circ}C$ had the highest volume fraction of superconducting phase and showed smooth microsturcture. In ESCA spectra, the thin films were homogeneous with depth.

• 한국정밀공학회지
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• 제26권2호
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• Current Optics and Photonics
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• 제1권1호
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• pp.7-11
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• 2017

In this study, multilayered graphene was easily transferred to the target substrate in one step using thermal release tape. The transmittance of the transferred graphene according to the number of layers was measured using a spectrophotometer. The sheet resistance was measured using a four-point probe system. Graphene formed using this transfer method showed almost the same electrical and optical properties as that formed using the conventional poly (methyl methacrylate) transfer method. This method is suitable for the mass production of graphene because of the short process time and easy large-area transfer. In addition, multilayered graphene can be transferred on various substrates without wetting problem using the one-step dry transfer method. In this work, this easy transfer method was used for dielectric substrates such as glass, paper and polyethylene terephthalate, and a sheet resistance of ~240 ohm/sq was obtained with three-layer graphene. By fabricating organic solar cells, we verified the feasibility of using this method for optoelectronic devices.

• Journal of Magnetics
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• 제16권2호
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• pp.169-172
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• 2011

This study reports an alternative method for measuring the magnetoresistance of unpatterned magnetic tunnel junctions similar to the current-in-plane tunneling (CIPT) method. Instead of using microprobes, a series of point contacts with different spacings are coated on the top surface of the junctions and R-H loops at various spacings are then measured by the usual four-point probe method. The values of magnetoresistance and resistance-area products can be obtained by fitting the measured data to the CIPT theoretical model. The test results of two types of junctions were highly similar to those obtained from standard CIPT tools. The proposed method may help to accelerate the process for evaluating the quality of magnetic tunnel junctions when commercial CIPT tools are not accessible.

• 공업화학
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• 제5권3호
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• pp.395-405
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• 1994

Carbon black(이하 CB로 약함) 표면에 존재하는 각종 작용기(-OH, OC,<-COOH)를 n-butyl lithium을 반응활성화제로 활성화시킨 후 아크릴레이트 및 메타크릴레이르 단량체들을 음이온 그라프트 중합하여 CB-그라프트 생성물을 얻었다. 이 CB-그라프트 생성물을 비용매를 이용한 침전법과 원심분리기를 사용하여 호모폴리머를 분리시켜 반응시간과 온도에 따른 그라프트 효율 등을 구한 결과, CB-polyacrylates의 경우 그라프트율이 20~30% 정도로 낮았지만 CB-polymethacrylate의 경우 150~200% 정도의 매우 높은 그라프트율의 CB- grafted polymer를 얻을 수 있었다. 또한, 각 반응온도에서 CB와 단량체들의 음이온 중합은 대체로 1~2시간 정도에서 평형상태를 이루었으며, 온도가 높아짐에 따라 전환율과 그라프트율은 약간의 증가를 보였다. 콜로이드 분산성 시험을 한 결과 열건조 전에는 각 호모폴리머의 양용매 중에서 매우 안정한 분산성을 나타냈으며, 열건조 후에도 CB-polymethacrylate의 경우에는 대부분의 polymethacrylate 양용매에 대해 매우 양호한 안정성을 보였다. CB 표면에서의 그라프트 중합체의 확인은 적외선 스펙트럼에 의해 행하였다. Four-probe 방법에 의한 CB-grafted polymer의 저항값 측정에서는 그라프트율이 높을수록 저항값이 증가함을 알 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.120-120
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• 2009

Ga doped ZnO (GZO) transparent conductive films were deposited on the glass substrates at room temperature by facing target sputtering (FTS) method. The sputtering targets were 100 mm diameter disks of GZO($Ga_2O_3$ 3.w.t%) and Zn metal. The GZO thin films were deposited as a various $PO_2$ (oxygen gas content). Base pressure was $2{\times}10^{-6}torr$, and a working pressure was 1mTorr. The properties of thin films on the electrical and optical properties of the deposited films were investigated by using a four-point probe (Chang-min), a Hall Effect measurement (Ecopia) and an UV/VIS spectrometer (HP). The minimum resistivity of film was $6.5{\times}10^{-4}[{\Omega}-cm]$ and the average transmittance of over 80% was seen in the visible range

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.32.1-32.1
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• 2011

Ultra thin tantalum nitride (TaNx) films with various thicknesses (10 nm to 40 nm) have been deposited by rf magnetron sputtering technique on glass substrates. The as deposited films were systematically characterized by several analytical techniques such as X-ray diffraction, X-ray photoelectron spectroscopy, field emission scanning electron microscopy, atomic force microscopy, UV-Vis-NIR double beam spectrophotometer and four point probe method. From the XRD results, the as deposited films are in amorphous nature, irrespective of the film thicknesses. The films composition was changed greatly with increasing the film thickness. SEM micrographs exhibited the densely pack microstructure, and homogeneous surface covered by small size grains at lower thickness deposited films. The surface roughness of the films was linearly increases with increasing the films thickness, consequently the transmittance decreased. The absorption edge was shifted towards higher wavelength as the film thickness increases.

• 폴리머
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• 제34권6호
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• pp.553-559
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• 2010

The paper describes the preparation and characterization of conductive polyaniline-modified polymers by growing of aniline onto functionalized poly(styrene-co-p-methylstyrene) [P(St-co-MSt)]. For this purpose, P(St-co-MSt) was synthesized via nitroxide mediated radical polymerization (NMRP) and then N-boromosuccinimide was used for introduction of bromine to the benzylic positions of copolymer. Afterwards, 1,4-phenylenediamine was linked to the brominated P(St-co-MSt) and functionalized copolymer $[P(St-co-MSt)-NH_2]$ was prepared. The graft copolymerization of aniline monomers onto functionalized P(St-co-MSt) was initiated by oxidized phenylamine groups after addition of ammonium peroxydisulfate (APS), and p-toluenesulfonic acid-doped PANI was chemically grafted onto P(St-co-MSt) via oxidation polymerization. The obtained terpolymer was studied by FTIR and UV-Vis spectroscopy and its thermal behaviour were examined by DSC and TGA analyses. The conductivity of terpolymer was measured by four-point probe method and electroactivity was measured by cyclic voltammetry (CV). The solubility of P(St-co-MSt)-g-PANI was examined in common organic solvents.