• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.7 s.238
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• pp.983-989
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• 2005

The effects of mechanical parameters on the characteristics of chemical mechanical polishing(CMP) can be directly evaluated by friction force. The piezoelectric quartz sensor for friction force measurement was installed, and friction force could be detected during CMP process. Furthermore, friction energy can be calculated by multiplying relative velocity by integration of the friction force throughout the polishing time. $SiO_2$ slurry for interlayer dielectric(ILD) CMP was used in this experiment to consider the relation of frictional characteristics and polishing results. From this experiment, it is proven that the friction energy is an essential factor of removal rate. Also, the friction force is related to removal amount per unit length(dH/ds) and friction energy has corelation to the removal rate(dH/dt) and process temporature. Moreover, within wafer non-unifornity(WIWNU) is related to coefficient of friction because of the mechanical moment equilibrium. Therefore, the prediction of polishing result would be possible by measuring friction force.

• Transactions of the Society of Information Storage Systems
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• v.2 no.3
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• pp.169-177
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• 2006

In this study, we present the optimization of a head slider using kriging method in order to reduce lift-off force during unloading process with satisfying reliable flying attitude in steady state. To perform an optimization process efficiently, a simplified lift-off force model, which is a function of air bearing suction force and flying attitudes, is created by kriging method. The EMDIOS, which is the process integration and design optimization software developed by iDOT, is used to automatically wrap the analysis with the optimization and efficiently implements the repetitive works between analyzer and optimizer. An optimization problem is formulated to reduce the lift-off force during unloading process while satisfying the flying attitude in reliable range over the entire recording band and reducing the probability of contact between slider and disk. The simulation result shows that the amplitude of lift-off force of optimized L/UL slider is reduced about 62%, compared with that of initial slider model. It is demonstrated by the dynamics L/UL simulation that the optimum slider incorporated with the suspension is not only smoothly loaded onto disk but also properly unloaded onto the ramp.

• Tribology and Lubricants
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• v.2 no.1
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• pp.69-77
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• 1986

The motion of journal in a bearing is considered separately as rotation and translation, and then the equations of motion are derived. The bearing load capacities for these motions are calculated from the lubrication theory. The numeric integration of the equations of motion gives various journal orbit depending on force cycles and bearing parameters.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.2
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• pp.11-15
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• 2013

The wafer bonding process becomes a flexible approach to material and device integration. The bonding strength in 3-dimensional process is crucial factor in various interface bonding process such as silicon to silicon, silicon to metals such as oxides to adhesive intermediates. A measurement method of bonding strength was proposed by utilizing AFM applied CNT probe tip which indicated the relative simplicity in preparation of sample and to have merit capable to measure regardless type of films. Also, New Tool was utilized to measure of tip radius. The cleaned $SiO_2$-Si bonding strength of SPFM indicated 0.089 $J/m^2$, and the cleaning result by RCA 1($NH_4OH:H_2O:H_2O_2$) measured 0.044 $J/m^2$, indicated negligible tolerance which verified the possibility capable to measure accurate bonding strength. And it could be confirmed the effective bonding is possible through SPFM cleaning.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.6
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• pp.1365-1381
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• 1990

A $C^{0}$ continuous displacement finite element method based on a higher-order shear deformation theory is employed in the prediction of the transient response of laminated composite plates subjected to low-velocity impact. A modified contact law was applied to calculate the contact force during impact. The discrete element chosen is a nine-noded quadrilateral with 5 degree-of-freedom per node. The Wilson-.theta. time integration algorithm is used for solving the time dependent equations of the impactor and the central difference method was adopted to perform time integration of the plate. Numerical results, including the contact force history, deflection, and velocity history, are presented. Comparisons of numerical results using a higher order theory and a first-order theory show that using a higher order theory provides more accurate results. Effects of boundary condition, impact velocity, and mass of the impactors are also discussed.d.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.18 no.4 s.70
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• pp.385-393
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• 2005

This paper established the dynamic model of a flexible Timoshenko beam capable of geometrical nonlinearities subject to large overall motions by using the finite element method. Equations of motion are derived by using Hamilton principle and are formulated in terms of finite elements in which the nonlinear constraint equations are adjoined to the system using Lagrange multipliers. The Newmark direct integration method and the Newton-Raphson iteration are employed here for the numerical study which is to demonstrate the efficiency of the proposed formulation.

• Design & Manufacturing
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• v.9 no.2
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• pp.1-5
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• 2015

Recently, as small-sized display products such as mobile phones and digital cameras have become lighter and smaller, the size of electric signal delivery part, connector for the mobile display products, also, needs to become smaller, so high-density integration like shortening the distance between signal delivery media, conductors is necessary. With the micro and high-density integration of the connector, it is necessary to maintain contact to a certain degree for keeping intensity and delivering electric signal smoothly to prevent a defect with a specific impact. Accordingly, this study carried out a structural analysis according to the operating mechanisms of 0.16CHP Class Bottom Contact FPC Connector and 0.24CHP Class BTB Connector mostly used in small-sized mobile display products such as mobile phones and digital cameras. As a result of the analysis, both connectors had lower than 997MPa, yield strength of connector material C5240-XSH, so it is judged that permanent plastic deformation would not occur, and that a contact force between the connector and FPC film occurs to a certain degree, so that there would not be any defect in electric signal delivery.

• 한국기계연구소 소보
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• s.14
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• pp.135-144
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• 1985

A method is described to obtain the first order force and second order steady force on the fixed two dimensional submerged or semisubmerged cylinders at infinite depth of water due to regular waves. The first order diffraction wave velocity potential which describes the flow diffracted by a body is obtained numerically using source distribution method on the mean wetted surface. And a technique to remove the irregular frequency phenomena of the source distribution method is also applied. The second order steady force is calculates by means of direct integration of the pressures on the body as derived from the first order velocity potential and is also computed by means of reflection wave height derives from momentum conservation theory. The results are compared with those of published works, and show good agreement.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.539-544
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• 2004

This paper discusses the measurement of tire driving performance for 2 types of tire model. Tire is almost composed of rubber, and this is related with the bearing capacity of tire due to the external force. In this study, an explicit time integration method has been used to simulate steady state rolling along a straight path and over a cleat. And analysis for tire dynamic response rolling over a cleat is importnat to study automobile NVH properties. Besides, the evaluation of contact shear force is perfomed for steady state rolling and braking state. The results show that there are noticeable differences between 205/60R15 and 225/60R15 tire model.

• Proceedings of the KIEE Conference
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• 1988.11a
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• pp.24-27
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• 1988

This paper presents an adaptive finite element method for magnetostatic force computation using Maxwell's stress tensor Mesh refinements are performed automatically by interelement flux density discontinuity errors and element force errors. In initial mesh, the computed forces for different Integration paths give great differences. but converge to a certain value as mesh division is performed by the adaptive scheme, We obtained good agreement between analytic solutions and numerical values In typical examples.