A Study on Frictional Characteristics and Polishing Result of SiO2 Slurry in CMP |
Lee Hyunseop
(부산대학교 정밀기계공학과)
Park Boumyoung (부산대학교 정밀기계공학과) Seo Heondeok (부산대학교 정밀기계공학과) Jung Jaewoo (부산대학교 정밀기계공학과) Jeong Sukhoon (부산대학교 정밀기계공학과) Jeong Haedo (부산대학교 정밀정형 및 금형가공 연구소) |
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