• 제목/요약/키워드: fluorine-free

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Application of mid-infrared TDLAS to various small molecule diagnostics

  • 이영식
    • 천문학회보
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    • 제35권1호
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    • pp.25-25
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    • 2010
  • The spectroscopy over a region from 3 to 17 ${\mu}m$ based on the tuneable diode lasers (TDLAS) is the most powerful technique for in situ studies of the diagnostics of small molecules. The increasing interest in small molecules especially containing carbon, oxygen, hydrogen, and fluorine containing ones can be fulfilled by TDLAS at 0.0001 cm-1 resolution, because most of these compounds are infrared active. TDLAS provides a means of determining the absolute concentrations of the ground states of stable and transient molecular species, which can be employed for the time dependent studies in sub micro second scale. Information about gas temperature and population densities can also be derived from TDLAS measurements. Collisional energy transfer between the small molecules can be studied with TDLAS. Also, a variety of free radicals and molecular ions have been detected by TDLAS. Since plasmas with molecular feed gases are used in many applications, there are new applications in industrial field. Recently, the development of quantum cascade lasers (QCLs) offers an attractive new option for TDLAS.

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Characteristics of Ag Etching using Inductively Coupled Halogen-based Plasmas

  • Park, Sang-Duk;Lee, Young-Joon;Kim, Sang-Gab;Choe, Hee-Hwan;Hong, Moon-Poe;Yeom, Geun-Young
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.860-863
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    • 2002
  • In this study, Ag thin films deposited on LCD-grade glass were etched using inductively coupled fluorine-based plasmas and the effect of various $CF_4$-based gas mixtures on the Ag etching characteristics were studied. When $CF_4$-based gas mixtures were used with $N_2$, due to the very low vapor pressure of etch products, etch products remained on the substrate after the etching. However, when $CF_4$ used with Ar, residue-free Ag etching could be obtained due to the removal of etch product by sputtering by $Ar^+$ ions.

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수소 중성입자빔을 이용한 실리콘 에칭

  • 김대철;홍승표;김종식;박종배;오경숙;김영우;윤정식;이봉주;유석재
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.278-278
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    • 2011
  • 수소 중성입자빔을 이용한 silicon etching은 기존의 silicon etching 공정 가스(Fluorine이나 Chlorine 계열의 가스) 사용 시 배출되는 유해 가스로 인한 지구 온난화 방지 및 폐기물 처리에 추가적인 비용이 발생하지 않는 친환경 etching 공정이다. 본 연구에 사용된 수소 중성입자빔을 발생시키기 위한 플라즈마 소스는 낮은 압력에서 높은 플라즈마 밀도를 발생시킬 수 있는 ECR 플라즈마 소스를 사용하였으며 중성입자빔의 에너지를 조절할 수 있는 중성화판과 플라즈마로부터의 전하손상을 방지할 수 있어 charge free 공정을 가능하게 하는 Limiter로 구성되어 있다. 본 연구에서는 플라즈마 밀도, 공정 압력 그리고, 중성입자빔의 에너지를 조절하여 수소 중성입자빔을 이용한 poly-crystal silicon과 a-Si:H 간의 etch rate와 etching selectivity를 관찰하였다.

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MOD 공정으로 제조된 고임계전류 YBCO 후막 (High-Ic YBCO thick film fabricated by the MOD process)

  • 신거명;송규정;문승현;유상임
    • 한국초전도ㆍ저온공학회논문지
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    • 제10권1호
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    • pp.6-9
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    • 2008
  • We have investigated the MOD process successfully for the fabrication of the YBCO thick film on the $LaAlO_3$(001) single crystalline substrate. The cracking problem in YBCO thick film, a serious problem in the conventional TFA-MOD method, could be overcome with a careful control of precursor materials. Thus coating solution was prepared for the YBCO thick film by using fluorine-free precursor material. The precursor solutions were coated on the LAO(001) single crystalline substrate using the dip coating method, calcined at the temperature up to $500^{\circ}C$, and fired at various high temperatures for 2 h in a reduced oxygen atmosphere. Optimally processed YBCO thick film exhibited high critical current($I_c$) over 200 A/cm-width at 77K in self-field.

스티렌과 불소함유 아크릴레이트의 공중합 및 공중합체의 특성 (Copolymerization and Characteristics of Styrene and Fluorine-Containing Acrylate)

  • 김상신;이상원;허정림;허완수
    • 폴리머
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    • 제26권1호
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    • pp.9-17
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    • 2002
  • 탄화수소의 수소 부분이 불소로 치환된 과불소알킬기(perfluoro group : $CF_3(CF_2)_nCH_2CH_2$-; n=5, 7, 9, 11)를 함유하고 있는 perfluoroalkylethyl acrylate(FA)와 styrene을 bulk 상태에서 $60^{\circ}C$를 유지하며 $\alpha$, $\alpha$'-azobisisobutyronitrile(AIBN)을 개시제로 하여 각각의 단량체의 반응 몰비를 변화시키며 전환율을 10% 이내로 제한하여 공중합체를 합성하였다. 또한 반응 몰비의 변화에 따른 중합된 공중합체내의 반복단위의 함량사이의 관계와 Helen-Tudos법을 이용하여 단량체 반응성비 $r_1$, $r_2$를 구하였다. FT-IR과 $^1H-NMR$을 통해 두 단량체의 공중합 여부와 구조를 정성적으로 확인하였고 공중합체의 조성은 $^1H-NMR$분석을 통해 구하였다. 단량체의 비율에 따른 열적 특성은 DSC와 TGA를 통하여 분석하였으며 공중합체와 소량의 공중합체가 첨가된 PMMA의 접촉각을 측정하여 공중합체의 표면특성을 나타내는 표면자유에너지를 계산하였다.

미분무수 첨가제의 소화효과 비교 (Comparison of Fire Extinguishing Effects for Water Mist Additives)

  • 김승일;신창섭
    • 한국안전학회지
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    • 제28권6호
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    • pp.23-28
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    • 2013
  • In order to improve extinguishing performance of water mist, many studies of additives have been conducted. In this study, viscosity agent which has the ability to improve extinguishing performance by adhering to the surface on fire was used and fluorine-free surfactant was also added to water to enhance water's wetting ability. This study aimed to verify optimal concentration of extinguishing of additives according to fire source and extinguishing performance by comparison with pure water. In case of wood crib fire, the results show that flame suppression and extinguishing time of sodium alginate 0.4 wt.% are 3.4 times and 2.2 times shorter than those of pure water in 0.2 MPa respectively. It seems that large amount of water adhere to surface on fire, thus cooling effect on surface was enhanced. Also water consumption of sodium alginate 0.4wt.% is up to 65% lower than that of pure water. In case of heptane fire, extinguishing time of cocobetaine 0.1 wt.% is 9.7 times shorter than that of pure water in 0.2 MPa. It is thought that because cocobetaine can block oxygen and suppress oil mist by making emulsion film on fire surface due to a low surface tension. On the other hand, water consumption of cocobetaine 0.1 wt.% is 92% lower than that of pure water.

누출사고 시 저장탱크 위험물 누출속도를 고려한 방유제 설계에 관한 연구 (A Study of a Dike Design Considering a Leakage Velocity at an Opening Hole in Case of a Leakage Accident)

  • 이재열;김동현;반순희;이창준
    • 한국안전학회지
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    • 제32권6호
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    • pp.40-45
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    • 2017
  • Chemical accidents generated during maintenance, repair, and normal operation, such as dispersion, fire, and explosions, can cause massive losses like a 2012 hydro fluorine leak in Gumi, South Korea. Since this accident, many researches have studied physical mitigation systems. However, due to many difficulties including potential costs and lack time, it is really hard for many companies to install mitigation systems without prior knowledge. Thus, the efficacy of mitigation system should be evaluated. This study assesses a dike design considering the fluid velocity at an open hole when a leakage accident occurs. It is assumed that leakage materials follow a free fall motion. Throughout case studies, a current KOSHA guide for a dike design was evaluated and new guidelines handling various conditions were proposed.

누출사고 시 저장탱크 위험물 누출속도를 고려한 탱크와 방유제 사이 간격에 관한 연구 (A Study of the Distance between a Tank and a Dike Considering a Leakage Velocity at an Opening Hole in case of a Leakage Accident)

  • 이재열;김동현;반순희;이창준
    • 한국안전학회지
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    • 제33권5호
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    • pp.35-41
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    • 2018
  • Chemical accidents generated during maintenance, repair, and normal operation, such as dispersion, fire, and explosions, can cause massive losses like a 2012 hydro fluorine leak in Gumi, South Korea. Since this accident, many researches have studied physical mitigation systems. However, due to the lack of potential costs and time, it is really hard for many companies to install mitigation systems without prior knowledge. Thus, the efficacy of mitigation system should be evaluated. This study assesses a dike design considering the fluid velocity at an open hole when a leakage accident occurs. It is assumed that leakage materials follow a free fall motion. Throughout case studies, a current KOSHA guide for a dike design was evaluated and new guidelines handling various conditions were proposed.

나노 알루미늄/불소 함유 폴리우레탄 결합제의 합성 및 열적 특성 연구 (Synthesis and Thermal Characteristics of Nano-Aluminum/Fluorinated Polyurethane Binders)

  • ;김진석;권영환
    • 한국추진공학회지
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    • 제20권5호
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    • pp.40-50
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    • 2016
  • 현재 적용되고 있는 에너지화 가소제는 $-NO_2$, $-ONO_2$$-N_3$와 같은 에너지화 활성 그룹을 포함하고 있어서 충격, 쇼크, 열 등 외부환경에 상당히 민감하여 복합화약의 둔감 안정성을 취약하게 한다. 본 연구에서는 민감한 에너지화 활성 그룹이 아니라 근본적으로는 비활성 그룹으로 복합화약의 민감도에는 영향을 미치지 않지만, 복합화약의 반응 시에 테르밋반응에 의해 추가적인 에너지를 발생할 수 있는 불소계 반응성 가소제를 적용한 폴리우레탄 결합제를 클릭반응으로 합성하고 나노 알루미늄과의 테르밋반응에 대한 열적 특성을 고찰하였다.

불화수소산에 의한 것으로 오인된 Trifluoroacetic anhydride에 의한 화학화상 (A Case of Chemical Burn Caused by Trifluoroacetic Anhydride that Mimicked a Hydrofluoric Acid Burn)

  • 박정수;김훈;이석우
    • 대한임상독성학회지
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    • 제8권1호
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    • pp.43-45
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    • 2010
  • A 22-year-old woman was referred to our emergency department for the treatment of a chemical injury on her arm. She had accidentally spilled 99% trifluoroacetic anhydride (TFAA) over her left forearm during an organic chemistry experiment. She visited a primary care unit, and then she was referred to our hospital for inactivation of the released fluoride ions. Her skin lesions were different from those caused by hydrofluoric acid (HF) injury. The injured area showed painful whitish maculae and patchy areas with accentuated rim. No vesiculation and bulla formation was detected. We intradermally injected a 5% solution of calcium through a 24-gauge needle into the burned skin. After the injection, she complained of more severe pain. Although TFAA contains fluorine, it does not release free fluoride ions on contact with the skin, unlike HF. In fact, application of calcium gluconate for TFAA burns is not recommended. Rather, it should be avoided since it increases pain and local abscess formation.

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