• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
• /
• pp.490-490
• /
• 2013

In semiconductor industry, it is expected that plasma process which use 450 mm source will be used at next generation. However, main obstacle of the large area plasma source is plasma uniformity from it. When electrode is enlarged, field difference between center area and side area reduces the plasma uniformity [1-3]. Therefore we investigate multi-electrode which diminish this field difference.We designed two multi-electrode models. One has two segments and the other has five segments. Each multi-electrode model is connected with two power generator and two matchers. One generator and one matcher is connected with center electrode part. The other one generator and the other one matcher is connected with side electrode part. The ion density is measured at 29 points by using floating harmonic method [4-6]. After measuring the data of each multi-electrode model, we discuss the difference of profile between two models' data.

• ETRI Journal
• /
• 제17권4호
• /
• pp.1-12
• /
• 1996

A novel body-tied silicon-on-insulator(SOI) n-channel metal-oxide-semiconductor field-effect transistor with grounded body electrode named GBSOI nMOSFET has been developed by wafer bonding and etch-back technology. It has no floating body effect such as kink phenomena on the drain current curves, single-transistor latch and drain current overshoot inherent in a normal SOI device with floating body. We have characterized the interface trap density, kink phenomena on the drain current ($I_{DS}-V_{DS}$) curves, substrate resistance effect on the $I_{DS}-V_{DS}$ curves, subthreshold current characteristics and single transistor latch of these transistors. We have confirmed that the GBSOI structure is suitable for high-speed and low-voltage VLSI circuits.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
• /
• pp.469-471
• /
• 1995

This paper describes the effect of floating metallic object on do flashover characteristics in all gap producing unipolar ion flow field. Needle-to-plane electrodes of 120mm in gap length were used as the main gap electrode and the tested metallic objects were spheres with the radius of 2,10 and 15mm or needles from 5 to 40mm long. The characteristics of flashover voltage vs. location of the floating object are different completely with the shape of the floating metal and polarity of the applied voltage.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
• /
• pp.508-508
• /
• 2012

CST microwave studio is used to simulate the plasma profile of the 450mm CCP source. Standing wave effect becomes important at the high frequency as the electrode radius increases. To solve plasma non-uniformity problem, we designed multi electrode chamber to decreasing standing wave effect. Simulation showed the ratio of input power of each electrode is related with electric field strength. The multi electrode was constructed and measured by 2D probe arrays using floating harmonic method. Uniformity of 450 mm CCP was changed by the ratio of input power of each electrode. We described this dependence with circuit model.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.680-683
• /
• 1997

In this paper, the multilayer actuator is investigated by using the finite element method. The material is taken to be piezoelectric. The capacitor and interdigital wlfloating type actuator are compared to the stress field distribution under the uniform electric field. As the length of the floating electrode in the interdigital wlfloating actuator changes, the stress field around the edge of electrode is studied.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
• /
• pp.598-600
• /
• 2002

To improve the luminance and efficiency of AC PDP, the effects of a square pulse applied to the address electrode during a sustain-period is investigated. Through this experiment, we confirmed the improvement of luminance and efficiency. We performed the temporal behavior measurement for the light emitted from AC PDP at floating state of the address electrode and at various auxiliary voltages (including ground state) applied to the address electrode using the scanned point detecting system. In the case of using an auxiliary voltage pulse, emission starts at the inner edges of the anode and cathode simultaneously. Also, we obtained the larger two discharge volumes compared with the normal sustain discharge where address electrode is floated.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1999년도 하계학술대회 논문집 E
• /
• pp.2287-2289
• /
• 1999

In this paper, a new method for calculating capacitance in multi-electrode system with arbitrarily shape is presented. This new approach based on divergence theorem and Gauss's law is achieved by Surface-Contacted Element(SCE) for Gaussian surface. To evaluate capacitance in multi-electrode system, two dimensional finite element method using only the elements which is contacted one nod (PE: Point-Element) or two nod (FE: Face-Element) with surface is employed. The proposed SCE method has short computing time to calculate capacitance which is because it uses only SCE elements and needs one calculation loop while exiting FEM method in servral loops. This method is verified by application in calculating capacitance using potential detection device model which is composed with anode, cathode, and floating electrode.

• Journal of Information Display
• /
• 제11권4호
• /
• pp.154-159
• /
• 2010

Single-sustainer driving is an AC PDP driving scheme to reduce the circuitry by maintaining the sustain electrode at ground level. To date, however, the research on the discharge characteristics in such driving scheme is insufficient. In this study, the panel performance and discharge characteristics of the single-sustainer driving scheme were observed while varying the address electrode condition. In single-sustainer driving, the address electrode is strongly involved in the sustain discharge when the former is maintained at ground level, and the dependence of the luminous efficacy on the sustain voltage is different from that in the conventional driving scheme. The dependence of the luminous efficacy on the sustain voltage appeared similar, however, to that in the conventional driving scheme when the address electrode was floated in single-sustainer driving. In the investigation of the temporal evolution of the sustain discharge using an IICCD camera, it was found that the sustain discharge in single-sustainer driving with a floating address electrode is similar to that in the conventional driving scheme, and the strong plasma formation region was located in the vicinity of the MgO surface, which seems to be related to the lifetime of a PDP with single-sustainer driving. In the investigation of the operation characteristics, the PDP that was operated with a floated address electrode showed a narrower dynamic operation margin, but a longer lifetime was expected.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제52권6호
• /
• pp.267-273
• /
• 2003

The plasma display panel with the electrode structure of new discharge AND gate and its driving scheme were proposed and the driving system for experiment was developed. And operation of these discharge AND gate was verified by the experiment of PDP addressing with floating electrode. This discharge AND gate operated by the operation speed of 8$mutextrm{s}$ and the operation margin of 100V. The address operation margin of 10V also obtained. It was known to be able to control the discharge of the adjoining scan electrode accurately. Because proposed method uses the DC discharge the control of the discharge can be facilitated compared with conventional discharge AND gate. Moreover, because the input discharge and the output discharge of discharge gate are separate, the display discharge can be prevented from passing discharge gates. Therefore, it is possible to apply to the large screen plasma display panel. And the decrease of contrast ratio does not occur because the scanning discharge does not influence the picture quality.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
• /
• pp.1189-1192
• /
• 2007

We propose new driving schemes, asymmetry and long gap mode, of PDP having auxiliary electrode between scan and common electrode. For the asymmetric modes, the auxiliary electrode located nearly center of the primary electrodes is connected to the scan of common electrode during all periods of reset, address and sustain. For the long gap mode, it is electrically disconnected or maintained at dc voltage of Vs/2 during sustain period except the first several sustain pulses. The proposed structure and driving method can provide higher luminous efficacy by minimizing consumption energy. The effectiveness of the new driving schemes has been investigated for various Xe partial pressure conditions.