• Journal of the Korean Society for Precision Engineering
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• v.26 no.7
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• pp.127-133
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• 2009

We present a $3-{\underline{P}}RS$ compliant parallel manipulator actuated by PZTs. The motion ranges are $400-{\mu}m$ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than $0.1{\mu}m$. The system shows resonance near 86 Hz with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.

• 한국항공운항학회:학술대회논문집
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• 2006.05a
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• pp.94-99
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.217-217
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• 2003

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.177-181
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stage are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.989-992
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• 2002

This paper presents a procedure far design, modeling and analysis of a fine positioning stage. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs (the flexure hinges). An experimental design procedure is applied to determine optimum design variables for flexure hinges. The optimum variables are validated through a numerical test. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.421-422
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• 2007

• Journal of Korean Association for Spatial Structures
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• v.16 no.1
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• pp.73-84
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• 2016

This study analyzes the four composition elements : profile, anchorage and connection, material and member rigidity, stability, as the main composition design elements of flexure structure systems, in order to explore possibilities for more various structure designs in architectures with flexure structure system. It also examines typical design methods that use the mentioned four composition elements. At the results, this research presents an understanding of the differences between funicular shape and non-funicular shape and mechanical features of the shapes in the profile element, regarding to the ratio of rise height to span length(f/l). Also, the typical design methods are presented for the designable usages of the hinge joints and the fix joints, and for the applications of member rigidity expressed by the index of the ratio of member depth to span length(d/l). And it was presented that connection styles, addition of brace members, placement of shear walls are the main design methods in the stability element. This data would be useful to architectural designs concerning integrated design with structures.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.19 no.6
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• pp.169-174
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• 2019

Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.54-59
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• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.