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http://dx.doi.org/10.5302/J.ICROS.2009.15.9.881

A Piezo-driven Fine Manipulation System Based on Flexure Hinges for Manipulating Micro Parts  

Choi, Kee-Bong (한국기계연구원 나노융합기계연구본부)
Lee, Jae-Jong (한국기계연구원 나노융합기계연구본부)
Kim, Gee-Hong (한국기계연구원 나노융합기계연구본부)
Ko, Kuk-Won (선문대학교 정보통신공학과)
Publication Information
Journal of Institute of Control, Robotics and Systems / v.15, no.9, 2009 , pp. 881-886 More about this Journal
Abstract
This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.
Keywords
stack-type piezoelectric element; fine manipulation; compliant mechanism; flexure hinge;
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