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Development of 3-DOF Parallel Manipulator Using Flexure Hinge  

Shin, Dong-Ik (Department of Precision Engineering, Hanyang Univ.)
Kim, Young-Soo (Department of Precision Engineering, Hanyang Univ.)
Suh, Seung-Whan (Department of Precision Engineering, Hanyang Univ.)
Han, Chang-Soo (Department of Precision Engineering, Hanyang Univ.)
Choi, Doo-Sun (Korea Institute of Machinery and Materials)
Whang, Kyung-Hyun (Korea Institute of Machinery and Materials)
Publication Information
Abstract
We present a $3-{\underline{P}}RS$ compliant parallel manipulator actuated by PZTs. The motion ranges are $400-{\mu}m$ translation to the z-direction and 5.7-mrad rotation about any axis on the x-y plane. A mechanical amplifier whose advantage is approximately 5.5 is designed and integrated with flexure revolute and spherical joints in a monolithic way. We evaluated the performance of the system: kinematic and dynamic characteristics. In kinematic point of view, the flexures play the roles of conventional mechanism but any nonlinearity such as dead-zone and backlash, which make it possible to achieve the steady-state resolution less than $0.1{\mu}m$. The system shows resonance near 86 Hz with high magnitude and, therefore, poor transient response. But the settling is faster when the flexures are strained higher.
Keywords
Parallel Manipulator; 3-PRS; Mechanical Amplifier; Flexure Hinge; Peizoelectric Actuator;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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