• Title/Summary/Keyword: film growth

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Annealing Effects on Electron Transport properties of Nanostructured Thin Film (Annealing에 의한 나노구조 박막의 전기적 특성 연구)

  • Kouh, Tae-Joon
    • Journal of the Korean Magnetics Society
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    • v.16 no.1
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    • pp.98-101
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    • 2006
  • Electron transport properties of nanostructured Pb thin film, consisting of grains, have been studied. Nanostructured thin films were fabricated on a substrate held at low temperature and their thicknesses were less than 10nm. While temperature of the film increased from 1.3 K to room temperature, the change in normal state sheet resistance has been measured. As the annealing temperature varies, the normal state sheet resistance shows a non-monotonic and irreversible change. Such behavior can be understood with the Pb grain growth due to annealing of the film.

Atomic structure of amorphous carbon deposited by various incidence angles -MD simulation study

  • Jo, Min-Ung;Lee, Gwang-Ryeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.52-52
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    • 2010
  • Amorphous carbon films have a variety of potential applications. In most such applications film properties are crucial and highly dependent on the film growth conditions. We here investigate the atomic structure of the films, which is generated at various incidence angles, using the classical molecular dynamics. Varying incidence angle of the deposited carbon atoms, different level of sp hybridization and porosity of the film are captured in our model. As the incidence angle becomes glancing, subplantation of the deposited carbon in vertical direction is significantly reduced, rather bouncing back of the incident carbon with slight modification of surface structure is mainly occurred at the early stage of the film growth. As the surface becomes rougher, shadowing effect at these glancing incidences also becomes more significant, which tends to cause asymmetrical and columnar structure. We describe incidence angle dependence of the evolution of the atomic structure of the film and its corresponding properties.

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A Study on the Image and Surface Structure analysisthat Manufacture by LB Method of LB Thin Film (LB박막의 이미지와 표면구조분석에 관한 연구)

  • Song, Jin-Won;Lee, Kyung-Sup;Choi, Young-Il;Chung, Hun-Sang;Gu, Hal-Bon;Kim, Young-Keun;Lee, Young-Gil
    • Proceedings of the KIEE Conference
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    • 2002.07c
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    • pp.1618-1620
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    • 2002
  • Transformation of molecular film occurs only usually in air-water interface, 2 dimensions domain's growth and crash are achieved. Organic matter thin film that accumulate molecular film in archaism board only that consist of growth of domain can understand correct special quality of accumulation film supplying information about fine structure and properties of matter of device observing information and so on that is surface forward player and optic enemy using AFM one of SPM application by nano electronics. The stable images are probably due to a strong interaction between the monolayer film and glass substrate. We are unable to obtain molecule resolution in images of the films but did see a marked contrast between images of the bare substrate and those with the network structure film deposited onto it. Formation that prevent when gas phase state and liquid phase state measure but Could know organic matter that molecules form equal and stable film when molecules were not distributed evenly, and accumulated in solid state only.

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Effect of Mulching Material and Planting Density on Growth and Bulb Development of Shallot (Allium cepa var. ascalonicum Backer) (멀칭재료와 재식밀도가 Shallot(Allium cepa var. ascalonicum Backer)의 생장과 구의 발육에 미치는 영향)

  • Cho, Yong-Cho;Lee, Jong-Tae;Park, Yoo-Gyeong;Jeong, Byoung-Ryong
    • Korean Journal of Plant Resources
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    • v.24 no.5
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    • pp.507-513
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    • 2011
  • This study was conducted to evaluate the effect of mulching material and planting density on growth and bulb development of shallot. The transparent PE film was better than black PE film as a mulching material for the overwintering shallot crop. Transparent PE film mulching promoted plant growth and increased marketable yield by 21% as compared with that of the black PE film-mulched crop. However, the bulb size was not significantly affected by the type of mulching film. The height and width of ridge and planting density significantly affected the growth and bulb yield of the moisture sensitive shallot. Bulb yield of the shallot planted in five rows in 120 cm wide ridges (20,833 plants per 10 a) was 1,332 kg per 10 a, which was 1.7 times as high as that by the crop grown in three rows in 120 cm wide ridges (12,500 plants per 10 a). In conclusion, the shallot crop is recommended to be cultivated in five rows in 120 cm ridges mulched with the transparent PE film.

The Study of Sputtered SiGe Thin Film Growth for Photo-detector Application (광검출기 응용을 위하여 스퍼터된 미세결정 SiGe 박막성장 연구)

  • Kim, Do-Young;Kim, Sun-Jo;Kim, Hyung-Jun;Han, Sang-Youn;Song, Jun-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.6
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    • pp.439-444
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    • 2012
  • For the application of photo-detector as active layer, we have studied how to deposit SiGe thin film using an independent Si target and Ge target, respectively. Both targets were synthesized by purity of 99.999%. Plasma generators were generated by radio frequency (rf, 13.56 MHz) and direct current (dc) power. When Ge and Si targets were sputtered by dc and rf power, respectively, we could observe the growth of highly crystalline Ge thin film at the temperature of $400^{\circ}C$ from the result of raman spectroscopy and X-ray diffraction method. However, SiGe thin film did not deposit above method. Inversely, we changed target position like that Ge and Si targets were sputtered by rf and dc power, respectively. Although Ge crystalline growth without Si target sputtering deteriorated considerably, the growth of SiGe thin film was observed with increase of Si dc power. SiGe thin film was evaluated as microcrystalline phase which included (111) and (220) plane by X-ray diffraction method.

Growth of 1 inch $LuVO_4$ single crystals by the edge-defined film-fed-growth (EFG) technique

  • Kochurikhin, V.V.;Klassen, A.V.;Kvyat, E.V.;Ivanov, M.A.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.15 no.6
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    • pp.222-224
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    • 2005
  • In suite of their superior optical and laser properties rare-earth orthovanadate single crystals have not been adopted yet into extensive industrial applications because of crystal growth difficulties. The edge-defined film-fed-growth (EFG) technique was applied successfully for the production of such crystals. At first time 1 inch $LuVO_4$ single crystals were grown by the EFG technique using newly developed die construction of high porous iridium with the application of automatic diameter control system.

Characteristic of Zr(Si)N film as a diffusion barrier between Cu metal and Si substrate (Cu 금속과 Si 기판 사이에서 확산방지막으로 사용하기 위한 Zr(Si)N 박막의 특성)

  • 김좌연;조병철;채상훈;김헌창;박경순
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.12 no.6
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    • pp.283-287
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    • 2002
  • We have studied Zr(Si)N film as a diffusion barrier between Cu metal and Si substrate for application of interconnection metal in ULSI circuits. Zr(Si)N film was deposited with reactive DC magnetron sputtering system using $Ar/N_2$mixed gas. The value of the resistivity was the lowest for the ZrN film using 29 : 1 of Ar : $N_2$reactant gas ratio at room temperature and decreased with increasing of Si substrate temperature. As the value of ZrN film resistivity was decreased, the direction of crystal growth was toward to (002) plane. The barrier property of ZrN film added with Si was improved. But Si was added too much in ZrN film, the barrier property was degraded. The adhesive property was improved with increasing of Si in ZrN. For the analysis of the film, XRD, Optical microscopy, Scretch tester, so on were used.

Titanium dioxide by spray deposition for buried contact silicon solar cells fabrication (전극함몰형 실리콘 태양전지의 제작시 스프레이 방법에 의한 타이타늄 옥사이드층의 적용에 관한 연구)

  • A.U. Ebong;S.H. Lee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.2
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    • pp.263-274
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    • 1996
  • Titanium dioxide ($TiO_{2}$) film has been widely used as anti-reflection coating for solar cells but not as masking oxide for metallisation and diffusion of impurities. In this paper we have investigated the properties of $TiO_{2}$ for possible incorporation into solar cell processing sequence. Thus the use of a spray deposition system to form the $TiO_{2}$ film and the characterisation of this film to ascertain its suitability to solar cell processing. The spray-on $TiO_{2}$ film was found to be resistant to all the chemicals used in conjunction with solar cell processing. The high temperature anealing (in oxygen ambient) of the spray-on $TiO_{2}$ film resulted in an increased refractive index, which indicated the growth of an underlying thin film of $SiO_{2}$ film for the passivation of silicon surface which would reduce the recombination activities of the fabricated device. Most importantly, the successful incorporation of the $TiO{2}$ film will lead to the reduction of the many high temperature processing steps of solar cell to only one.

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Effects of elastic strain on the agglomeration of silicide films for electrical contacts in integrated circuit applications

  • Choy, J.H.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.3
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    • pp.95-100
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    • 2004
  • This paper reports a potential problem in the electrical performance of the silicide film to silicon contacts with respect to the scaling trend in integrated circuit (IC) devices. The effects of elastic strain on the agglomeration of the coherent silicide film embedded in an infinite matrix are studied employing continuum linear elasticity and finite-difference numerical method. The interface atomic diffusion is taken to be the dominant transport mechanism where both capillarity and elastic strain are considered for the driving forces. Under plane strain condition with elastically homogeneous and anisotropic system with cubic symmetry, the dilatational misfit and the tetragonal misfit in the direction parallel to the film thickness are considered. The numerical results on the shape evolution agree with the known trend that the equilibrium aspect ratio of the film increases with the elastic strain intensity. When the elastic strain intensity is taken to be only a function of the film size, the flat film morphology with a large aspect ratio becomes increasingly unstable since the equilibrium aspect ratio decreases, as the film scales. The shape evolution results in a large decrease in contact to silicon area, and may deteriorate the electrical performances.

Effect of mechanical damage on the crystallization of amorphous silicon thin film (기계적 손상이 비정질 규소박막의 결정화에 미치는 영향)

  • 문권진;김영관;윤종규
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.299-306
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    • 1998
  • Crystallization of the amorphous silicon needs activation. Thermal energy through laser annealing, furnace annealing and rapid thermal process (RTP) has been convinced to crystallize the amorphous silicon thin film. It is expected that some other type of energy like mechanical energy can help to crystallize the amorphous silicon thin film. In this study, mechanical energy through wet blasting of silica slurry and silicon ion implantation has been applied to the amorphous silicon thin film deposited with LPCVD technique. RTP was employed for the annealing of this mechanically-damaged amorphous silicon thin film. For the characterization of the crystallized silicon thin film, XRD and Raman analysis were conducted. In this study, it is shown that the mechanical damage is effective to enhance the crystallization of amorphous silicon thin film.

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