• 제목/요약/키워드: field-emission scanning electron microscopy

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전계방출 전자원을 이용한 SEMAP(Scanning Electron Microscopy with Polarization Anlysis) 개발

  • 이상선;김원동;황찬용
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.581-581
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    • 2012
  • 나노스케일에서의 자구체(magnetic domain), 자화벽(magnetic domain wall)에 대한 연구가 활발하게 진행되고 있으며 특히 자화벽의 위치를 임의로 제어할 수 있는 기술을 응용한 메모리 소자에 대한 연구가 활발하다. 반면에 이러한 연구에 필수적인 자구체, 자화벽 이미징 장비는 매우 미비한 상황이다. 이와 같은 자성이미징(magnetic domain image), 자화벽(magnetic domain wall)을 연구하는데 있어 가장 핵심적인 장비가 SEMPA(Scanning Electron Microscopy with Polarization Analysis)이다. 일반적으로 SEM의 경우 고 에너지 빔의 전자 빔을 주사 시키고 이때 발생되는 이차 전자의 수를 2차원상의 영역에 따라 달라지는 비로 형상을 측정하게 된다. 이때 전자의 수 뿐만 아니라 이들의 spin polarization을 측정할 수 있다면 형상뿐 만 아니라 표면에서의 스핀 상태를 동시에 측정할 수 있게 된다. 기 개발된 W-filament source를 이용한 SEMPA는 field emission source에 비하여 전자빔의 세기가 약하며 이차 전자의 수도 적어 spin polarization 감도가 현저히 떨어진다. 또한 초고진공($1{\times}10^{-10}torr$)에서 사용할 수 없어 측정시료의 contamination을 방지할 수 없다. 이러한 문제점들을 보안하기 위하여 field emission source를 이용한 FE-SEMPA를 개발 중이며 2차전자의 spin polarization감도를 증가시키기 위하여 monte carlo simulation과 전산시늉등울 통해 스핀 검출기를 개발 및 연구결과를 발표하고자 한다.

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Preparation and Characterization of Crosslinked Sodium Alginate Membranes for the Dehydration of Organic Solvents

  • Goo, Hyung Seo;Kim, In Ho;Rhim, Ji Won;Golemme, Giovanni;Muzzalupo, Rita;Drioli, Enrico;Nam, SangYong
    • Korean Membrane Journal
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    • 제6권1호
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    • pp.55-60
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    • 2004
  • In recent years, an increasing interest in membrane technology has been observed in chemical and environmental industry. Membrane technology has advantages of low cost, energy saving and environmental clean technology comparing to conventional separation processes. Pervaporation is one of new advanced membrane technology applied for separation of azeotropic mixtures, aqueous organic mixtures, organic solvent and petrochemical mixtures. Sodium alginate composite membranes were prepared for the enhancement of long-term stability of pervaporation performance of water-ethanol mixture using pervaporation. Sodium alginate membranes were crosslinked with CaCl$_2$ and coated with polyelectrolyte chitosan to protect washing out of calcium ions from the polymer. The surface structures of PAN and hydrolysed PAN membrane were confirmed by ATR Fourier transform infrared (FT-IR). A field emission scanning electron microscopy (FE-SEM; Jeol 6340F) operated at 15 kV. Concentration profiles for Ca in the membrane surface and membrane cross-section were taken by an energy dispersive X-ray (EDX) analyser (Jeol) attached to the field emission scanning electron microscopy (Jeol 6340F). Pervaporation experiments were done with several operation run times to investigate long-term stability of the membranes.

Synthesis and Characterization of Al-Doped Zinc Oxide Films by an Radio Frequency Magnetron Sputtering Method for Transparent Electrode Applications

  • Seo, Jae-Keun;Ko, Ki-Han;Cho, Hyung-Jun;Choi, Won-Seok;Park, Mun-Gi;Seo, Kyung-Han;Park, Young;Lim, Dong-Gun
    • Transactions on Electrical and Electronic Materials
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    • 제11권1호
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    • pp.29-32
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    • 2010
  • In this study, transparent and conductive Al-doped zinc oxide (AZO) films were prepared on a glass substrate by an radio frequency (RF) magnetron sputtering method using a 150-nm-thick AZO target (Al: 2 wt.%) at room temperature. We investigated the effects of RF power between 100-350 W (in steps of 50 W) on the structural, electrical, and optical properties of the AZO films. The thickness and cross-sectional images of the films were observed by field emission scanning electron microscopy. The thicknesses of all films were kept constant at 150 nm and grown on a glass substrate. The grain sizes of the AZO films were determined with the X-ray diffraction by using the Scherrer' equation, and their electrical properties were investigated using a Hall effect electronic transport measurement system. The transmittance of the AZO films was also measured by an ultraviolet-visible spectrometer.

탄소나노튜브를 이용한 텅스텐 나노팁 전계방출기 제작 (Fabrication of a Nano-sized Conical-type Tungsten Field-emitter Based on Carbon Nanotubes)

  • 박창균;김종필;김영광;윤성준;김원;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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    • pp.90-91
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    • 2007
  • Nano-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst/buffer/W-tip by adopting various buffer layers, such as TiN, Al, Al/TiN, and Al/hi/TiN. This study focuses on elucidating how the buffer layers affect the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM) and high-resolution transmission electron microscopy(HRTEM) are used to monitor the nanostructures and surface morphologies of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for all the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the most excellent performances, such as maximum emission current of $202{\mu}A$, threshold field of 2.08V/${\mu}m$, and long-term (up to 24h) stability of emission current.

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탄소 나노튜브에 대한 비정질 질화막의 코팅 및 전계방출 특성 (Coating of amorphous nitrides on carbon nanotubes and field emission properties)

  • 노영록;김종필;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1244_1245
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    • 2009
  • Coating of amorphous nitride thin layers, such as boron nitride (BN) and carbon nitride (CN), has been performed on carbon nanotubes (CNTs) for the purpose of enhancing their electron-emission performances because those nitride films have relatively low work functions and commonly exhibit negative electron affinity behavior. The CNTs were directly grown on metal-tip (tungsten, approximately 500 nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). Sharpening of the tungsten tips were carried out by electrochemical etching. Morphologies and microstructures of BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM), energy dispersive x-ray (EDX) spectroscopy, and Raman spectroscopy. The electron-emission properties (such as maximum emission currents and turn-on fields) of the BN-coated and CN-coated CNT-emitters were characterized in terms of the thickness of BN and CN layers.

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Biological Applications of Helium Ion Microscopy

  • Kim, Ki Woo
    • Applied Microscopy
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    • 제43권1호
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    • pp.9-13
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    • 2013
  • The helium ion microscope (HIM) has recently emerged as a novel tool for imaging and analysis. Based on a bright ion source and small probe, the HIM offers advantages over the conventional field emission scanning electron microscope. The key features of the HIM include (1) high resolution (ca. 0.25 nm), (2) great surface sensitivity, (3) great contrast, (4) large depth-of-field, (5) efficient charge control, (6) reduced specimen damage, and (7) nanomachining capability. Due to the charge neutralization by flood electron beam, there is no need for conductive metal coating for the observation of insulating biological specimens by HIM. There is growing evidence that the HIM has substantial potential for high-resolution imaging of uncoated insulating biological specimens at the nanoscale.

멀티채널 방식에 의한 초미세 바늘 전극의 제작 및 빔 특성 (Manufacture of an Ultra-Sharp Tungsten Electrode for Field-Emission Electron Beam and Its Beam Characteristics)

  • 임연찬;현정우;김성수;박철우;이종항;강승언
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.508-512
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    • 2004
  • An ultra-sharp tungsten electrode for field emission was manufactured by using an electrochemical etching method, and its beam characteristics were investigated. KOH and NaOH were the electrolytes used in this research, and the taper length of the tip varied form 150 $\mu\textrm{m}$ to 250 $\mu\textrm{m}$ according to the applied voltage and the concentration of the electrolyte. The electron-beam stability was measured to be within 5% for a total emission current of 5 ${\mu}\textrm{A}$ during 4 hours of operation, and the Ignition voltages were found to be ∼300 V. The tip radius was experimentally found to be 250${\AA}$ from a linear fitting of Fowler-Nordheim plots, which was in remarkably good agreement with that of the image size from scanning ion-microscopy.

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후처리 조건에 따른 탄소나노튜브 특성의 변화 (Study of Carbon Nanotubes Properties by Post-treatment Conditions)

  • 최성헌;이재형;양종석;박대희;허정구
    • 한국전기전자재료학회논문지
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    • 제19권10호
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    • pp.930-934
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    • 2006
  • This paper reports a change of carbon nanotubes(CNTs) properties by post-treatment process after growth of CNTs. CNTs were treated by thermal method and solution method, and then investigated in detail using field emission scanning electron microscopy(FE-SEM), high resolution transmission scanning electron microscopy(HR-TEM), RAMAN spectroscopy, and Fourier Transform Infrared Spectrometer (FT-IR). FT-IR spectra showed that the amount of hydroxyl generated on surface of CNTs were changed with post-treatment condition. FE-SEM and TEM images were shown CNTs diameter and density variations were dependent with their treatment conditions. RAMAN spectroscopy was shown that carbon nanotubes structure vary with treatment conditions.

The Synthesis of Maghemite and Hematite Nanospheres

  • Dar, Mushtaq Ahmad;Ansari, Shafeeque G.;Wahab, Rizwan;Kim, Young-Soon;Shin, Hyung-Shik
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.472-473
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    • 2006
  • Maghemite and hematite nanospheres were synthesized by using the Sol-gel technique. The structural properties of these nanosphere powders were characterized by X-ray diffraction (XRD), transmission electron microscopy (TEM), field emission scanning electron microscopy (FESEM), and pore size distribution. Hematite phase shows crystalline structures. The mean particle size that resulted from BET and XRD analyses were 4.9 nm and 2 nm. It can be seen from transmission electron microscopy that the size of the particles are very small which is in good agreement with the FESEM and the X-ray diffraction. The BET and pore size method were employed for specific surface area determination.

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갈륨이 첨가된 산화아연막의 코팅에 따른 미세팁 구조 탄소나노튜브의 전계방출 특성 및 장시간 안정성 (Field-emission Properties and Long-term Stability of Tip-type Carbon Nanotubes Coated with Gallium-incorporated Zinc Oxide Films)

  • 김종필;노영록;조경철;이상렬;박진석
    • 반도체디스플레이기술학회지
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    • 제8권4호
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    • pp.65-69
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    • 2009
  • Carbon nanotubes (CNTs) were coated with undoped zinc oxide (ZnO) or 5 wt% gallium-incorporated ZnO (GZO) using various deposition conditions. The CNTs were directly grown on conical-type tungsten substrates at $700^{\circ}C$ using inductively coupled plasma-chemical vapor deposition. The pulsed laser deposition technique was used to deposit the ZnO and GZO thin films with very low stress. Field-emission scanning electron microscopy and high-resolution transmission electron microscopy were used to monitor the variations in the morphology and microstructure of CNTs prior to and after ZnO or GZO coating. The formation of ZnO and GZO films on CNTs was confirmed using energy-dispersive x-ray spectroscopy. In comparison to the as-grown (uncoated) CNT emitter, the CNT emitter that was coated with a thin (10 nm) GZO film showed remarkably improved field emission characteristics, such as the emission current of $325\;{\mu}A$ at 1 kV and the threshold field of $1.96\;V/{\mu}m$ at $0.1\;{\mu}A$, and it also exhibited the highly stable operation of emission current up to 40 h.

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