Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Manufacture of an Ultra-Sharp Tungsten Electrode for Field-Emission Electron Beam and Its Beam Characteristics

멀티채널 방식에 의한 초미세 바늘 전극의 제작 및 빔 특성

  • 임연찬 (광운대학교 전자물리학과) ;
  • 현정우 (광운대학교 전자물리학) ;
  • 김성수 (광운대학교 전자물리학) ;
  • 박철우 (한국산업기술대학교 기계공학) ;
  • 이종항 (한국산업기술대학교 기계공학) ;
  • 강승언 (광운대학교 전자물리학과)
  • Published : 2004.04.01
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Abstract

An ultra-sharp tungsten electrode for field emission was manufactured by using an electrochemical etching method, and its beam characteristics were investigated. KOH and NaOH were the electrolytes used in this research, and the taper length of the tip varied form 150 $\mu\textrm{m}$ to 250 $\mu\textrm{m}$ according to the applied voltage and the concentration of the electrolyte. The electron-beam stability was measured to be within 5% for a total emission current of 5 ${\mu}\textrm{A}$ during 4 hours of operation, and the Ignition voltages were found to be ∼300 V. The tip radius was experimentally found to be 250${\AA}$ from a linear fitting of Fowler-Nordheim plots, which was in remarkably good agreement with that of the image size from scanning ion-microscopy.

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