The Effect of Ar/O2 Partial Pressure Ratio on the Ferroelectric Properties of (Pb0.92La0.08)(Zr0.65Ti0.35)O3 Thin Films Deposited by RF Magnetron Sputtering Method (RF Magnetron Sputtering법으로 제작된 (Pb0.92La0.08)(Zr0.65Ti0.35)O3 박막의 Ar/O2 분압비에 따른 강유전 특성연구)
-
- Journal of the Korean Vacuum Society
- /
- v.18 no.2
- /
- pp.141-146
- /
- 2009