Browse > Article

Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$ thin layers  

Park, Kyung-Bong (School of Advanced Materials Engineering, Andong National University)
Kwon, Seung-Hyeop (School of Advanced Materials Engineering, Andong National University)
Kim, Tae-Huei (School of Advanced Materials Engineering, Andong National University)
Publication Information
Journal of the Korean Crystal Growth and Crystal Technology / v.19, no.2, 2009 , pp. 70-74 More about this Journal
Abstract
Effect of the processing variables on the formation of $Pb(Sc_{1/2}Nb_{1/2})O_3$(hereafter PSN) thin layers prepared on Pt(111)/Ti/$SiO_2$/Si substrates using the sol-gel and the spin coating method has been studied. After each deposition, the coated films were heated at $370^{\circ}C$ for 5 min. Then they were finally sintered at temperature range of $600{\sim}700^{\circ}C$ by RTA(rapid thermal annealing). The final multilayered films showed a (111) preferred orientation. On a while, the layer-by-layer crystallization of multilayered amorphous thin films without the intermediate heating exhibited a (100) preferred orientation. In case of heat treatment in the tube furnace with the heating rate of $4^{\circ}C/min$, (100) and (111) oriented thin layers were formed simultaneously. The microstructure of the deposited films were dense and crack-free with thickness of 300nm, irrespective of the processing variables.
Keywords
Ferroelectrics; thin films; $Pb(Sc_{1/2}Nb_{1/2})O_3$; Orientation; Perovskite;
Citations & Related Records
연도 인용수 순위
  • Reference
1 V. Chikarmane, C. Sudhama, J. Kim, J. Lee and A. Tasch, "Comparative study of the perovskite phase microstructure evolution and electrical properties of lead zirconate titanate thin-film capacitors annealed in oxygen and nitrogen ambients', Appl. Phys. Lett. 59(22) (1991) 2850   DOI
2 C.K. Kwak and S.B. Desu, "Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process", J. Mater. Res. 8 (1993) 339   DOI
3 S.Y. Chen and I.W. Chen, "Temperature-time texture transition of $Pb(Zr_{1-x}Ti_x)O_3$ thin films: I. Role of Pbrich intermediate phases", J. Am. Ceram. Soc. 77[9] (1994) 2332   DOI   ScienceOn
4 F. Chu, F. Xu, J. Shepard and S. Trolier-Mckinstry, "Thickness dependence of the electrical properties of sol-gel derived lead zirconate thin films with (III) and (100) texture", Mater. Res. Soc. Symp. Proc. 493 (1998) 409   ScienceOn
5 K. Uchino, "Electrostrictive actuators: materials and applications", J. Am. Ceram. Soc. Bull. 65 (1986) 647   ScienceOn
6 S.L. Swartz, T.R. Schrout, W.A. Schulze and L.E. Cross, "Dielectric properties of lead magnesium niobate ceramics", J. Am. Ceram. Soc. 67 (1984) 311   DOI   ScienceOn
7 Y. Liu and P.P. Phule, "Nucleation- or growth-controlled orientation development in chemically derived ferroelectric lead zirconate titanate $(Pb(Zr_xTi_{1-x})O_3$, X = 0.4 thin films", J. Am. Ceram. Soc. 79[2] (1996) 495   DOI
8 T. Hase, T. Sakuma, K. Amanuma, T. Mori, A. Ochi and Y. Miyasaka, Intergrated Ferroelectrics 8 (1995) 89   DOI   ScienceOn
9 G.A.C.M. Spierings, M.J.E. Ulenaers, G.L.M. Kampschoer, H.A.M. van Hal and P.K. Larsen, "Preparation and ferroelectric properties of $PbZr_{0.53}Ti_{0.47}O_3$ thin films by spin coating and metalorganic decomposition", J. Appl. Phys. 70(4) (1991) 2290   DOI
10 Alain C. Pierre, "Introduction to sol-gel processing" (1998)
11 S.Y. Chen and I.W. Chen, "Temperature-time texture transition of $Pb(Zr_{1-x}Ti_x)O_3$ thin films: II. Heat treatment and compositional effects", J. Am. Ceram. Soc. 77[9] (1994) 2337   DOI   ScienceOn
12 Y. Liu and P.P. Phule, "Sequence of phase formation in chemically derived ferroelectric lead zirconate titanate $Pb(Zr_{0.4}Ti_{0.6})O_3$ thin films", J. Am. Ceram. Soc. 80[9] (1997) 2410   DOI   ScienceOn
13 K.G. Brooks, I.M. Reaney, R. Kilissurska, Y. Huang, L. Bursill and N. Setter, "Orientation of rapid thermally annealed lead zirconate titanate thin films on (III) Pt substrates", J. Mater. Res. 9[10] (1994) 2540   DOI   ScienceOn
14 H.N. Al-shareef, K.R. Vellur, O. Auciello and A.I. Kingon, "Ferroelectrics", 152 (1994) 133
15 M.D. Carper and P.P. Phule, "Preparation of oriented $PbTiO_3$ thin films using a spin-on sol-gel process", Appl. Phys. Lett. 63(2) (1993) 12   DOI
16 J.C. Ho, K.S. Liu and I.N. Lin, "Synthesis of $Pb(Mg_{1/3}Nb_{2/3})O_3$ perovskite by an alkoxide method", J. Mater. Sci. 30 (1995) 3936   DOI   ScienceOn