• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.234-234
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• 2013

The counter electrodes in dye-sensitized solar cells (DSSCs) play roles in not only collecting electrons from external circuit but also reducing I3- to I- in electrolytes. Generally, conventional counter electrodes for DSSCs are prepared from the high temperature treatment of the H2PtCl6 precursor solution at $400^{\circ}C$ However, the more simplified fabrication process of counter electrodes is required for the commercialization of DSSCs. In this work, we developed novel fabrication process of counter electrodes using nano-second pulsed laser. DSSCs employing counter electrodes prepared by laser process showed conversion efficiency of 6.75% with short-circuit current of 12.73 mA/cm2, open-circuit voltage of 0.74 V and fill factor of 0.72. Closer investigating of photovoltaic properties will be reported.

• 한국시뮬레이션학회:학술대회논문집
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• 한국시뮬레이션학회 1998년도 추계학술대회 및 정기총회
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• pp.36-40
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• 1998

Tool shop of the‘D’Motor Co.(DMC) fabricates dies for producing automotive press panels. In order to increase the production capacity of the tool shop, DMC established an FMS that consists of high-speed machines and a CMM at the tool shop in 1997. Due to the difference in machine capability among the existing machines and the new FMS it is needed to find an optimal way of allocating workloads among machines to maximize the production. In a way to solve this, we model the die fabrication process of the tool shop and analyze its performance by computer simulation. In this study, we at first identify the bottleneck processes of the die fabrication process under the current operation policy. Then, we derive some alternative operating policies applicable to the tool shop, and analyze the optimal operation policy by comparing the performance of the tool shop following each alternative policy.

• 산업경영시스템학회지
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• 제26권3호
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• pp.67-73
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• 2003

Manufacturing technologies of compound semiconductor are similar to the process of memory device, but management technology of manufacturing process for compound semiconductor is not enough developed. Semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication t hat has monitoring of process, reduction of lead-time, obedience of due-dates and so on. This study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.304-309
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• 2004

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-fluidic systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need for additional assembly or bonding processes. Using the developed process, several examples were fabricated.

• Transactions on Electrical and Electronic Materials
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• 제15권2호
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• pp.91-95
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• 2014

This paper presents the structure and process technology of simple and low-cost wafer-level packaging (WLP) for thin film radio frequency (RF) devices. Low-cost practical micromachining processes were proposed as an alternative to high-cost processes, such as silicon deep reactive ion etching (DRIE) or electro-plating, in order to reduce the fabrication cost. Gold (Au)/Tin (Sn) alloy was utilized as the solder material for bonding and hermetic sealing. The small size fabricated WLP of $1.04{\times}1.04{\times}0.4mm^3$ had an average shear strength of 10.425 $kg/mm^2$, and the leakage rate of all chips was lower than $1.2{\times}10^{-5}$ atm.cc/sec. These results met Military Standards 883F (MIL-STD-883F). As the newly proposed WLP structure is simple, and its process technology is inexpensive, the fabricated WLP is a good candidate for thin film type RF devices.

• 한국기계가공학회지
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• 제18권12호
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• pp.59-66
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• 2019

In this study, we developed a novel laser sintering deposition system (LSDS) based on solid free-form fabrication (SFF) technology as it has the potential to fabricate complex geometries with controllable architecture for bone tissue engineering applications. The 3D biphasic calcium phosphate (BCP) scaffolds were fabricated with a pore size of 800㎛, a line width and height of 1000㎛, and an overall size of 8.2×8.2×8.0 mm3 according to the design of experiment (DOE) results. Additionally, an optimized manufacturing process using response surface analysis was established to fabricate 3D BCP scaffolds. The fabricated 3D BCP scaffolds were sintered at 950℃, 1050℃, 1150℃, and 1250℃ according to sintering processes with a furnace. As the sintering temperature increased, the porosity increased. Through the compressive strength test, the 3D BCP scaffolds sintered at 1050℃ presented good results of about 0.76 MPa. These results suggest that fabrication methods for 3D bioceramic scaffolds using LSDS may meet the basic requirements for bone tissue engineering.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.124-124
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• 2010

Currently, extreme ultraviolet lithography (EUVL) is being investigated for next generation lithography. EUVL is one of competitive lithographic technologies for sub-22nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance due to the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore, new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• 정보저장시스템학회논문집
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• 제2권3호
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• pp.163-168
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• 2006

Small form factor optical pickup (SFFOP) corresponding to BD specifications is strongly proposed for the next-generation portable storage device. In order to generate SFFOP, small sized optical pickup has been fabricated. We have developed a small sited optical pickup that is called the integrated optical pickup (IOP). The fabrication method of this system is mainly dependant on the use of the wafer based micro fabrication technology, which has been used in MEMS process such as photolithography, reactive ion etching, wafer bonding, and packaging process. This approach has the merits for mass production and high assembling accuracy. In this study, to generate the small sized optical pickup for high recording capacity, IOP corresponding to BD specifications has been designed and developed, including three main parts, 1) design, fabrication and evaluation of objective lens unit, 2) design and fabrication of IOP and 3) evaluation process of FES and TES.

• International Journal of Naval Architecture and Ocean Engineering
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• 제12권1호
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• pp.116-128
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• 2020

In the shipbuilding industry, three-dimensional (3D) templates play a key role in the completeness evaluation of shell plates with a large curvature in the shell-plate fabrication process. Currently, the information of 3D templates from a ship computer-aided design system is limited; thus, manufacturers depend on their experience to produce the templates manually. This results in the inaccuracy of templates in addition to increased production time. Therefore, if the pieces of the 3D templates can be produced automatically with accurate information, the lead time of the fabrication process can be reduced. In this study, we define a new type of template piece and develop methods for extending a boundary template and converting manufacturing information into numerical control machine input. In addition, based on the results of the study, we propose a production automation system for 3D template pieces. This system is expected to reduce the lead time of the fabrication process.

• Archives of Metallurgy and Materials
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• 제65권3호
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• pp.1035-1039
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• 2020

U-10wt.%Zr-5wt.%RE fuel slugs for a sodium-cooled fast reactor (SFR) were conventionally prepared by a modified injection casting method, which had the drawback of a low fabrication yield rate of approximately 60% because of the formation of many metallic fuel scraps, such as melt residue and unsuitable fuel slug butts. Moreover, the metallic fuel scraps were classified as a radioactive waste and stored in temporary storage without recycling. It is necessary to develop a recycling process technology for scrap wastes in order to reduce the radioactive wastes of the fuel scraps and improve the fabrication yield of the fuel slugs. In this study, the additive recycling process of the metallic fuel scraps was introduced to re-fabricate the U-10wt.%Zr-5wt.%RE fuel slugs. The U-10wt.%Zr-5wt.%RE fuel scraps were cleaned on the surface impurity layers with a mechanical treatment that used an electric brush under an Ar atmosphere. The U-10wt.%Zr-5wt.%RE fuel slugs were soundly re-fabricated and examined to evaluate the feasibility of the additive process compared with the metallic fuel slugs that used pure metals.