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A Design of Integrated Manufacturing System for Compound Semiconductor Fabrication  

이승우 (한국기계연구원 지능형정밀기계연구부)
박지훈 ((주)나리지온 부설연구소)
이화기 (인하대학교 산업공학과)
Publication Information
Journal of Korean Society of Industrial and Systems Engineering / v.26, no.3, 2003 , pp. 67-73 More about this Journal
Abstract
Manufacturing technologies of compound semiconductor are similar to the process of memory device, but management technology of manufacturing process for compound semiconductor is not enough developed. Semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study we design the integrated manufacturing system for compound semiconductor fabrication t hat has monitoring of process, reduction of lead-time, obedience of due-dates and so on. This study presents integrated manufacturing system having database system that based on web and data acquisition system. And we will implement them in the actual compound semiconductor fabrication.
Keywords
Compound semiconductor; Data Acquisition System; MES; Integrated Manufacturing System;
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