• 제목/요약/키워드: ex-situ

검색결과 242건 처리시간 0.024초

In-situ 법으로 제조한 $Al/TiC_p$ 복합재료의 열간가공성

  • 김수현;조영희;이정무;최승화
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.103.2-103.2
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    • 2012
  • 알루미늄기지 복합재료는 낮은 밀도, 높은 비강도, 우수한 강성을 가지고 있어서 수송기기용 경량소재로서 적용 가능하다. 강화재를 외부에서 주입하는 ex-situ 법에 비하여 화학반응에 의하여 강화상이 생성되는 in-situ 법은 기지와 강화상의 계면 특성이 우수하다. In-situ 주조법으로 제조한 알루미늄기지 복합재료는 여러 형태로 가공하기 위하여 압출, 열간압연 등의 공정을 거치게 되므로 열간가공성에 대한 이해가 필요하다. 이 연구에서는 고온압축시험을 이용하여 in-situ $Al/TiC_p$ 복합재료의 열간가공성을 평가하였다. 고온유동곡선으로부터 변형률속도민감도를 구하였으며 Dynamic Material Model을 이용하여 efficiency of power dissipation을 표현하는 공정지도를 작성하였다. 또한 변형 조건에 따른 미세조직 발달 거동을 조사하였으며 이로부터 각 변형 구간에 대한 변형기구를 도출하였다. 이로부터 알루미늄기지 복합재료의 열간가공성에 미치는 강화상의 영향을 고찰하였다.

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Surface Treatment of Ge Grown Epitaxially on Si by Ex-Situ Annealing for Optical Computing by Ge Technology

  • Chen, Xiaochi;Huo, Yijie;Cho, Seongjae;Park, Byung-Gook;Harris, James S. Jr.
    • IEIE Transactions on Smart Processing and Computing
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    • 제3권5호
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    • pp.331-337
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    • 2014
  • Ge is becoming an increasingly popular semiconductor material with high Si compatibility for on-chip optical interconnect technology. For a better manifestation of the meritorious material properties of Ge, its surface treatment should be performed satisfactorily before the electronic and photonic components are fabricated. Ex-situ rapid thermal annealing (RTA) processes with different gases were carried out to examine the effects of the annealing gases on the thin-film quality of Ge grown epitaxially on Si substrates. The Ge-on-Si samples were prepared in different structures using the same equipment, reduced-pressure chemical vapor deposition (RPCVD), and the samples annealed in $N_2$, forming gas (FG), and $O_2$ were compared with the unannealed (deposited and only cleaned) samples to confirm the improvements in Ge quality. To evaluate the thin-film quality, room-temperature photoluminescence (PL) measurements were performed. Among the compared samples, the $O_2$-annealed samples showed the strongest PL signals, regardless of the sample structures, which shows that ex-situ RTA in the $O_2$ environment would be an effective technique for the surface treatment of Ge in fabricating Ge devices for optical computing systems.

음향 실험 및 모델 기법을 이용한 도루묵 (Arctoscopus japonicus)의 음향산란반사강도 특성 (Target strength characteristics of sailfin sandfish (Arctoscopus japonicus) using ex situ experiment and acoustic model)

  • 이형빈;이경훈;윤은아;황강석;최정화;박태건
    • 수산해양기술연구
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    • 제51권3호
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    • pp.405-413
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    • 2015
  • Acoustic target strength (TS) measurement and theoretical acoustic scattering models were applied to estimate the TS for assessing the fish biomass. TS measurement was made of ex situ sailfin sandfish Arctoscopus japonicus at 70 and 120 kHz, and then compared to backscatter model prediction. The live sandfish was tethered in seawater using monofilament lines. Measurements were made versus incidence angle, $-50^{\circ}$ to $50^{\circ}$ relative to dorsal aspect directions. Distorted wave Born approximation (DWBA) model was used to calculated TS pattern. The TS values of sandfish (body length: 16.2 cm) at 70 and 120 kHz were -66.94 dB and -64.45 dB, respectively, and were about 20 dB lower than TS of other fishes in Korea waters. These TS levels were distributed within the range of the theoretical TS. Ex situ measurement and theoretical TS may be applied to improve acoustical detection and biomass estimation of the sandfish, and is necessary to measure with various lengths.

Utilizing Advanced Pad Conditioning and Pad Motion in WCMP

  • Kim, Sang-Yong;Chung, Hun-Sang;Park, Min-Woo;Kim, Chang-Il;Chang, Eui-Goo
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.171-175
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    • 2001
  • Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics and metal, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter level dielectrics and metal. Especially, defects like (micro-scratch) lead to severe circuit failure, and affects yield. Current conditioning method - bladder type, orbital pad motion - usually provides unsuitable pad profile during ex-situ conditioning near the end of pad life. Since much of the pad wear occurs by the mechanism of bladder tripe conditioning and its orbital motion without rotation, we need to implement new ex-situ conditioner which can prevent abnormal regional force on pad caused by bladder-type and also need to rotate the pad during conditioning. Another important study of ADPC is related to the orbital scratch of which source is assumed as diamond grit dropped from the strip during ex-situ conditioning. Scratch from diamond grit damaged wafer severely so usual1y scraped. Figure 1 shows the typical shape of scratch damaged from diamond. We suspected that intensive forces to the edge area of bladder type stripper accelerated the drop of Diamond grit during conditioning, so new designed Flat stripper was introduced.

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Ex-situ 스퍼터링법에 의한 $V_2O_5$ 전 고상 박막전지의 전기화학적 특성 (Electrochemical Characteristics of $V_2O_5$ based All Solid State Thin Film Microbattery by Ex-situ Sputtering Method)

  • 임영창;남상철;전은정;윤영수;조원일;조병원;전해수;윤경석
    • 전기화학회지
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    • 제3권1호
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    • pp.44-48
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    • 2000
  • 상온에서 DC-magnetron sputtering으로 증착한 비정질의 $V_2O_5$ 박막을 양극물질로 하여 $V_2O_5/LIPON/Li$으로 구성된 박막형 리튬이차전지를 제작하였다. $V_2O_5$의 양극특성은 액체전해질을 이용한 half cell 구조에서 평가하였으며, $Ar/O_2$ 분압비의 변화에 따라 제작된 $V_2O_5$ 양극은 분압비 80/20에서 가장 좋은 특성을 보였다. 자체 제작한 $Li_3PO_4$ 타겟을 사용하여 RF-sputtering으로 순수한 질소 분위기 하에서 양극 위에 고체전해질 LIPON 박막을 형성하였으며, 1.2-4.0V vs. Li 구간에서 리튬에 대해 반응성이 없는 안정한 화합물임을 확인하였다. 음극으로 쓰인 약 $2{\mu}m$두께의 금속리튬박막은 진공 열 증착법으로 제조하였으며, $V_2O_5/LIPON/Li$의 박막형 리튬이차전지는 $1.2\~3.5V$ 구간에서 초기에 약 $150{\mu}A/cm^2{\mu}m$의 높은 방전용량을 나타내었다.

Kerosene으로 오염된 토양의 과수를 이용한 처리에 관한 연구 (A Study on the Treatment of Kerosene-Contaminated Soils Using Hydrogen Peroxide)

  • 최진호;김상대;공성호
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 1997년도 총회 및 춘계 학술발표회 논문집
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    • pp.53-56
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    • 1997
  • 오염된 토양의 복원기술 개발의 일환으로 폐수의 처리 등에 많이 이용되어온 Fenton-like oxidation을 petroleum으로 오염된 토양의 in-situ/ex-situ remediation을 위한 data 축적을 위해 실험실상에서 적용하여 보았다. 천연 토양속에 흔히 존재하는 철광석의 한 형태인 magnetite, goethite를 이용해 Fenton-like oxidation을 유도하여 silica sand에 오염된 kerosene의 분해를 잔존 TPH의 분석을 통하여 확인하였다. 초기 kerosene의 농도, 과수의 농도, 철광석의 양을 변수로 하여 최적 처리조건을 구하기 위한 실험을 진행하였다.

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Effect of Brush Treatment and Brush Contact Sequence on Cross Contaminated Defects during CMP in-situ Cleaning

  • Kim, Hong Jin
    • Tribology and Lubricants
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    • 제31권6호
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    • pp.239-244
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    • 2015
  • Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

Effect of Harvesting Time and Storage Duration of Viscum album Seeds on in vitro and ex vitro Germination on the Branch of Prunus mume

  • Lee, Hyun Woo;Ghimeray, Amal Kumar;Lee, Bo-Duk;Sharma, Pankaja;Shim, Ie Sung;Park, Cheol Ho
    • 한국자원식물학회지
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    • 제27권3호
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    • pp.256-262
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    • 2014
  • Viscum album var. coloratum (mistletoe) is considered as one of the endangered plant species in Korea. Our objective is to restore its population and multiplication of plant by ex situ method. In this research we explored the maximum germination (in vitro) of freshly harvested and stored seeds of mistletoe collected in different time intervals. Ex vitro germination after artificial inoculation on the branches of Prunus mume in different physiological conditions was also monitored. The research revealed that the lately harvested seeds (Feb. and March 2014) were superior over early harvested seeds (Nov. 2013 and Jan. 2014) of mistletoe due to the higher percentage of germination (above 93%). According to the data, it is also revealed that the survival and germination rate of mistletoe seeds decreased with the increase in storage duration. In ex vitro germination, the fluctuated temperature of a glass house in natural condition enhanced (four fold) the rate of germination on the branches of Prunus mume than the constant temperature condition in the glass house.

용출 현상 기반 나노촉매의 개발 및 응용 (Development and application of ex-solution nanocatalyst)

  • 김준혁;김준규;정우철
    • 세라미스트
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    • 제23권2호
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    • pp.200-210
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    • 2020
  • Supported catalysts are at the heart of manufacturing essential chemical, agricultural and pharmaceutical products. While the longevity of such systems is critically hinged on the durability of metal nanoparticles, the conventional deposition/dispersion techniques are difficult to enhance the stability of the metal nanoparticles due to the lack of control over the interaction between metal-support. Regarding this matter, ex-solution has begun to be recognized as one of the most promising methodologies to develop thermally and chemically robust nanoparticles. By dissolving desired catalysts as a cation form into a parent oxide, fine and uniformly distributed metal nano-catalysts can be subsequently grown in situ under reductive heat treatment, which is referred to ex-solution. Over the several years, ex-solved analog has resulted in tremendous progress in the chemical-electrochemical applications due to the exceptional robustness coupled with ease synthesis. Herein, we describe the ex-solution process in detail which therein introducing the unique characteristics of ex-solved particles that distinguish them from conventionally dispersed nanoparticles. We then go through the history of science regarding the ex-solution phenomena and summarize several major research achievements which embrace the ex-solved nanoparticles to markedly promote the catalytic performances. In conclusion, we address the remaining challenges and the future perspectives of this rapidly growing field.

비정질 기지 복합재 코팅층의 미세조직 분석 및 기계적 거동 (Analysis and Mechanical Behavior of Coating Layer in Metallic Glass Matrix Composite)

  • 장범택;이승훈
    • 대한기계학회논문집A
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    • 제38권6호
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    • pp.629-636
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    • 2014
  • 비정질합금이 가지고 있는 우수한 기계적 성질과 화학적 특성을 부품소재에 표면개질을 목적으로 고속화염 용사법으로 대면적 코팅층을 형성하였고 내열성이 높은 자융성합금과 초경합금 성분들을 적절히 혼합하여 비정질기지 복합재료를 제조하여 코팅들의 미세조직 관찰과 나노인덴테이션을 이용한 미세표면의 기계적 거동을 분석하였다. 각 코팅층의 미세조직을 관찰한 결과, 단일상 비정질 코팅에는 미용융 입자와 lamellae 영역이 존재하고 자융성합금이 고용된 복합재에는 in-situ $Cr_2Ni_3$ 석출물, 자융성합금과 초경합금성분이 함께 혼합된 코팅층은 석출물과 ex-situ WC 강화입자가 공존하였다. 이들 미세표면의 기계적 거동은 제 2 상이 고용된 비정질 기지 복합재의 코팅층의 기계적 특성이 전체적으로 향상되었다.