• Title/Summary/Keyword: etch

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Growth of ring-shaped SiC single crystal via physical vapor transport method (PVT 방법에 의한 링 모양의 SiC 단결정 성장)

  • Kim, Woo-Yeon;Je, Tae-Wan;Na, Jun-Hyuck;Choi, Su-Min;Lee, Ha-Lin;Jang, Hui-Yeon;Park, Mi-Seon;Jang, Yeon-Suk;Jung, Eun-Jin;Kang, Jin-Ki;Lee, Won-Jae
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.1
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    • pp.1-6
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    • 2022
  • In this research, a ring-shaped silicon carbide (SiC) single crystal manufactured using the PVT (Physical Vapor Transport) method was proposed to be applied to a SiC focus ring in semiconductor etching equipment. A cylindrical graphite structure was placed inside the graphite crucible to grow a ring-shaped SiC single crystal by the PVT method. SiC single crystal ring without crack was successfully obtained in case of using SiC single crystal wafer as a seed. A plasma etching process was performed to compare plasma resistance between the CVD-SiC focus ring and the PVT-SiC focus ring. The etch rate of ring materials in PVT-single crystal SiC focus ring was definitely lower than that of CVD-SiC focus ring, indicating better plasma resistance of PVT-SiC focus ring.

Continuous Process for the Etching, Rinsing and Drying of MEMS Using Supercritical Carbon Dioxide (초임계 이산화탄소를 이용한 미세전자기계시스템의 식각, 세정, 건조 연속 공정)

  • Min, Seon Ki;Han, Gap Su;You, Seong-sik
    • Korean Chemical Engineering Research
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    • v.53 no.5
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    • pp.557-564
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    • 2015
  • The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-$CO_2$ (supercritical-$CO_2$) consists of two steps. Firstly, MEMS-wafers are etched by organic solvent in a separate etching equipment from the high pressure dryer and then moved to the high pressure dryer to rinse and dry them using SC-$CO_2$. We found that the previous two step process could be applied to etch and dry wafers for MEMS but could not confirm the reproducibility through several experiments. We thought the cause of that was the stiction of structures occurring due to vaporization of the etching solvent during moving MEMS wafer to high pressure dryer after etching it outside. In order to improve the structure stiction problem, we designed a continuous process for etching, rinsing and drying MEMS-wafers using SC-$CO_2$ without moving them. And we also wanted to know relations of states of carbon dioxide (gas, liquid, supercritical fluid) to the structure stiction problem. In the case of using gas carbon dioxide (3 MPa, $25^{\circ}C$) as an etching solvent, we could obtain well-treated MEMS-wafers without stiction and confirm the reproducibility of experimental results. The quantity of rinsing solvent used could be also reduced compared with the previous technology. In the case of using liquid carbon dioxide (3 MPa, $5^{\circ}C$, we could not obtain well-treated MEMS-wafers without stiction due to the phase separation of between liquid carbon dioxide and etching co-solvent(acetone). In the case of using SC-$CO_2$ (7.5 Mpa, $40^{\circ}C$), we had as good results as those of the case using gas-$CO_2$. Besides the processing time was shortened compared with that of the case of using gas-$CO_2$.

The nanoleakage patterns of experimental hydrophobic adhesives after load cycling (Load cycling에 따른 소수성 실험용 상아질 접착제의 nanoleakage 양상)

  • Sohn, Suh-Jin;Chang, Ju-Hae;Kang, Suk-Ho;Yoo, Hyun-Mi;Cho, Byeong-Hoon;Son, Ho-Hyun
    • Restorative Dentistry and Endodontics
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    • v.33 no.1
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    • pp.9-19
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    • 2008
  • The purpose of this study was: (1) to compare nanoleakage patterns of a conventional 3-step etch and rinse adhesive system and two experimental hydrophobic adhesive systems and (2) to investigate the change of the nanoleakage patterns after load cycling. Two kinds of hydrophobic experimental adhesives, ethanol containing adhesive (EA) and methanol containing adhesive (MA), were prepared. Thirty extracted human molars were embedded in resin blocks and occlusal thirds of the crowns were removed. The polished dentin surfaces were etched with a 35 % phosphoric acid etching gel and rinsed with water. Scotchbond Multi-Purpose (MP), EA and MA were used for bonding procedure. Z-250 composite resin was built-up on the adhesive-treated surfaces. Five teeth of each dentin adhesive group were subjected to mechanical load cycling. The teeth were sectioned into 2 mm thick slabs and then stained with 50 % ammoniacal silver nitrate. Ten specimens for each group were examined under scanning electron microscope in backscattering electron mode. All photographs were analyzed using image analysis software. Three regions of each specimen were used for evaluation of the silver uptake within the hybrid layer. The area of silver deposition was calculated and expressed in gray value. Data were statistically analyzed by two-way ANOVA and post-hoc testing of multiple comparisons was done with the Scheffe's test. Silver particles were observed in all the groups. However, silver particles were more sparsely distributed in the EA group and the MA group than in the MP group (p < .0001). There were no changes in nanoleakage patterns after load cycling.

HISTOLOGIC FEATURE AND INFILTRATION OF ADHESIVE RESIN ACCORDING TO PRETREATMENT ON PROXIMAL EARLY CARIES LESION (평활면 초기 우식병소의 표면처리에 따른 조직상 및 접착제의 침투 양상 비교)

  • Kim, In-Young;Jeong, Tae-Sung;Kim, Shin
    • Journal of the korean academy of Pediatric Dentistry
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    • v.36 no.1
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    • pp.30-37
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    • 2009
  • Early enamel caries is commonly remineralized by the patient‘s improved oral hygiene or fluoridation, however the result is clinically unreliable. As an alternative, we tried to seal the lesions with low-viscosity light-curing resin. The aim of the present study was to search the proper methods of the adequate pretreatment prior to applying adhesive resin on natural proximal caries lesions. Thirty nine extracted deciduous molar teeth showing proximal early caries lesion were used for this study. They were divided into 5 groups : Group 1; only carefully cleaned with water, group 2; etched with 15% HCl for 15s, group 3; etched with 35% phosphoric acid for 15s, group 4; etched with 35% phosphoric acid for 30s, and group 5; cleaned with 0.5% NaOCl. Following results were obtained by evaluating with SEM and CLSM after applied with adhesive resin. 1. As a result of SEM evaluation, group 2 showed clearly removed surface layer, group 3,4 showed partially removed surface layer irregularly, group 5 showed slightly removed surface layer. 2. Group 2 showed the deepest infiltration depth, followed by group 4, group 3, group 5, group 1 and besides group 5, other groups showed significantly deep infiltration depth. (p < 0.01) In conclusion, the best methods of the adequate pretreatment on natural proximal caries lesion for deep infiltration of adhesive resin was to etch with 15% HCl for 15s.

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Influence of Sodium Hypochorite & EDTA on the Microtensile Bond Strength of Ethanol Wet Bonding (Ethanol Wet Bonding에서 NaOCl과 EDTA가 결합강도에 미치는 영향)

  • Kim, Deok-Joong;Song, Yong-Beom;Park, Sang-Hee;Kim, Hyoung-Sun;Lee, Hye-Yoon;Yu, Mi-Kyung;Lee, Kwang-Won
    • Journal of Dental Rehabilitation and Applied Science
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    • v.29 no.1
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    • pp.37-44
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    • 2013
  • Sodium hypochlorite and ethylene diamine tetra acetic acid are substances usually used during endodontic treatment. Several studies found that the bonding was negated with certain irrigants and some of the used irrigants have demineralizing and chealating effects, so it was advocated to omit the etching step in etch and rinse adhesive systems. The purpose of this in vitro study was to evaluate the influence of NaOCl & EDTA on the bonding strength of ethanol wet bonding. Thirty human molars were selected and mesiodistally sectioned into halves, thus providing sixty specimens. The specimens were randomly assigned to 4 groups(n=15) according to the irrigant regimen used : (1) irrigated with distilled water for 10min (control); (2) irrigated with 5.25% NaOCl(10min), flushed with 5.25% NaOCl(1min) (3) irrigated with 5.25% NaOCl, flushed with 17% EDTA (4) irrigated with 5.25% NaOCl, flushed with 17% EDTA. Each group was acid-etched with 37% phosphoric acid(except group 4) and had their dentin surfaces dehydrated with ethanol solutions : 50%, 70%, 80%, 95%, 3x100%, 30s for each application. After dehydration, a primer( 50% all bond 3 resin + 50% ethanol) was used, followed by the adhesive(ALL-BOND 3 RESIN) application. Resin composite build-ups were then prepared using an incremental technique. Specimens were sectioned into beams and submitted to a tensile load using a Micro Tensile Tester(Bisco Inc.). The data were statistically analyzed using one-way ANOVA and Tukey HSD at p<0.5 level. There was no significant difference on G1(control) and G2(irrigated with NaOCl only ). (p>0.05). G3(flushed with EDTA) showed significantly high tensile bonding strength compared to the G2 (p<0.05). G4( treated with EDTA but no acid-etching) was significantly lower value than G3. (p<0.05) Although there was no significant difference, 5.25% NaOCl seemed to have an adverse effect on the bonding strength of ethanol wet bonding. The flushing with EDTA after NaOCl irrigation prevents the decrease of bonding strength. The use of 17% EDTA as a final flush can enhance the bonding strength but EDTA flushing can't substitute for a acid-etching.

Influence of application methods of one-step self-etching adhesives on microtensile bond strength (한 단계 자가 산부식 접착제의 적용 방식이 미세인장 결합강도에 미치는 효과)

  • Choi, Chul-Kyu;Son, Sung-Ae;Ha, Jin-Hee;Hur, Bock;Kim, Hyeon-Cheol;Kwon, Yong-Hun;Park, Jeong-Kil
    • Restorative Dentistry and Endodontics
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    • v.36 no.3
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    • pp.203-210
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    • 2011
  • Objectives: The purpose of this study was to evaluate the effect of various application methods of one-step self-etch adhesives to microtensile resin-dentin bond strength. Materials and Methods: Thirty-six extracted human molars were used. The teeth were assigned randomly to twelve groups (n = 15), according to the three different adhesive systems (Clearfil Tri-S Bond, Adper Prompt L-Pop, G-Bond) and application methods. The adhesive systems were applied on the dentin as follows: 1) The single coating, 2) The double coating, 3) Manual agitation, 4) Ultrasonic agitation. Following the adhesive application, light-cure composite resin was constructed. The restored teeth were stored in distilled water at room temperature for 24 hours, and prepared 15 specimens per groups. Then microtensile bond strength was measured and the failure mode was examined. Results: Manual agitation and ultrasonic agitation of adhesive significantly increased the microtensile bond strength than single coating and double coating did. Double coating of adhesive significantly increased the microtensile bond strength than single coating did and there was no significant difference between the manual agitation and ultrasonic agitation group. There was significant difference in microtensile bonding strength among all adhesives and Clearfil Tri-S Bond showed the highest bond strength. Conclusions: In one-step self-etching adhesives, there was significant difference according to application methods and type of adhesives. No matter of the material, the manual or ultrasonic agitation of the adhesive showed significantly higher microtensile bond strength.

A Study of Coloration of Topaz(I): Mineralogical and Chemical Study on the Topaz Selected from Some Localities of the World (토파즈의 人工着色 處理를 위한 硏究(I) : 世界 主要 産地別 토파즈의 鑛物學的 및 化學的 特性)

  • Han, Yi-Kyeong;Park, Maeng-Eon;Jang, Yong-Nam
    • Journal of the Mineralogical Society of Korea
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    • v.5 no.2
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    • pp.109-121
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    • 1992
  • For the purpose of mineralogical and chemical study on the topazes from various localities of world(Brzail, China, India, Nigeria and Sri Lanka), electron microprobe analysis(EPMA), neutron activation analysis(NAA), X-ray diffractometry, Raman spectroscopy, etch test, scanning electron microscopy, refractive index, specific gravity, fluid inclusion were performed. The chemical composition in topaz was discussed along with its physical and structural properties. Variations in the unit-cell dimension and physical properties of topaz were found to have a close relations in the unit-cell dimension and physical properties of topaz were found to have a close relationship with extent of substitution of $OH^-\;for\;F^-$. According to neutron activation analyses, the trace elements had no effects on the physical properties of topaz. Raman spectra showed that the peaks of topaz were different in intensity from one locality to another. Etching defects in topaz includes negative crystal defect o point-bottom pit(India, Nigeria) and net work defect of curl-bottom pit(Brazil, China). Fluid inclusions in topaz may be classiffied into liquid $CO_2$-bearing inclusion, gaseous inclusion, halite, sylvite-bearing inclusion and liquid inclusion. The results of this study can be useful to devising artificial coloring methods for topaz with different mineralogical compositions.

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The characteristic of InGaN/GaN MQW LED by different diameter in selective area growth method (선택성장영역 크기에 따른 InGaN/GaN 다중양자우물 청색 MOCVD-발광다이오드 소자의 특성)

  • Bae, Seon-Min;Jeon, Hun-Soo;Lee, Gang-Seok;Jung, Se-Gyo;Yoon, Wi-Il;Kim, Kyoung-Hwa;Yang, Min;Yi, Sam-Nyung;Ahn, Hyung-Soo;Kim, Suck-Whan;Yu, Young-Moon;Ha, Hong-Ju
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.1
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    • pp.5-10
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    • 2012
  • In general, the fabrications of the LEDs with mesa structure are performed grown by MOCVD method. In order to etch and separate each chips, the LEDs are passed the RIE and scribing processes. The RIE process using plasma dry etching occur some problems such as defects, dislocations and the formation of dangling bond in surface result in decline of device characteristic. The SAG method has attracted considerable interest for the growth of high quality GaN epi layer on the sapphire substrate. In this paper, the SAG method was introduced for simplification and fabrication of the high quality epi layer. And we report that the size of selective area do not affect the characteristics of original LED. The diameter of SAG circle patterns were choose as 2500, 1000, 350, and 200 ${\mu}m$. The SAG-LEDs were measured to obtain the device characteristics using by SEM, EL and I-V. The main emission peaks of 2500, 1000, 350, and 200 ${\mu}m$ were 485, 480, 450, and 445 nm respectively. The chips of 350, 200 ${\mu}m$ diameter were observed non-uniform surface and resistance was higher than original LED, however, the chips of 2500, 1000 ${\mu}m$ diameter had uniform surface and current-voltage characteristics were better than small sizes. Therefore, we suggest that the suitable diameter which do not affect the characteristic of original LED is more than 1000 ${\mu}m$.

REMINERALIZATION EFFECT OF FUJI VII GLASS IONOMER CEMENT (Fuji VII 글래스 아이오노머 시멘트의 재광화 효과)

  • Kim, Young-Jin;Lee, Ju-Hyun;Seo, Hyun-Woo;Park, Ho-Won
    • Journal of the korean academy of Pediatric Dentistry
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    • v.33 no.4
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    • pp.653-660
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    • 2006
  • Fuji VII is a glass-ionomer cement specially targeted for early protection in erupting first and second molars. Properties of Fuji VII such as very high level of fluoride release, low viscosity and no need to preliminarily etch the substrate would be useful to erupting molars with primary pit and fissure caries or hypoplastic area for preventive goal or remineralization. The purpose of this study were to evaluate remineralization of Fuji VII glass ionomer cement and to compare with one of other restorative materials such as conventional glass ionomer cement, resin-modified glass ionomer cement, compomer and composite resin. Forty-two extracted human molars were used for this study. All teeth were immersed in demineralizing solution for 48 hours after Class V cavity preparation was made on sound proximal surface. The teeth were randomly divided into six groups and restored with Fuji VII, Fuji II, Fuji II LC improved, F2000, $Filtek^{TM}$ Z250 and control group was unrestored. The middle area with $130{\pm}20{\mu}m$ thickness was separated from specimen using microtome and demineralized area was photographed under polarized microscope. Separated area was relocated to specimen and stored in artificial saliva, After four weeks, changes of demineralized area were observed and compared to them restorated immediately. The results from the this study can be summarized as follows ; 1. Fuji VII, Fuji II, Fuji II LC improved have more prominent remineralization effect than F2000, $Filtek^{TM}$ Z250, control group. 2. No significant differences in remineralization effect are seen between Fuji VII and Fuji II, Fuji II LC improved.

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THE EFFECT OF ETCHING TIME ON THE PATTERN OF ACID ETCHING ON THE ENAMEL OF PRIMARY TEETH (산부식 시간에 따른 유전치 법랑질의 부식 유형에 관한 연구)

  • Choi, Su-Mi;Choi, Young-Chul;Park, Jae-Hong;Choi, Sung-Chul
    • Journal of the korean academy of Pediatric Dentistry
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    • v.35 no.3
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    • pp.437-445
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    • 2008
  • The presence of a "prismless" layer on the enamel surface particularly on deciduous teeth has been reported by a number of workers. This structure, which appears to lack the normal prism delineations, could interfere with tag formation and hence, reduce bonding to such surfaces. The purpose of this study was to investigate the relationship of etching times on the effect of acid etching on primary enamel with respect to the quality of etching patterns. Labial surfaces of 32 extracted or exfoliated caries-free primary anterior teeth were used. 35% phosphoric acid gel was used only cervical regions of labial surfaces for each etching time group, 15, 30, 45 and 60 seconds. The surfaces were then washed with water for 20 seconds and dried with air spray for 20 seconds. 1. The Type 3 is 75% when the 15 seconds acid etching time was used. 2. The Type 1 is 38% and Type 2 is 75% when the 30 and 45 seconds acid etching time was used. 3. The Type 1 is 25% and Type 2 is 75% when the 60 seconds acid etching time was used. 4. An etching time of 60 seconds produced a constant and regular etching pattern. 5. There is a significant difference between the groups with respect to the patterns of etch achieved(p<0.05). 6. We confirmed that the acid induced patterns(type 1, 2) became more pronounced when the application time increased(p<0.05). $45{\sim}60$ seconds was the optimal time for etching on the primary enamel.

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