• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 A
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• pp.141-143
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• 1994

In this paper, an electrostatic micro-actuator is fabricated using flat p+ diaphragm. To avoid the buckling of the flat p+ diaphragm, the processes are designed appropriately. The fabrication processes of the actuator are the anisotropic etching with EPW, the boron diffusion process, Al deposition and the silicon to glass bonding using the negative photoresist. The distance between the p+ and Al electrodes is $10{\mu}m$, and the thickness of the p+ diaphragm is $2{\mu}m$. The measurement of the characteristic of the actuator is performed at 50V. The center displacement of the diaphragm is $1.5{\mu}m$ at 10Hz. In comparison with the experimental data of the actuator with corrugated diaphragm, it is confirmed that the actuator with flat diaphragm is more effective than that with corrugated one in the small deflection region.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.373-378
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• 2004

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55％, that is very large compared with conventional ones having a few percentage.

• 한국공작기계학회논문집
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• 제15권3호
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• pp.82-90
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probe-based Storage Device). However, all of the components(platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficienceis, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having large area platform. for obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design procedure, structural and modal analyses using FEM(Finite Element Method). The areal efficiency of the MEMS stage was designed to be about 25%, which is very large compared with the conventional ones having a few percentage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.711-715
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• 1996

This paper describes an automated computer-aided engineering (CAE) system for micromachines whose size range 10 to 10$^3$${\mu}{\textrm}{m}$. An automatic finite element mesh generation technique, which is based on the fuzzy knowledge processing and computational geometry techniques, is incorporated into the system, together with one of commercial finite clement (FE) analysis codes, MARC, and one of commercial solid modelers, Designbase. The system allows a geometry model of concern to be a automatically converted to different FE models, depending on physical phenomena to be analyzed, i.e. electrostatic analysis, stress analysis, modal analysis and so on. The FE analysis models are then exported to the FE analysis code, and then analyses are performed. This system is successfully applied to an electrostatic micro actuator.

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• 문화기술의 융합
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• 제7권1호
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• pp.662-667
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• 2021

진동 햅틱 피드백은 최신 터치 디스플레이의 주요한 기능으로, 화면의 인터페이스와 상호 작용할 때 사용자의 조작성 및 몰입감을 크게 향상시킨다. 본 연구에선 정전기력 기반의 메커니즘을 적용하여 강한 진동 출력을 생성할 수 있으면서도, 얇은 평판 타입으로 제작이 가능하여 중대형 디스플레이의 뒷면에 탑재하기에 적합한 진동 햅틱 액추에이터를 제안하고자 한다. 제안된 액추에이터는 방사형 판스프링에 매달려 전기적으로 접지된 Mass를 이격 되어 있는 상하의 전극에 의해 정전기력으로 상하로 교번하여 진동력을 증폭시킬 수 있는 구조로 개발되었다. 성능평가 결과, 개발된 액추에이터가 2개 내장된 Bar-Type 모듈에서 170 Hz에서 최대 3.3g의 우수한 진동 출력을 보여, 중대형 터치 디스플레이에서 햅틱 피드백 제공에 대한 가능성이 확인되었다.

• 융복합기술연구소 논문집
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• 제1권2호
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• pp.16-24
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• 2011

The angular electrostatic microactuator using skewed electrode array (SEA) scheme was proposed. The moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, electrostatic FE analysis were carried out and the empirical force model was established for SEA. Simulation was performed to make the comparison between conventional actuators and SEA. The proposed SEA generates actuating torque 2 times greater than a comb-drive and stable actuator displacement 40% greater than a parallel plate type actuator. The angular electrostatic microactuator using skewed SEA scheme was designed and fabricated using SoG process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1982-1984
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• 2002

The admittance of one-port electrostatic actuator are modeled using the steady-state sinusoidal response. Also the admittance of the differential type actuator is derived taking the practical conditions into consideration, although it has no admittance in ideal case. It is a function of biasing error, driving error, and capacitive mismatch including parasitic capacitors. The validity of the admittance model is proved by comparing between the modeled and measured admittances. The distortion in the frequency response curve measured by a capacitive sensor is analyzed and it is concluded that the admittance is the main cause of this distortion.

• 한국정밀공학회지
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• 제22권1호
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• pp.115-121
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• 2005

Micromachines are extremely novel artifacts with a variety of special characteristics. Utilizing their tiny dimensions ranging roughly from 10 to $10^3$ micro-meters, the micromachines can perform tasks in a revolutionary manner that would be impossible for conventional artifacts. Micromachines are in general related to various coupled physical phenomena. They are required to be evaluated and designed considering the coupled phenomena. This paper describes finite element analysis (FEA) simulation of practical behaviors for the micro actuator. Especially, electric field modeling in micro actuators has been generally restricted to in-plane two-dimensional finite element analysis because of the complexity of the micro actuator geometry. However, in this paper, the actual three-dimensional geometry of the micro actuator is considered. The starting torque obtained from the in-plane two-dimensional analytical solutions were compared with that of the actual three-dimensional FE analysis results. The starting torque is proportional to $V^2$, and that the two-dimensional analytical solutions are larger than the three- dimensional FE ones. It is found that the evaluation of micro actuator has to be considered electrical leakage phenomenon.

• 한국정밀공학회지
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• 제23권9호
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• pp.179-189
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• 2006

Recently the electrostatic 2-axis MEMS stages have been fabricated f3r the purpose of an application to PSD (Probe-based Storage Device). However, all of the components (platform, comb electrodes, springs, anchors, etc.) in those stages are placed in-plane so that they have low areal efficiencies such as a few percentage, which is undesirable as data storage devices. In this paper, we present a novel structure of an electrostatic 2-axis MEMS stage that is characterized by having a large areal efficiency of about 25%. For obtaining large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. The structure and operational principle of the MEMS stage are described, followed by a design and analysis, the fabrication and measurement results. Experimental results show that the driving ranges of the fabricated stage along the x and y axis were 27$\mu$m, 38$\mu$m at the supplied voltages of 65V, 70V, respectively and the natural frequencies along x and y axis were 180Hz, 310Hz, respectively. The total size of the stage is about 5.9$\times$6.8mm$^2$ and the platform size is about 2.7$\times$3.6mm$^2$.