• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.892-895
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• 2003

This paper describes on RIE(Reactive Ion Etching) characteristics of 3C-SiC(Silicon Carbide) grown on Si(100) wafers. During RIE of 3C-SiC films in this work, $CHF_3$ gas is used to form of polymer as a side wall for excellent anisotropy etching. From this process, etch rates are obtained a $60{\sim}980{\AA}/min$ by various conditions such as $CHF_3$ gas flux, $O_2$ addition ratio, RF power and electrode distance. Also, approximately $40^{\circ}$ mesa structures are successfully formed at 100 mTorr $CHF_3$ gas flow ratio, 200 W RF power and 30 mm electrode distance. Moreover, vertical side wall is fabricated by anisotropy etching with 50% $O_2$ addition ratio and 25 mm electrode distance. Therefore, RIE of 3C-SiC films using $CHF_3$ could be applicable as fabrication process technology for high-temperature 3C-SiC MEMS applications.

• 한국전기전자재료학회논문지
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• 제16권10호
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• pp.914-922
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• 2003

The FFS (fringe-field switching) mode was known to exhibit both a wide viewing angle and high transmittance, especially when using a liquid crystal with negative dielectric anisotropy. We have studied cell gap-dependent electrode-optic characteristics of the FFS mode using the LC with negative dielectric anisotropy. In case of a small cell gap of 2 ${\mu}$m, the transmittance at the center of pixel and common electrodes is relatively low because effect of surface anchoring that holds the LC to the initial state is larger than that in a large cell gap of 4 .urn such that the LCs in those regions cannot rotate enough. However, in case of a large cell gap of 4 .urn, the effect of surface anchoring becomes relatively small so that the LCs at the center of pixel and common electrode can be twisted enough by applied voltage, giving rise to high transmittance. Therefore, we can conclude that the light efficiency is dependent on the cell gap.

• 자원환경지질
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• 제36권1호
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• pp.49-58
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• 2003

대수층의 수리적 이방성 분석을 위하여 시험정이 규칙적으로 배열된 두 곳의 실험현장에 대하여 양수시험 전후에 장기간의 자연전위 모니터링을 수행하였으며, 자연전위법 적용 이전 단계에서 지표 전기비저항탐사, 노말비저항검층 및 순간수위변화시험을 이용하여 대수층의 수리지질학적 구조를 파악하였다. 최근에 제안된 수치 모델을 이용하여 두 실험현장에 대한 자연전위 모니터링 자료를 해석한 결과 피압 대수층의 특성이 나타나며, 자연전위 자료로 등전위 분포도를 작성한 결과 다양한 방법에서 얻어진 대수층의 이방성 방향과 일치됨을 확인하였다. 따라서 이 연구에서 이용된 대수층시험과 자연전위 자료의 복합해석을 이용한 이방성 분석 기법 적용 결과는 관측정이 없는 단공양수시험 시대수층의 수평적인 이방성 등을 추정하는데 유용할 것으로 판단된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.132-135
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• 2002

MI(Magneto-Impedance) sensor which is made by thin films has significantly high detecting sensitivity in weak magnetic field. It also has a merit to be able to build in the low power system. Its structure is simple, which makes it easier to prepare a miniature. In this study, its magnetic permeability and anisotropy field($H_{k}$) as a function of a thickness of sputtered amorphous CoZrNb films with zero-magnetostriction and soft magnetic property are investigated. In order to make a uniaxial anisotropy, film was subjected to the post annealing in a static magnetic field with 1KOe intensity at 250, 300, and $320^{\circ}C$ respectively for 2 hours. Magnetic properties of film are measured by using a MH loop tracer. Its magnetic permeability of a film is measured over the frequency range 1 MHz to 750MHz. And, it was examined on the permeability and impedance to design the MI sensor which acts at 50MHz by thickening a CoZrNb film relatively, and fabricated the MI sensor which acts at the 50MHz.

• 한국전기전자재료학회논문지
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• 제11권10호
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• pp.820-825
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• 1998

We deposited stearic acid LB films by using Langmuir-Blodgett (LB)method and investigated anisotropy electrical conduction characteristics by I-V measurement for horizontal direction and vertical direction. Also, we measured gad response between deposited LB films and organic gas for various temperature(0~8$0^{\circ}C$) by 9MHz At-cut quartz crystal microbalance. The LB films have electrical conduction characteristics such as semiconducting and insulating properties. The is, the conductivity of LB films for the horizontal and vertical direction is about 10\ulcornerS/cm and 10\ulcorners/cm, respectively. the frequency shift of stearic acid LB films for the organic gases depended on the mass change by the surface adsorption and the inner penetration to the sensing films. The resonant frequency shift of the quartz crystal microbalance for temperature properties of LB films is thought to the effect of the rearrangement or the damage pf LB films above the melting point and the mobility increasement of the organic gas by the temperature rising.

• 한국자기학회지
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• 제15권5호
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• pp.265-269
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• 2005

강자성 공명 측정을 통하여 다양한 층 구성을 갖는 교환 바이어스 박막들의 교환 결합 특성에 대해 연구하였다. 공명자기장의 각도의존 실험을 통하여 일축방향이방성 자기장과 일축이방성 자기장을 구하여 분석하였다. NiFe 단일 박막과 비교하여 교환 바이어스된 NiFe/IrMn, IrMn/NiFe/IrMn, NiFe/IrMn/CoFe 박막들은 큰 일축방향이방성 자기장을 나타내었으며, 일축이방성 자기장 또한 큰 값을 나타내었다. 그러나 NiFe/Cu/IrMn의 경우, Cu의 두께가 두꺼울 때는 매우 작은 일축방향이방성 자기장을 나타내었으며, NiFe 단일 박막과 비슷한 크기의 일축이방성 자기장을 나타내었다. NiFe/IrMn/CoFe 박막의 경우 NiFe와 CoFe 강자성층들에 의해 두 개의 공명 자기장이 나타났다. 그 외에 공명 자기장의 선폭에 관한 분석이 교환 바이어스 특성과 연관하여 논의되어졌다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1295-1297
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• 1994

At 34 at% Co-Fe, the aluminum anodic oxidized (alumite) films of particle diameter $150{\AA}$ have large perpendicular anisotropy energy and high coercive force. However, for the samples of particle diameter larger than $450{\AA}$, the bottom of each particle forms abnormal part called branch-shaped different from that of particle diameter $150{\AA}$. In this case the magnetic anisotropy energy Ku was about zero at the compositions of 45 and 75 at% Co. Furthermore, at tile compositions from 50 to 70 at% Co, the values of Ku became negative value. We confirmed that Fe-C deposited the bottom of particle orients very strongly and it has a large influence upon the magnetic anisotropy energy.

• Bulletin of the Korean Chemical Society
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• 제34권2호
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• pp.629-632
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• 2013

Many properties of inorganic compounds are sensitive to changes in the point-defect concentrations. In minerals, such changes are influenced by temperature, pressure, and chemical impurities. Olivines form an important class of minerals and are magnesium-rich solid solutions consisting of the orthosilicates forsterite $Mg_2SiO_4$ and the fayalite $Fe_2SiO_4$. Orthosilicates have an orthorhombic crystal structure and exhibit anisotropic electronic and ionic transport properties. We examined the anisotropy of the electrical conductivity of $Fe_2SiO_4$ under the assumption that the electronic conduction in $Fe_2SiO_4$ occurs via a small polaron hopping mechanism. The anisotropic electrical conductivity is well explained by the electron transfer integrals obtained from the spin dimer analysis based on tight-binding calculations. The latter analysis is expected to provide insight into the anisotropic electrical conductivities of other magnetic insulators of transition metal oxides.

• E2M - 전기 전자와 첨단 소재
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• 제16권1호
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• pp.61.1-61
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• 2003

• E2M - 전기 전자와 첨단 소재
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• 제7권6호
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• pp.511-519
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• 1994

The effect of the deposition conditions, such as the base pressure, working pressure, sputtering power, pre-sputtering, and deposition thickness in facing targets sputtering system(FTS), on the oxidation of the TbFeCo thin films was studied by investigating the magneto-optical properties as well as oxygen analysis by the AES depth profiles. The results showed that the base pressure did not affect the magnetic properties so much, probably due to the short flight distance of the sputtered particles. At the higher sputtering power and lower working pressure with pre-sputtering the oxidation of TbFeCo thin films was decreased. As the film thickness increased the TbFeCo thin films showed the perpendicular anisotropy from in-plane anisotropy overcoming the oxidation effect at the beginning of the sputtering.