• ETRI Journal
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• v.30 no.5
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• pp.723-728
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• 2008

In this paper, a simple transmission line model for an edge-coupled patch antenna is presented. The coupled section is modeled with a lump network which represents the mutual admittance between patches and from patch to ground. Theoretical analysis of two edge-coupled patch antenna models are compared by simulation and experiment in antennas designed to operate at the 2 GHz band. The proposed model predicts the return loss of the antenna accurately.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.11 no.6
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• pp.388-395
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• 1986

Dispersion characteristics of shielded single, coupled and edge-offset microstrip structures are investigated by using hybrid mode analysis with Galerkin's method in the spectral domain. Two new basis functions for the longitudinal strip current are proposed and convergence rates of the solutions for the basis functions are compared. Current distribution of the coupled line is obtaind from that of the single line by using shift theorem of the Fourier transform. In addition, effects of off-centered inner strip conductor on dispersion are also discussed Numerical results include various structual parameters and are compared with other available data and good agreements are observed.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.13 no.10
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• pp.1078-1082
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• 2002

In this paper, we have studied the dependence of insertion loss of a microstrip stepped impedance lowpass filter with coupled open stubs. Coupling mechanisms in the filter depend not only on the transmission line width of the filter but also the gap width of coupled open stubs and three attenuation poles are created with the proper conditions. Also edge capacitance between open stubs play an important role in having three attenuation Poles. We verify the results by obtaining [S] matrices.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.15 no.11
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• pp.1100-1107
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• 2004

In this paper, a new design method fur tapped coupled-line filters has been developed. The design equations for this tapped-line filter have been obtained using a new equivalent circuit model of tapped lines. These tapped-lines replace input/output coupled lines of the conventional edge coupled-line filters, which tend to have very narrow line gaps(few mils). Therefore, tapped coupled-line filters tend to be less sensitive to filter fabrication tolerances and to be easily fabricated using milling tools. The new filter design algorithm allows very accurate filter design for frequencies up to 20 GHz and bandwidth less than 20 %.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1117-1119
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• 1999

An edge finite element method is applied to calculate the field distribution of a coupled waveguide structure. We compares a node based finite element method with the edge element one. For 2-d eigenvalue problems of waveguide structures, the former generates spurious eigenmodes, but the latter dose not. Using an simple rectangular waveguide, we implement both methods to obtain some results of field computation in waveguide. The paper shows that the finite element method using edge elements succeeds in suppressing spurious solutions.

• Journal of Surface Science and Engineering
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• v.46 no.3
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• pp.133-138
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• 2013

We have developed a 2D axi-symmetric numerical model for an inductively coupled plasma system in order to analyze gas mixing effect through a narrow gap shower head. For frictional flow, holes of 0.5 mm diameter and 2 mm length are approximately modeled in 2D. Gas velocity distribution 10 mm below the shower head showed 2 times difference between the center and the edge at 10 mTorr. At 10 mm above the wafer, it was increased to 6 times difference due to the pumping duct effect. The model with a 5 mm height buffer region of a shower head showed reasonable behavior of Ar discharge. The density of Ar metastable showed additional peak inside the buffer region around the edge holes.

• Computers and Concrete
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• v.16 no.4
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• pp.605-623
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• 2015

A coupled experimental and numerical study of shear fracture in the edge-notched beam specimens of quasi-brittle materials (concrete-like materials) are carried out using four point bending flexural tests. The crack initiation, propagation and breaking process of beam specimens are experimentally studied by producing the double inclined edge notches with different ligament angles in beams under four point bending. The effects of ligament angles on the shear fracturing path in the bridge areas of the double edge-notched beam specimens are studied. Moreover, the influence of the inclined edge notches on the shear-fracture behavior of double edge-notched beam specimens which represents a practical crack orientation is investigated. The same specimens are numerically simulated by an indirect boundary element method known as displacement discontinuity method. These numerical results are compared with the performed experimental results proving the accuracy and validity of the proposed study.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.9 no.2
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• pp.253-264
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• 1998

In this paper, a design method for directional couplers using bilevel microstrip substrates is proposed. This kind of broadside-coupled coupler provides large coupling factors and broadband characteristics which can not be provided by conventional edge-coupled couplers. Physical dimensions needed for design are obtained by numerical analysis of characteristic parameters of the coupler using the least squares residual method, a kind of variational method, and an eigenvalue problem analysis method. A 3[dB] directional coupler is designed by the proposed method at the center frequency of 1 GHz, built, and tested. The validation and accuracy of the method are confirmed by comparing the numerical results with the experimental results.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.2
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• pp.39-44
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• 1994

A theoretical method has been considered for the analysis of a cylindrical edge-slot antenna which belongs to a class of circumferential slot antennas that are suitable for conformal mounting on conducting bodies of revolution. A coupled integral equation is formulated for unknown magnetic currents of both the coaxial aperture and the edge slot, and solved by the moment method. Theoretical values for reflection coefficient obtained based upon the method are compared with our experimental values and other author's results available. There arre good agreement between them.