• Title/Summary/Keyword: dynamic reliability

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Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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The Geodynamic Evolution of the Chugaryeong Fault Valley in a View Point of Paleomagnetism (고지자기학적 관점에서 본 추가령단층곡의 생성과 진화)

  • 이윤수;민경덕;황재하
    • Economic and Environmental Geology
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    • v.34 no.6
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    • pp.555-571
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    • 2001
  • The dynamic evolution of the Chugaryeong fault valley is studied by paleomagnetic works on 163 samples at 16 sites from Late Cretaceous and Quaternary volcanic rocks in the valley. Conglomerate test and stepwised thermal/alternating field demagnetization indicate that all the characteristic directions are of primary origin. Paleomagnetic pole ponsition(216.8$^{\circ}$E/7l .6$^{\circ}$N; dp=7.1$^{\circ}$, dm=10.0$^{\circ}$) for the upper par of the Jijangbong Volcanic Complex Is indistinguishable from the coeval retference pole position from the Gyeongsang Basin, which further substanciates the reliability of the Paleomagnetic data. This indicates the study area has not undergone any tectonic rotation since Late Cretaceous by uy significant reactivation of the Chugaryeong fault valley. The Quaternary pole position (134.2$^{\circ}$E/86.5$^{\circ}$N; $A_{95}$=7.1 $^{\circ}$) from the Jeongog Basalt reflects the present geocentric axial dipole field for the area, supporting the above conclusion. Unlike the upper part, paleomasnelic directions of the lower part of the Jijangbong Volcanic Complex show random distrinution between sites. We interpret that the early stage of the volcanic activity was created by sinistral strike slip motion of the Chugaryeong fault during early Late Cretaceous. The creation and evolution of the Chugaryeong fault valley emphasize the significance of the kinematic FR (folding ruler) model in east Asia.

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A Study of the Anxiety Levels of Hospitalized Psychiatric Patients in Terms of Length of Hospitalization (정신과 입원환자의 입원기간에 따른 불안정도에 관한 연구)

  • 김윤희
    • Journal of Korean Academy of Nursing
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    • v.11 no.1
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    • pp.45-63
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    • 1981
  • This study was done to determine the relationship between the anxiety levels of hospitalized psychiatric patients and various influencing variables. The purpose of this study was to determine factors that may help hospitalized psychiatric patients to experience lower levels of anxiety in relation to changing situations and provide the basic data for a dynamic approach which is important in the field of modern psychiatric nursing that understands and analyses the meaning of patients behavior. The anxiety may produce stress, which is a common experience among all human beings. Patients may merely feel uncomfortable in the state of mild anxiety, however, the severe state could be an obstacle to treatment and recovery from disease. The anxiety of the psychiatric patient is a factor which greatly influencing the patient's behavior, so his disorderd behavior is an expression of defence or pathologically fixed behavior. According the psychiatric patient's anxiety at the time of admission is the concern of the health team. The nurse's special concern has to do with understanding and supporting the patient and meeting his individual needs by frequent close contact during the entire hospitalization period, compared to other teamembers the nurse's responsibility in this regard is greated. So this study emphasizes the necessity of creating conditions these, but above all the psychiatric nurse should create a therapeutic environment by not only regarding the patient's behavior or symptoms but understanding the meaning of them. The subjects of this study were 57 psychiatric patients selected from the K neuropsychiatric hospital located in Kunsan city. Data were collected twice from the same patients within a 24 hour period after admission and 10 days after admission. (September 18th to November 8th, 1980). The data collected method was through direct interview, and the interview time was 20 minutes for each patient. Data analysis included Item Analysis & Internal Consistency Reliability Tests, Percentages, t-test, analysis of variance and stepwise multiple regression analysis. The findings of this study were as follows. A. Test of Hypothesis a. Hypothesis 1 :“The anxiety level of psychiatric patients within 24 hours after admission will be higher than those of the same patients 10 days after admission,”was accepted. (t = 3. 15 ; p < 0.005) b. Hypothesi 2:“The more the number of admissions the higher the level of anxiety related to two categories”, was accepted. (affective anxiety: F = 5.50, p < 0.005, Somatic anxiety: F = 9.12, p <.

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Design of Mobile Agent Model Supporting the Intelligent Path Search (지능형 경로 탐색을 지원하는 이동 에이전트 모델 설계)

  • Ko, Hyun;Kim, Kwang-Myoung;Lee, Yon-Sik
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2002.11a
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    • pp.550-554
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    • 2002
  • In this paper, we design the CORBA-based Mobile-Agent Model (CMAM) which has the capability of the efficient work processing in distributed environment through sensing network traffic and searching the optimal path for migration nodes of mobile agent. In case existing mobile agent model is given various works from user, the network overhead and traffic are increased by increasing of execution module size. Also, if it happens a large quantity of traffics due to migration of nodes according to appointment of the passive host(node) muting schedule by user, it needs much cost for node search time by traffic. Therefore, in this paper, we design a new mobile agent model that assures the reliability of agent's migration through dynamic act on the specific situation according to appointment of the active routing schedule and can minimize agent's work processing time through optimal path search. The proposed model assigns routing schedule of the migration nodes actively using an extended MAFFinder. Also, for decreasing overhead of network by agent's size, it separated by mobile agent including oかy agent calling module and push agent with work executing module based on distributed object type of CORBA. Also, it can reduce the required time for round works of mobile agent through the optimal path search of migration nodes.

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Reliable multi-hop communication for structural health monitoring

  • Nagayama, Tomonori;Moinzadeh, Parya;Mechitov, Kirill;Ushita, Mitsushi;Makihata, Noritoshi;Ieiri, Masataka;Agha, Gul;Spencer, Billie F. Jr.;Fujino, Yozo;Seo, Ju-Won
    • Smart Structures and Systems
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    • v.6 no.5_6
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    • pp.481-504
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    • 2010
  • Wireless smart sensor networks (WSSNs) have been proposed by a number of researchers to evaluate the current condition of civil infrastructure, offering improved understanding of dynamic response through dense instrumentation. As focus moves from laboratory testing to full-scale implementation, the need for multi-hop communication to address issues associated with the large size of civil infrastructure and their limited radio power has become apparent. Multi-hop communication protocols allow sensors to cooperate to reliably deliver data between nodes outside of direct communication range. However, application specific requirements, such as high sampling rates, vast amounts of data to be collected, precise internodal synchronization, and reliable communication, are quite challenging to achieve with generic multi-hop communication protocols. This paper proposes two complementary reliable multi-hop communication solutions for monitoring of civil infrastructure. In the first approach, termed herein General Purpose Multi-hop (GPMH), the wide variety of communication patterns involved in structural health monitoring, particularly in decentralized implementations, are acknowledged to develop a flexible and adaptable any-to-any communication protocol. In the second approach, termed herein Single-Sink Multi-hop (SSMH), an efficient many-to-one protocol utilizing all available RF channels is designed to minimize the time required to collect the large amounts of data generated by dense arrays of sensor nodes. Both protocols adopt the Ad-hoc On-demand Distance Vector (AODV) routing protocol, which provides any-to-any routing and multi-cast capability, and supports a broad range of communication patterns. The proposed implementations refine the routing metric by considering the stability of links, exclude functionality unnecessary in mostly-static WSSNs, and integrate a reliable communication layer with the AODV protocol. These customizations have resulted in robust realizations of multi-hop reliable communication that meet the demands of structural health monitoring.

Greenhouse Gas Reduction from Paddy by Environmentally-Friendly Intermittent Irrigation: A Review (환경 친화적인 간단관개를 통한 논에서의 온실가스 저감)

  • Choi, Joongdae;Uphoff, Norman;Kim, Jonggun;Lee, Suin
    • Journal of Wetlands Research
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    • v.21 no.1
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    • pp.43-56
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    • 2019
  • Irrigated and flooded rice paddy contributes to the greenhouse gas emissions (GHG) that affect climate. This in turn affects the supply and reliability of the water needed for rice production. This dynamic makes current rice production methods foreseeably less sustainable over time while having other undesirable effects. Intermittent irrigation by a means of the system of rice intensification (SRI) and alternate wetting and drying (AWD) methods was reviewed to reduce global warming potential (GWP) from 29% to 90% depending on site-specific characteristics from flooded rice paddy and analyzed to be a promising option for enhancing the productivity of water as well, an increasingly constraining resource. Additional benefits associated with the SRI/AWD can be less arsenic in the grain and less degradation of water quality in the run-off from rice paddies. Adoption and expansion of intermittent irrigation of SRI/AWD may require costly public and private investments in irrigation infrastructure that can precisely make irrigation control, and the involvement and upgrading of water management agencies and farmer organizations to enhance management capabilities. Private and public collaboration as a means of earning carbon credit under the clean-development mechanism (CDM) with SRI/AWD for industries to meet as a part of their GHG emission quota as well as a social contribution and publicity program could contribute to adopt intermittent irrigation and rural investment and development. Also, inclusion of SRI and AWD in programs designed under CDM and/or in official development assistance (ODA) projects could contribute to climate-change mitigation and help to achieve UN sustainable development goals (SDGs).

Case of Dynamic Performance Optimization for Hydraulic Drifter (유압 드리프터의 동적성능 최적화 사례)

  • Noh, Dae-kyung;Lee, Dae-Hee;Jang, Joo-Sup;Yun, Joo-Seop;Lee, Dong-Won
    • Journal of the Korea Society for Simulation
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    • v.28 no.2
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    • pp.35-48
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    • 2019
  • Domestic hydraulic drifters till now have been developed by benchmarking products from overseas leading companies. However, they do not have excellent impact performance as they are not suitable for characteristics (large flow rate and low pressure) of Korean hydraulic drill power pack, and therefore, research on the optimum design has not made much headway. This study performs multi-objective function optimization for hydraulic drifters whose capacity has been redesigned to deal with the large flow rate, and also with the help of this function, it aims to improve impact power and reduce supply and surge pressure. A summary of the research study is as follows: First, we set goals for improving impact power, supply pressure, and surge pressure, and then perform multi-objective function optimization on them. After that, we secure the reliability of the optimized analytical model by comparing the test results of the prototype built by the optimized design with the analysis results of the analytical model. This study used SimulationX, that is the hydraulic system analysis software, and EasyDesign, which is a multi-objective function optimization program. Through this research, we have achieved the results that satisfy the goal of developing high power drifters suitable for Korean type hydraulic drills.

Test and Evaluation for GNSS based Lane Level Precise Positioning User System (위성항법 기반 차로구분 정밀위치결정 사용자 시스템 시험 평가)

  • Lee, Jung-Hoon;Lee, Sangwoo;Ahn, Jongsun;Im, Sunghyuck;Choi, Yunseong;Jang, Youngsu;Lee, Dongchul;Heo, Moon-Beom
    • Journal of Advanced Navigation Technology
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    • v.22 no.6
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    • pp.566-576
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    • 2018
  • The C-ITS requires the lane level positioning of the vehicle in the land transportation environment, and it is most effective to utilize the GNSS. In the precision positioning system based on satellite navigation, the evaluation of dynamic environment of lane level positioning performance should be accompanied and the evaluation system configuration should be preceded. In this paper, we selected performance indicators, assessment equipment, and reliability of reference equipment for evaluation of precision positioning user systems based on the GNSS. The performance evaluation system described above is applied to a real system, and the performance evaluation tool developed for the evaluation system is described. The numerical performance evaluation was carried out based on the data collected by carrying out the actual testbed driving. The performance evaluation by the actual driving trajectory and driving image comparison was performed to derive and analyse the evaluation results of the vehicle lane level positioning user system.

Seismic Performance Evaluation of Concrete Anchors used in Power Plant Equipment by Shaking Table Tests (진동대 실험을 통한 발전기기용 콘크리트 앵커의 성능평가)

  • Lee, Sang-Moon;Jeon, Bub-Gyu;Jung, Woo-Young
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.41 no.1
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    • pp.21-28
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    • 2021
  • The main purpose of this study is to assess the safety of the fixed anchorages subjected to the seismic motion for an operating facilities in the actual power plant. Thus, the experimental study was conducted to investigate the load response in the event of an actual seismic to the anchorages of a nonstructural components. Since there are economic and spatial constraints to study nonstructural components that actually have various forms, alternative test specimens of steel frames with mass were built and the shaking table test was carried out. In order to evaluate the dynamic characteristics and seismic performance, the natural frequency of the target structure was identified through the shaking table test and then the load response characteristics of the anchorage were evaluated by generating an artificial seismic effect like actual seismic. Finally, the structural stiffness was reinforced by fixing the steel frame to the test specimen using bolts, thereby reducing the load transmitted to the anchorage. It will be carried out on the reliability verification of the experiments and areas that have not been carried out due to the site conditions through the analytical approach in the future.

Development of a Design Seismic Wave Time History Generation Technique Corresponding to the Recorded Seismic Wave-Based Design Response Spectrum (계측 지진파 기반 설계응답스펙트럼에 상응하는 설계 지진파 시간이력 생성 기법 개발)

  • Oh, Hyun Ju;Park, Hyung Choon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.41 no.6
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    • pp.687-695
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    • 2021
  • With the recent occurrence of large-scale earthquakes in Korea, the importance of seismic design has greatly increased. Seismic design standards stipulate that dynamic time history analysis be performed for important or special structures. In the seismic analysis and design of such structures, determining a rational design input seismic wave is a very important factor in ensuring the reliability of the analysis and design. In the seismic design standards, rational design seismic waves must reflect the characteristics of the area (fault) and satisfy the design response spectrum for each seismic performance level. This requirement can be partially satisfied by modifying the actual seismic wave measured in the area (fault) according to the design response spectrum. In this study, a method of correcting and generating seismic wave time histories according to the design response spectrum based on actual measured seismic waves using the harmonic wavelet transform was proposed. To examine the applicability of the proposed technique, the technique was applied to earthquakes of magnitude 5.8 and 5.4, respectively, that occurred in Gyeongju (2016) and Pohang (2017), and the seismic wave time histories corresponding to the design response spectrum were modified and generated.