Effect of slurry abrasive particle on dishing in Shallow Trench Isolation Chemical Mechanical Polishing (STI-CMP공정에서 슬러리 연마입자가 dishing에 미치는 영향)
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- Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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- 2003.11a
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- pp.402-402
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- 2003