• 연구논문집
• /
• 통권33호
• /
• pp.99-109
• /
• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• 상하수도학회지
• /
• 제25권1호
• /
• pp.41-49
• /
• 2011

The diffuser which is conventionally adapted to MBR, has problem that decreasing the cleaning effect of membrane module by inflexible air supply due to the occlusion of sludge from diffuser hole. To solve this problem, diffuser structure of submerged module should be improved to discharge sludge which is flow into the diffuser for prevent occlusion in the diffuser. In this study, the structure of the diffuser was reformed to open lower part for preclusion the blocking. And the outlet diameter of the diffuser was drawn through the condition for the depth of water and air rate, to prevent air-leak condition of improved diffuser. Moreover, application is evaluated by comparing test with occlusion effect of the conventional and improved diffuser. From the results, air-water boundary changes are steady with changes of water depth and it shows linear relation about air rate. By using this linear numerical formula, the height of diffuser's outlet can be decided. Also, it displays that it can prevent the occlusion effect during the comparing test. Hereafter, if this diffuser is applied to practical MBR process, the occlusion problem of diffuser will be disappeared.

• 지질공학
• /
• 제31권3호
• /
• pp.433-445
• /
• 2021

고전압 아크 방전에 의한 플라즈마 발파의 유체 침투 효율을 검증하기 위해 실험실 규모의 토사 시료에 대하여 발파 시험을 실시하였다. 이 연구를 위해 대용량 축전기가 포함된 플라즈마 발파 장치와 직경 80 cm, 높이 60 cm 크기의 컬럼형 토사 시료를 제작하였다. 토사 시료로는 사질토와 실트를 7:3 비율로 섞은 A 시료 7개와 9:1 비율로 섞은 B 시료 3개가 제작되었다. A 시료에 플라즈마 발파 없이 수압만으로 유체를 주입했을 때는 시추공 주변으로 국소적인 침투만 발생되었고 침투면적비는 5% 이하로 분석되었다. 플라즈마 발파에 의한 유체 침투 시험은 1 kJ, 4 kJ 그리고 9 kJ의 방전 에너지로 실시되었다. A 시료에 대한 플라즈마 발파 시험에서 유체의 침투면적비는 1회만 발파하였을 때는 16~25%이고 5회 연속 발파 시에는 30~48%로 분석되어, 수압만으로 유체를 주입했을 때보다 침투면적이 최대 9.6배까지 넓어졌다. B 시료에 대한 5회 연속 플라즈마 발파 시험에서 유체의 침투면적비는 33~59%로 분석되어 동일 조건의 A 시료 시험에 비해 침투면적이 1.1~1.4배 정도 넓어졌다. 이러한 결과는 플라즈마 발파 시에 방전 에너지가 클수록, 발파 횟수가 증가할 수록 유체의 침투면적이 증가하며, 투수성이 큰 토양에서 플라즈마 발파가 더욱 효과적임을 보여준다. 유체 침투 효과를 삼차원적인 부피로 분석하기 위해 유체 침투반경을 계산하였다. 수압으로만 유체를 주입했을 때의 침투반경은 9 cm인 반면에, 9 kJ의 에너지로 5회 발파 시에는 침투반경이 27~30 cm로 계산되어 유체 침투 효과가 최대 333%까지 증가되었다. 이러한 연구결과는 투수성이 낮은 실제 오염토양에서 원위치 토양 세정을 실시할 때 플라즈마 발파 기술을 적용하면, 세정제의 전달범위가 증가되어 정화효율이 개선될 수 있다는 것을 보여준다.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2004년도 하계학술대회 논문집 C
• /
• pp.1682-1684
• /
• 2004

In this study, the surface properties of PET film were analyzed after plasma surface treatment. After plasma treatment of surface roughness and XPS were evaluated to analyze the chemical property, while the surface potential decay and surface resistivity was measured to analyze the electrical characteristic. When plasma discharge treatment was conducted for less than 10 minutes, the electrical insulating property was found to be improved through evaporation of low molecular weight materials and cleaning of surface. However, when the treatment was conducted for more than 10 minutes, the insulating property was decreased due to excessive discharge energy. Analysis of chemical characteristics showed that 10-minute treatment resulted in increase of C-O and O=C-O. However, when treated for more than 10 minutes, they were relatively decreased.

• 환경위생공학
• /
• 제17권1호
• /
• pp.36-40
• /
• 2002

The purpose of study was to suggest an investigation of citizen's attitude on harmful insects in house. This study was consisted of four parts, such as basic investigation (housing shape, housing material, the period of house constructed, a cleaning condition), condition of kitchen, condition of living room condition of bathroom. The environmental pollution was increased by the development of industry and urbanization in modern. And also the clean of house has related with air quality such as pollutants and harmful insects etc. Because dwelling shape of urban come to be crowded, shut tightly and high buildings, the air quality of indoor was gradually polluted by several irregular cause. In one of housing pollution, the harmful insects was important any other than indoor air pollution. The problems of kitchen were the odor of food waste, discharge system of sewage and harmful insects. The important issues of living room were mold and construction materials, then important them of bathroom were easing nature and discharge system of sewage. A kind of the harmful insects in house investigated cockroach> mosquito> ant>fly. Finally, it appeared that the control of harmful insects can be applied to the improvement of indoor air pollutant which are difficult to be controlled in house.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2008년도 추계학술대회B
• /
• pp.2116-2121
• /
• 2008

Removal of particles at rich $CO_2$ condition has been important in the gas cleaning for $CO_2$ capture in Oxy-fuel combustion. Electrostatic precipitators (ESPs) have been widely used to remove particles in exhaust gases from present air combustion. However, few studies on characteristics of ESPs under a $CO_2$ rich gas condition have been conducted. In this study, we investigated integration of electrostatic precipitators (ESP) for removing submicron particles along with corona discharge characteristics and collection efficiency of submicron particles at $CO_2$ rich condition. The overall performance of ESP is represented by collection efficiency as function of energy consumption. The experiment results showed that higher the concentration of $CO_2$ gas, the corona discharge currents were lower at the same applied voltages and the spark over occurred at lower voltages, and the collection efficiency of submicron particles under 50, 80% $CO_2$ conditions was much lower than that under 100% Air.

• 한국표면공학회지
• /
• 제48권5호
• /
• pp.245-252
• /
• 2015

In recent years, the cleaning and activation technology of surfaces using atmospheric plasma as well as the deposition technology for coating using atmospheric plasma have been demonstrated conclusively and drawn increasing industrial attention. Especially, due to the simplicity, the technology using atmospheric plasma enhanced chemical vapor deposition has been widely studied from many researchers. The plasma source type commonly used as the stabilization of diffuse glow discharges for atmospheric pressure plasma enhanced chemical vapor deposition pressure is the dielectric barrier discharge. In this review paper, some kinds of modified dielectric barrier discharge type will be presented. And, the characteristics of silicon based compound such as SiOx and SiNx deposited using atmospheric plasma enhanced chemical vapor system will be discussed.

• 한국전기전자재료학회논문지
• /
• 제33권1호
• /
• pp.56-59
• /
• 2020

Porcelain insulators are typically exposed to surface discharge and lightning impulse in service. This study investigates the insulation characteristics of the external and internal discharges of a porcelain insulator with respect to its flashover for a 154 kV transmission line. The experiments are also conducted using a wet flashover test and an impulse test based on the external discharge and the internal penetration, to classify the flashover voltage-time curve of the porcelain insulator. When an impulse with a strength of 2,500 kV/㎲ was applied three times to 6.5 mm ceramic samples, electrical penetration of approximately 70% occurred. The impulse experiment confirmed that the electrical penetration inside the porcelain insulator coincided with the area where the electric field was concentrated. The wet flashover voltage test revealed that the flashover threshold voltage increases by approximately 7% after cleaning of the surface.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권1호
• /
• pp.10-14
• /
• 2004

A large area electron beam generator has been developed for industrial applications, for example, waste water cleaning, flue gas treatment, and food pasteurization. The operational principle is based on the emission of secondary electrons from the cathode when ions in the plasma contact the cathode, which are accelerated toward the exit window by the gradient of the electric potential. Conventional electron beam generators require an electron beam scanning mechanism because a small area thermal electron emitter is used. The electron beam of the large area electron beam generator does not need to be scanned over target material because the beam area is considerable. We have fabricated a large area electron beam generator with peak energy of 200keV, and a beam diameter of 200mm. The electron beam current has been investigated as a function of accelerating voltage and distance from the extracting window while its radial distribution in front of the extracting window has been also measured.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2006년도 춘계학술대회 논문집 전기설비전문위원
• /
• pp.71-73
• /
• 2006

Our company(KOWACO) has periodically performed off-line diagnostic test for 14 hydro generators (rated 11 kV over) for 15 years. In this paper, we summarized results of dissipation factor tip-up test and partial discharge test about these generators. Among these, we chose two generators and performed insulation reinforcement (cleaning and varnish Painting). We compared change of insulation condition for the stator winding based upon off-line diagnostic test result before and after repair. Test result shows that insulation condition was improved after insulation reinforcement. This insulation reinforcement has a function to reduce cause of deterioration, so we can know that it extends lifetime of generator and it is a very important factor for stable operation of facilities.