• 연구논문집
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• s.33
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.1
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• pp.41-49
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• 2011

The diffuser which is conventionally adapted to MBR, has problem that decreasing the cleaning effect of membrane module by inflexible air supply due to the occlusion of sludge from diffuser hole. To solve this problem, diffuser structure of submerged module should be improved to discharge sludge which is flow into the diffuser for prevent occlusion in the diffuser. In this study, the structure of the diffuser was reformed to open lower part for preclusion the blocking. And the outlet diameter of the diffuser was drawn through the condition for the depth of water and air rate, to prevent air-leak condition of improved diffuser. Moreover, application is evaluated by comparing test with occlusion effect of the conventional and improved diffuser. From the results, air-water boundary changes are steady with changes of water depth and it shows linear relation about air rate. By using this linear numerical formula, the height of diffuser's outlet can be decided. Also, it displays that it can prevent the occlusion effect during the comparing test. Hereafter, if this diffuser is applied to practical MBR process, the occlusion problem of diffuser will be disappeared.

• The Journal of Engineering Geology
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• v.31 no.3
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• pp.433-445
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• 2021

Plasma blasting by high voltage arc discharge were performed in laboratory-scale soil samples to investigate the fluid penetration efficiency. A plasma blasting device with a large-capacity capacitor and columnar soil samples with a diameter of 80 cm and a height of 60 cm were prepared. Columnar soil samples consist of seven A-samples mixed with sand and silt by ratio of 7:3 and three B-samples by ratio of 9:1. When fluid was injected into A-sample by pressure without plasma blasting, fluid penetrated into soil only near around the borehole, and penetration area ratio was less than 5%. Fluid was injected by plasma blasting with three different discharge energies of 1 kJ, 4 kJ and 9 kJ. When plasma blasting was performed once in the A-samples, penetration area ratios of the fluid were 16-25%. Penetration area ratios were 30-48% when blastings were executed five times consecutively. The largest penetration area by plasma blasting was 9.6 times larger than that by fluid injection by pressure. This indicates that the higher discharge energy of plasma blasting and the more numbers of blasting are, the larger are fluid penetration areas. When five consecutive plasma blasting were carried out in B-sample, fluid penetration area ratios were 33-59%. Penetration areas into B-samples were 1.1-1.4 times larger than those in A-samples when test conditions were the same, indicating that the higher permeability of soil is, the larger is fluid penetration area. The fluid penetration radius was calculated to figure out fluid penetration volume. When the fluid was injected by pressure, the penetration radius was 9 cm. Whereas, the penetration radius was 27-30 cm when blasting were performed 5 times with energy of 9 kJ. The radius increased up to 333% by plasma blasting. All these results indicate that cleaning agent penetrates further and remediation efficiency of contaminated soil will be improved if plasma blasting technology is applied to in situ cleaning of contaminated soil with low permeability.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1682-1684
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• 2004

In this study, the surface properties of PET film were analyzed after plasma surface treatment. After plasma treatment of surface roughness and XPS were evaluated to analyze the chemical property, while the surface potential decay and surface resistivity was measured to analyze the electrical characteristic. When plasma discharge treatment was conducted for less than 10 minutes, the electrical insulating property was found to be improved through evaporation of low molecular weight materials and cleaning of surface. However, when the treatment was conducted for more than 10 minutes, the insulating property was decreased due to excessive discharge energy. Analysis of chemical characteristics showed that 10-minute treatment resulted in increase of C-O and O=C-O. However, when treated for more than 10 minutes, they were relatively decreased.

• Journal of environmental and Sanitary engineering
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• v.17 no.1
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• pp.36-40
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• 2002

The purpose of study was to suggest an investigation of citizen's attitude on harmful insects in house. This study was consisted of four parts, such as basic investigation (housing shape, housing material, the period of house constructed, a cleaning condition), condition of kitchen, condition of living room condition of bathroom. The environmental pollution was increased by the development of industry and urbanization in modern. And also the clean of house has related with air quality such as pollutants and harmful insects etc. Because dwelling shape of urban come to be crowded, shut tightly and high buildings, the air quality of indoor was gradually polluted by several irregular cause. In one of housing pollution, the harmful insects was important any other than indoor air pollution. The problems of kitchen were the odor of food waste, discharge system of sewage and harmful insects. The important issues of living room were mold and construction materials, then important them of bathroom were easing nature and discharge system of sewage. A kind of the harmful insects in house investigated cockroach> mosquito> ant>fly. Finally, it appeared that the control of harmful insects can be applied to the improvement of indoor air pollutant which are difficult to be controlled in house.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2116-2121
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• 2008

Removal of particles at rich $CO_2$ condition has been important in the gas cleaning for $CO_2$ capture in Oxy-fuel combustion. Electrostatic precipitators (ESPs) have been widely used to remove particles in exhaust gases from present air combustion. However, few studies on characteristics of ESPs under a $CO_2$ rich gas condition have been conducted. In this study, we investigated integration of electrostatic precipitators (ESP) for removing submicron particles along with corona discharge characteristics and collection efficiency of submicron particles at $CO_2$ rich condition. The overall performance of ESP is represented by collection efficiency as function of energy consumption. The experiment results showed that higher the concentration of $CO_2$ gas, the corona discharge currents were lower at the same applied voltages and the spark over occurred at lower voltages, and the collection efficiency of submicron particles under 50, 80% $CO_2$ conditions was much lower than that under 100% Air.

• Journal of the Korean institute of surface engineering
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• v.48 no.5
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• pp.245-252
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• 2015

In recent years, the cleaning and activation technology of surfaces using atmospheric plasma as well as the deposition technology for coating using atmospheric plasma have been demonstrated conclusively and drawn increasing industrial attention. Especially, due to the simplicity, the technology using atmospheric plasma enhanced chemical vapor deposition has been widely studied from many researchers. The plasma source type commonly used as the stabilization of diffuse glow discharges for atmospheric pressure plasma enhanced chemical vapor deposition pressure is the dielectric barrier discharge. In this review paper, some kinds of modified dielectric barrier discharge type will be presented. And, the characteristics of silicon based compound such as SiOx and SiNx deposited using atmospheric plasma enhanced chemical vapor system will be discussed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.1
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• pp.56-59
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• 2020

Porcelain insulators are typically exposed to surface discharge and lightning impulse in service. This study investigates the insulation characteristics of the external and internal discharges of a porcelain insulator with respect to its flashover for a 154 kV transmission line. The experiments are also conducted using a wet flashover test and an impulse test based on the external discharge and the internal penetration, to classify the flashover voltage-time curve of the porcelain insulator. When an impulse with a strength of 2,500 kV/㎲ was applied three times to 6.5 mm ceramic samples, electrical penetration of approximately 70% occurred. The impulse experiment confirmed that the electrical penetration inside the porcelain insulator coincided with the area where the electric field was concentrated. The wet flashover voltage test revealed that the flashover threshold voltage increases by approximately 7% after cleaning of the surface.

• KIEE International Transactions on Electrophysics and Applications
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• v.4C no.1
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• pp.10-14
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• 2004

A large area electron beam generator has been developed for industrial applications, for example, waste water cleaning, flue gas treatment, and food pasteurization. The operational principle is based on the emission of secondary electrons from the cathode when ions in the plasma contact the cathode, which are accelerated toward the exit window by the gradient of the electric potential. Conventional electron beam generators require an electron beam scanning mechanism because a small area thermal electron emitter is used. The electron beam of the large area electron beam generator does not need to be scanned over target material because the beam area is considerable. We have fabricated a large area electron beam generator with peak energy of 200keV, and a beam diameter of 200mm. The electron beam current has been investigated as a function of accelerating voltage and distance from the extracting window while its radial distribution in front of the extracting window has been also measured.

• Proceedings of the KIEE Conference
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• 2006.05a
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• pp.71-73
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• 2006

Our company(KOWACO) has periodically performed off-line diagnostic test for 14 hydro generators (rated 11 kV over) for 15 years. In this paper, we summarized results of dissipation factor tip-up test and partial discharge test about these generators. Among these, we chose two generators and performed insulation reinforcement (cleaning and varnish Painting). We compared change of insulation condition for the stator winding based upon off-line diagnostic test result before and after repair. Test result shows that insulation condition was improved after insulation reinforcement. This insulation reinforcement has a function to reduce cause of deterioration, so we can know that it extends lifetime of generator and it is a very important factor for stable operation of facilities.